A Prototype Wafer Processing TCAD Tool Composed of BMD Simulation Module, Metal Gettering and Thermal Stress/Slip Functions for Scaled Device Design Phase

2007 ◽  
pp. 133-136
Author(s):  
T. Okada ◽  
A. Fathurahman ◽  
R. Takeda ◽  
H. Banba ◽  
H. Kubota ◽  
...  
Keyword(s):  
Thermal Stress ◽  
Design Phase ◽  
Device Design ◽  
Wafer Processing

A Latent Issue of Via Resistance: Mechanism and Solution

2018 ◽  
Author(s):  
Wentao Qin ◽  
Scott Donaldson ◽  
Dan Rogers ◽  
Lahcen Boukhanfra ◽  
Julien Thiefain ◽  
...  
Keyword(s):  
Thermal Stress ◽  
Chemical Mechanical Planarization ◽  
Resistance Mechanism ◽  
Formation Enthalpy ◽  
Metal Line ◽  
Device Failure ◽  
Valence Electrons ◽  
Wafer Processing ◽  
Field Failure ◽  
And Tungsten

Abstract Many semiconductor products are manufactured with mature technologies involving the uses of aluminum (Al) lines and tungsten (W) vias. High resistances of the vias were sometimes observed only after electrical or thermal stress. A layer of Ti oxide was found on such a via. In the wafer processing, the post W chemical mechanical planarization (WCMP) cleaning left residual W oxide on the W plugs. Ti from the overlaying metal line spontaneously reduced the W oxide, through which Ti oxide formed. Compared with W oxide, the Ti oxide has a larger formation enthalpy, and the valence electrons of Ti are more tightly bound to the O ion cores. As a result, the Ti oxide is more resistive than the W oxide. Consequently, the die functioned well in the first test in the fab, but the via resistance increased significantly after a thermal stress, which led to device failure in the second test. The NH4OH concentration was therefore increased to more effectively remove residual W oxide, which solved the problem. The thermal stress had prevented the latent issue from becoming a more costly field failure.

ASO GUMBALO SEBAGAI INSPIRAS DALAM PENCIPTAAN SENI LUKIS

2018 ◽  
Vol 7 (2) ◽  
pp. 178
Author(s):  
Satri Yadi ◽  
Yuniarti Munaf ◽  
Dhasono Dhasono
Keyword(s):  
Design Phase ◽  
Symbolic Expression ◽  
Ethical Research ◽  
Process Stage ◽  
Form Processing ◽  
The Future ◽  
The Creation ◽  
Visual Strategies ◽  
Work Done ◽  
Exploration Phase

AbstrakAso Gumbalo dalam penciptaan karya seni lukis diilhami dari kehidupan pengembala yang menjadi inspirasi pencipta yang diungkap melalui media seni lukis dengan mengambil ide “Harapan Pengembala” (Aso Gumbalo). Harapan Gembala dapat diartikan sebagai keinginan, kecendrungan dan dorongan hati yang kuat terhadap sesuatu hal yang ingin direalisasikan untuk menjadikan seorang lebih baik dimasa depan. Pengekspresian ide cipta berangkat dari fenomena Aso Gumbalo yang pencipta ungkap dengan ekspresi simbolik kedalam penciptaan karya seni lukis. Metode penciptaan karya ini melalui tahapan yaitu; 1) Tahap eksplorasi adalah tahap pencarian ide-ide dengan melakukan riset emik dan etik untuk pembuatan karya, 2) Tahap perancangan yaitu tahap pembuatan purwarupa yang akan diwujudkan kedalam bentuk karya seni lukis, 3) Tahap proses garapan karya. Konsep dari penciptaan karya merupakan ekspresi simbolik dengan memanfaatkan idiom tradisi, ekspresi tersebut digambarkan pada perwujudan karya menggunakan strategi media dan strategi visual dengan menggunakan konsep pengolahan bentuk, yaitu disformasi dan transformasi dengan melakukan penggabungan beberapa teknik antara lain, teknik plakat, transparan, tekstur semu dan tekstur nyata. Aso Gumbalo sebagai inspirasi yang diungkapkan dalam bentuk karya seni lukis ekspresi simbolik. Karya-karya yang diciptakan pengkarya disajikan dalam bentukpameran.           Kata Kunci:aso gumbalo, ekspresi simbolik, seni lukis.   AbstractAsoGumbalo in the creation of painting works was inspired from the life of the shepherd who became the inspiration of the creator which revealed through the medium of painting by taking the idea of "Hope of the Shepherd" (AsoGumbalo). Shepherd Hope can be interpreted as a strong desire, inclination and encouragement towards something that wants to be realized to make someone better in the future. The expression of copyrighted ideas departs from the phenomenon of AsoGumbalo, which the creator expressed with a symbolic expression into the creation of painting. This method of creating works through several stages, namely; 1) The exploration phase is the stage of searching for ideas by conducting emic and ethical research for the production of works, 2) the design phase that is the prototype-making stage which will be realized in the form of painting, 3) the process stage of the work done. The concept of creation of works is a symbolic expression by utilizing traditional idioms, these expressions are depicted in the realization of the work using media strategies and visual strategies by using the concept of form processing, namely deformation and transformation by combining several techniques, such as plaque, transparent, pseudo-texture and real texture. AsoGumbalo as an inspiration expressed in the form of paintings of symbolic expression. works created by artists are presented in the form of exhibitions.  Keywords:asogumbalo, symbolic expression, painting.  

Developing a Pop Up Book Supportive to Narrative-Texts Teaching

2019 ◽  
Vol 1 (2) ◽  
pp. 66
Author(s):  
Khoirunnisa Safitri ◽  
Sudarsono Sudarsono
Keyword(s):  
Narrative Text ◽  
Development Phase ◽  
Design Phase ◽  
Narrative Texts ◽  
Evaluation Result ◽  
Tenth Grade ◽  
Text Reading ◽  
The Media ◽  
Addie Model ◽  
Teaching Learning

This research aims to develop Pop-Up Book as supplementary media to support the teaching of narrative texts and to evaluate whether or not the media are feasible to teach narrative texts to the tenth grade students of SMA Negeri 8 Pontianak. The media consisted of narrative texts with pop-up pictures. They were divided based on the structure of a narrative text. The materials were taken from the students’ textbook that the researcher has simplified. The procedures were adapted from ADDIE Model proposed by Branch and it used three phases, namely, Analyse, Design, and Develop. From analyse phase, it was found that the students needed interesting media that was visually attractive to engage them in the teaching learning process and to support the existing materials. The Design phase covered the aspects, which were the focus of the media, of the materials and the pictures for the media, and the structure of the media. The Development phase concerned the development of the essential parts of the media. According to the evaluation result, the media are considered feasible to be applied by the teachers to teach narrative text reading.

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