Failure Mechanisms in MEMS/NEMS Devices
2007 ◽
pp. 1663-1684
◽
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1986 ◽
Vol 44
◽
pp. 732-733
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1993 ◽
Vol 51
◽
pp. 892-893
2018 ◽
Vol 5
(4)
◽
pp. 186-199
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