Design of n-WO3 Thin Film Hydrogen Sensor with IoT Technology

Author(s):  
Subhashis Roy ◽  
Bikram Biswas ◽  
Bijoy Kantha ◽  
Manas Ranjan Nayak
Keyword(s):  
2020 ◽  
Vol 140 (4) ◽  
pp. 92-96
Author(s):  
Yuto Goda ◽  
Hiroto Shobu ◽  
Kenji Sakai ◽  
Toshihiko Kiwa ◽  
Kenji Kondo ◽  
...  

2006 ◽  
Vol 320 ◽  
pp. 99-102 ◽  
Author(s):  
Kazuki Tajima ◽  
Woosuck Shin ◽  
Maiko Nishibori ◽  
Norimitsu Murayama ◽  
Toshio Itoh ◽  
...  

Micro-thermoelectric hydrogen sensor (micro-THS) with the combination of the thermoelectric effect of Si0.8Ge0.2 thin film and the Pt-catalyzed exothermic reaction of hydrogen oxidation was prepared by microfabrication process. In the viewpoint of high sensitivity of micro-THS, the thermoelectric properties of the Si0.8Ge0.2 thin film could be improved by optimizing carrier concentration using helicon sputtering with an advantage of easy doping control, and sensitivity of the device with this thin film was investigated. As the result, the boron-doped Si0.8Ge0.2 thin film is considered to be the better choice ensuring the reliable monitoring of hydrogen concentration down to ppm level.


2011 ◽  
Vol 7 (4) ◽  
pp. 249-252 ◽  
Author(s):  
Lu-jun Cui ◽  
Hui-chao Shang ◽  
Gang Zhang ◽  
Ze-xiang Zhao ◽  
Jun Zhou

2016 ◽  
Vol 176 ◽  
pp. 232-236 ◽  
Author(s):  
Kamrul Hassan ◽  
A.S.M. Iftekhar Uddin ◽  
Farman Ullah ◽  
Yong Soo Kim ◽  
Gwiy-Sang Chung

Sensors ◽  
2019 ◽  
Vol 19 (16) ◽  
pp. 3560 ◽  
Author(s):  
Wen Wang ◽  
Xueli Liu ◽  
Shengchao Mei ◽  
Mengwei Liu ◽  
Chao Lu ◽  
...  

A Pd-Ni alloy thin-film coated surface acoustic wave (SAW) device is proposed for sensing hydrogen. The Pd-Ni thin-film was sputtered onto the SAW propagation path of a SAW device with a delay line pattern to build the chip-sized hydrogen sensor. The prepared sensor chip was characterized by employing a differential oscillation loop. The effect of the Pd-Ni film thickness on sensing performance was also evaluated, and optimal parameters were determined, allowing for fast response and high sensitivity. Excellent working stability (detection error of 3.7% in half a year), high sensitivity (21.3 kHz/%), and fast response (less than 10 s) were achieved from the 40 nm Pd-Ni alloy thin-film coated sensing device.


2019 ◽  
Vol 785 ◽  
pp. 819-825 ◽  
Author(s):  
Zili Zhang ◽  
Chenbo Yin ◽  
Liu Yang ◽  
Jin Jiang ◽  
Yu Guo

Sign in / Sign up

Export Citation Format

Share Document