Speckle Interferometric Investigation of Argon Pressure-Induced Surface Roughness Modifications in RF-Sputtered MoO3 Film

2021 ◽  
Vol 40 (1) ◽  
Author(s):  
S. Soumya ◽  
R. Arun Kumar ◽  
S. Sreejyothi ◽  
Vimal Raj ◽  
M. S. Swapna ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Argon Pressure ◽  
Interferometric Investigation ◽  
Moo3 Film

Growth and Structure of Metallic Barrie Laye and Interconnect Films I: Exeriments

1999 ◽  
Vol 564 ◽  
Author(s):  
D. L. Windt ◽  
J. Dalla Torre ◽  
G. H. Gilmer ◽  
J. Sapjeta ◽  
R. Kalyanaraman ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Orientation Angle ◽  
Film Surface ◽  
Growth Direction ◽  
Film Structure ◽  
Argon Pressure ◽  
Cu Films ◽  
Force Microscopy ◽  
Si Substrates ◽  
Atomic Force

AbstractWe present experimental results directed at understanding the growth and structure of metallic barrier layer and interconnect films. Numerical simulation results associated with this experimental work are presented in an accompanying paper in these proceedings. Here, thin films of Al, Ti, Cu and Ta have been grown by magnetron sputtering onto oxidized Si substrates. Using a specially-constructed substrate holder, the orientation of the substrate with respect to the growth direction was varied from horizontal to vertical. Films were grown at both low and high argon pressure; in the case of Ta, the cathode power was varied as well. The film structure and in particular the surface roughness was measured by X-ray reflectance and also by atomic force microscopy. We find that the surface roughness increases markedly with orientation angle in the case of Ta and Cu films, and in Ti films grown at high argon pressure. At low pressure, however, the Ti film surface roughness remains constant for all substrate orientations. No variation in roughness with either orientation angle or argon pressure was observed in the Al films. These results suggest that, under certain circumstances, shadowing effects and/or grain orientation (i.e., texture) competition during growth can give rise to lower density, more porous (and thus more rough) films, particularly at large orientation angles, as on sidewalls in sub-micron trenches.

Predictive Modeling of TiN Coating Roughness

2012 ◽  
Vol 626 ◽  
pp. 219-223 ◽  
Author(s):  
Abdul Syukor Mohamad Jaya ◽  
Siti Zaiton Mohd Hashim ◽  
Habibollah Haron ◽  
Muhd Razali Muhamad ◽  
Md Nizam Abd Rahman ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Physical Vapor Deposition ◽  
Prediction Interval ◽  
Argon Pressure ◽  
Quadratic Term ◽  
Process Variables ◽  
Tin Coating ◽  
Coating Surface ◽  
Tin Coatings ◽  
Coating Roughness

In this paper, an approach in modeling surface roughness of Titanium Nitrite (TiN) coating using Response Surface Method (RSM) is implemented. The TiN coatings were formed using Physical Vapor Deposition (PVD) sputtering process. N2pressure, Argon pressure and turntable speed were selected as process variables. Coating surface roughness as an important coating characteristic was characterized using Atomic Force Microscopy (AFM) equipment. Analysis of variance (ANOVA) is used to determine the significant factors influencing resultant TiN coating roughness. Based on that, a quadratic polynomial model equation represented the process variables and coating roughness was developed. The result indicated that the actual coating roughness of validation runs data fell within the 90% prediction interval (PI) and the residual errors were very low. The findings from this study suggested that Argon pressure, quadratic term of N2pressure, quadratic term of turntable speed, interaction between N2pressure and turntable speed, and interaction between Argon pressure and turntable speed influenced the TiN coating surface roughness.

Growth and Structure of Metallic Barrier Layer and Interconnect Films I: Exeriments

1999 ◽  
Vol 562 ◽  
Author(s):  
D. L. Windt ◽  
J. Dalla Tortre ◽  
G. H. Gilmer ◽  
J. Sapjeta ◽  
R. Kalyanaraman ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Barrier Layer ◽  
Orientation Angle ◽  
Film Surface ◽  
Growth Direction ◽  
Film Structure ◽  
Argon Pressure ◽  
Cu Films ◽  
Force Microscopy ◽  
Si Substrates

ABSTRACTWe present experimental results directed at understanding the growth and structure of metallic barrier layer and interconnect films. Numerical simulation results associated with this experimental work are presented in an accompanying paper in these proceedings. Here, thin films of Al, Ti, Cu and Ta have been grown by magnetron sputtering onto oxidized Si substrates. Using a specially-constructed substrate holder, the orientation of the substrate with respect to the growth direction was varied from horizontal to vertical. Films were grown at both low and high argon pressure; in the case of Ta, the cathode power was varied as well. The film structure and in particular the surface roughness was measured by X-ray reflectance and also by atomic force microscopy. We find that the surface roughness increases markedly with orientation angle in the case of Ta and Cu films, and in Ti films grown at high argon pressure. At low pressure, however, the Ti film surface roughness remains constant for all substrate orientations. No variation in roughness with either orientation angle or argon pressure was observed in the Al films. These results suggest that, under certain circumstances, shadowing effects and/or grain orientation (i.e., texture) competition during growth can give rise to lower density, more porous (and thus more rough) films, particularly at large orientation angles, as on sidewalls in sub-micron trenches.

Roughness measurements of nonlinear optical polymer films by scanning tunneling microscopy

1989 ◽  
Vol 47 ◽  
pp. 22-23
Author(s):  
I. H. Musselman ◽  
R.-T. Chen ◽  
P. E. Russell
Keyword(s):  
Surface Roughness ◽  
Scanning Tunneling Microscopy ◽  
Nonlinear Optical ◽  
Polymer Surface ◽  
Light Extinction ◽  
Scanning Tunneling ◽  
Silicon Substrates ◽  
Tunneling Microscopy ◽  
Optical Polymer ◽  
Total Light

Scanning tunneling microscopy (STM) has been used to characterize the surface roughness of nonlinear optical (NLO) polymers. A review of STM of polymer surfaces is included in this volume. The NLO polymers are instrumental in the development of electrooptical waveguide devices, the most fundamental of which is the modulator. The most common modulator design is the Mach Zehnder interferometer, in which the input light is split into two legs and then recombined into a common output within the two dimensional waveguide. A π phase retardation, resulting in total light extinction at the output of the interferometer, can be achieved by changing the refractive index of one leg with respect to the other using the electrooptic effect. For best device performance, it is essential that the NLO polymer exhibit minimal surface roughness in order to reduce light scattering. Scanning tunneling microscopy, with its high lateral and vertical resolution, is capable of quantifying the NLO polymer surface roughness induced by processing. Results are presented below in which STM was used to measure the surface roughness of films produced by spin-coating NLO-active polymers onto silicon substrates.

Surface roughness measurements of vanadium-contaminated fluidized cracking catalysts by atomic force microscopy

1996 ◽  
Vol 54 ◽  
pp. 866-867
Author(s):  
H. Kinney ◽  
M.L. Occelli ◽  
S.A.C. Gould
Keyword(s):  
Surface Roughness ◽  
Zeolite Y ◽  
Atomic Level ◽  
Microporous Structure ◽  
Contact Mode ◽  
Force Microscopy ◽  
Atomic Force ◽  
Before And After ◽  
Roughness Measurements ◽  
Cracking Catalysts

For this study we have used a contact mode atomic force microscope (AFM) to study to topography of fluidized cracking catalysts (FCC), before and after contamination with 5% vanadium. We selected the AFM because of its ability to well characterize the surface roughness of materials down to the atomic level. It is believed that the cracking in the FCCs occurs mainly on the catalysts top 10-15 μm suggesting that the surface corrugation could play a key role in the FCCs microactivity properties. To test this hypothesis, we chose vanadium as a contaminate because this metal is capable of irreversibly destroying the FCC crystallinity as well as it microporous structure. In addition, we wanted to examine the extent to which steaming affects the vanadium contaminated FCC. Using the AFM, we measured the surface roughness of FCCs, before and after contamination and after steaming.We obtained our FCC (GRZ-1) from Davison. The FCC is generated so that it contains and estimated 35% rare earth exchaged zeolite Y, 50% kaolin and 15% binder.

Effects of Process Parameters on Surface Roughness and MRR in the hard turning of EN 36 steel

2018 ◽  
pp. 102-110
Author(s):  
Amritpal Singh ◽  
Rakesh Kumar
Keyword(s):  
Surface Roughness ◽  
Material Removal Rate ◽  
Material Removal ◽  
Hard Turning ◽  
Control Parameter ◽  
Removal Rate ◽  
Cutting Speed ◽  
Depth Of Cut ◽  
Cutting Condition ◽  
Dry Cutting

In the present study, Experimental investigation of the effects of various cutting parameters on the response parameters in the hard turning of EN36 steel under the dry cutting condition is done. The input control parameters selected for the present work was the cutting speed, feed and depth of cut. The objective of the present work is to minimize the surface roughness to obtain better surface finish and maximization of material removal rate for better productivity. The design of experiments was done with the help of Taguchi L9 orthogonal array. Analysis of variance (ANOVA) was used to find out the significance of the input parameters on the response parameters. Percentage contribution for each control parameter was calculated using ANOVA with 95 % confidence value. From results, it was observed that feed is the most significant factor for surface roughness and the depth of cut is the most significant control parameter for Material removal rate.

INFLUENCE THE QUENCHING AND TEMPERING ON THE MICROSTRUCTURE, MECHANICAL PROPERTIES AND SURFACE ROUGHNESS, OF MEDIUM CARBON STEEL

2018 ◽  
Vol 18 (1) ◽  
pp. 125-135
Author(s):  
Sattar H A Alfatlawi
Keyword(s):  
Mechanical Properties ◽  
Heat Treatment ◽  
Surface Roughness ◽  
Carbon Steel ◽  
Cold Water ◽  
Medium Carbon Steel ◽  
Medium Carbon ◽  
Heating And Cooling ◽  
Treatment Processes ◽  
Quenching And Tempering

One of ways to improve properties of materials without changing the product shape toobtain the desired engineering applications is heating and cooling under effect of controlledsequence of heat treatment. The main aim of this study was to investigate the effect ofheating and cooling on the surface roughness, microstructure and some selected propertiessuch as the hardness and impact strength of Medium Carbon Steel which treated at differenttypes of heat treatment processes. Heat treatment achieved in this work was respectively,heating, quenching and tempering. The specimens were heated to 850°C and left for 45minutes inside the furnace as a holding time at that temperature, then quenching process wasperformed in four types of quenching media (still air, cold water (2°C), oil and polymersolution), respectively. Thereafter, the samples were tempered at 200°C, 400°C, and 600°Cwith one hour as a soaking time for each temperature, then were all cooled by still air. Whenthe heat treatment process was completed, the surface roughness, hardness, impact strengthand microstructure tests were performed. The results showed a change and clearimprovement of surface roughness, mechanical properties and microstructure afterquenching was achieved, as well as the change that took place due to the increasingtoughness and ductility by reducing of brittleness of samples.

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