Experimental investigation of temperature and relative humidity effects on resonance frequency and quality factor of CMOS-MEMS paddle resonator

Design and modeling of a CMOS MEMS device using 0.35 µm CMOS technology is used to achieve high sensitivity on mass sensing is presented in this paper. The purpose of this paper is to investigate the effect of increasing beams lengths which support the membrane of the device, on the resonance frequency to achieve high sensitivity. A study on the effect of added mass on the device on natural frequency is also conducted. Mass sensitivity of this device is found to be 153 mHz/ng. At damping ratio of 0.0002, the resonant frequency of the resonator is 19.04 kHz with quality factor 3500.

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Influence of Air Pressure on the Resonance Properties of a T-Shaped Quartz Tuning Fork Coupled with Resonator Tubes

Applied Sciences ◽

10.3390/app11177974 ◽

2021 ◽

Vol 11 (17) ◽

pp. 7974

Author(s):

Mariagrazia Olivieri ◽

Andrea Zifarelli ◽

Giansergio Menduni ◽

Michele Di Gioia ◽

Cristoforo Marzocca ◽

...

Keyword(s):

Experimental Investigation ◽

Theoretical Analysis ◽

Resonance Frequency ◽

Quality Factor ◽

Tuning Fork ◽

Quartz Tuning Fork ◽

Air Pressure ◽

Acoustic Coupling ◽

Air Damping ◽

Resonance Properties

A theoretical analysis and experimental investigation of the influence of gas pressure on resonance properties, namely, the quality factor and resonance frequency, of a T-shaped quartz tuning fork (QTF) is reported here. Two configurations are considered: a bare QTF, and a QTF coupled with a pair of resonator tubes (spectrophone). In both configurations, the effect of air on resonance frequency due to the additional inertia on prong motion and the influence of air damping on the quality factor, were analysed. By comparing the bare QTF and the spectrophone results, the effect of pressure on the acoustic coupling between the QTF and the tubes was theoretically modelled and then validated. The results show that acoustic coupling is strongly influenced by air pressure, leading to a shift of resonance frequency and a decrease in the quality factor up to 24%.

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Relative Humidity Effects on Tolerance of the Kuruma Prawn Exposed to 14°C Air

Fisheries Science ◽

10.2331/fishsci.63.194 ◽

1997 ◽

Vol 63 (2) ◽

pp. 194-198

Author(s):

Maher Samet ◽

Kaworu Nakamura

Keyword(s):

Relative Humidity ◽

Humidity Effects

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Experimental investigation on humidity effects on the variations of positive DC corona discharge

2016 IEEE International Power Modulator and High Voltage Conference (IPMHVC) ◽

10.1109/ipmhvc.2016.8012772 ◽

2016 ◽

Cited By ~ 1

Author(s):

Xu Zhang ◽

Xingming Bian ◽

Xiang Cui ◽

Tiebing Lu ◽

Haibing Li ◽

...

Keyword(s):

Experimental Investigation ◽

Corona Discharge ◽

Humidity Effects

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Microprestress-solidification theory-based tensile creep modeling of early-age concrete: Considering temperature and relative humidity effects

Construction and Building Materials ◽

10.1016/j.conbuildmat.2016.10.055 ◽

2016 ◽

Vol 127 ◽

pp. 618-626 ◽

Cited By ~ 25

Author(s):

Ya Wei ◽

Weiqiang Guo ◽

Siming Liang

Keyword(s):

Relative Humidity ◽

Tensile Creep ◽

Early Age ◽

Humidity Effects ◽

Early Age Concrete

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On the Use of Monolayers to Reduce Evaporation From Stationary Water Pools

Journal of Heat Transfer ◽

10.1115/1.2910650 ◽

1993 ◽

Vol 115 (1) ◽

pp. 209-214 ◽

Cited By ~ 9

Author(s):

T. D. Tang ◽

M. T. Pauken ◽

S. M. Jeter ◽

S. I. Abdel-Khalik

Keyword(s):

Experimental Investigation ◽

Relative Humidity ◽

Water Surface ◽

Surface Film ◽

Free Water ◽

Vapor Concentration ◽

Controlled Environment ◽

Stearyl Alcohol ◽

Water Pool ◽

Evaporation Suppression

An experimental investigation has been conducted to quantify the extent by which monolayers of fatty alcohols can reduce evaporation from a deep stationary water pool within a controlled environment. Octadecanol (stearyl alcohol), C17H35–CH2–OH, was chosen as the surface film and ethanol was selected to be the spreading agent. Evaporation suppression of 60 percent was achieved at a water temperature of 25°C with an air temperature of 20°C and a relative humidity of 70 percent. The experimental techniques and data have been validated by comparing the measured evaporation rates for film-free water with earlier data published by other investigators. Data for the evaporation rates of water covered by octadecanol films were correlated as a function of vapor concentration differences between the water surface and air.

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