Electrical conduction mechanisms and dielectric relaxation in Al2O3 thin films deposited by thermal atomic layer deposition
2018 ◽
Vol 86
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pp. 111-114
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2020 ◽
Vol 38
(3)
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pp. 032402
2016 ◽
Vol 31
(7)
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pp. 075003
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2015 ◽
Vol 764-765
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pp. 138-142
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Keyword(s):
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