Effects of aging time in hydrogen peroxide-glycine-based Cu CMP slurry

2022 ◽  
Vol 140 ◽  
pp. 106343
Author(s):  
Juhwan Kim ◽  
Donggeon Kwak ◽  
Jungjae Park ◽  
Takayuki Kubota ◽  
Taesung Kim
Keyword(s):  
Hydrogen Peroxide ◽  
Aging Time ◽  
Effects Of Aging ◽  
Cu Cmp

Effects of Aging on the Solubility of Palladium

1995 ◽  
Vol 412 ◽  
Author(s):  
C. Oda ◽  
H. Yoshikawa ◽  
M. Yui
Keyword(s):  
Aqueous Solution ◽  
Aging Time ◽  
Room Temperature ◽  
High Level Waste ◽  
Anaerobic Conditions ◽  
Dilute Aqueous Solution ◽  
Waste Repository ◽  
Ph Range ◽  
Effects Of Aging ◽  
High Level

AbstractPalladium solubility was measured in a dilute aqueous solution at room temperature in the pH range from 3 to 13 under anaerobic conditions. Crystalline Pd metal was clearly visible and the concentration of palladium in solution decreased gradually with aging time. The palladium concentrations in solution were less than 9.4×10-10M in the pH range from 4 to 10 and increased to 10-7M in the pH range greater than 10. This study suggests that palladium concentrations in certain high-level waste repository environments may be limited by Pd metal and may be less than 10-9M.

scholarly journals Effect of Thermal Aging on the Mechanical Properties of High Tenacity Polyester Yarn

Materials ◽  
2021 ◽  
Vol 14 (7) ◽  
pp. 1666
Author(s):  
Tsegaye Sh. Lemmi ◽  
Marcin Barburski ◽  
Adam Kabziński ◽  
Krzysztof Frukacz
Keyword(s):  
Mechanical Properties ◽  
Structural Change ◽  
Aging Time ◽  
Thermal Aging ◽  
Temperature Influence ◽  
Polyester Yarn ◽  
Textile Materials ◽  
Conveyor Belts ◽  
Effects Of Aging ◽  
Vulcanization Process

Textile materials produced from a high tenacity industrial polyester fiber are most widely used in the mechanical rubber goods industry to reinforce conveyor belts, tire cords, and hoses. Reinforcement of textile rubber undergoes a vulcanization process to adhere the textile materials with the rubber and to enhance the physio-mechanical properties of the product. The vulcanization process has an influence on the textile material being used as a reinforcement. In this work, the effects of aging temperature and time on the high tenacity polyester yarn’s mechanical and surface structural properties were investigated. An experiment was carried out on a pre-activated high tenacity polyester yarn of different linear densities, by aging the yarn specimens under various aging temperatures of 140, 160, 200, and 220 °C for six, twelve, and thirty-five minutes of aging time. The tensile properties and surface structural change in the yarns pre- and post-aging were studied. The investigation illustrates that aging time and temperature influence the surface structure of the fiber, tenacity, and elongation properties of the yarn. Compared to unaged yarn, an almost five times higher percentage of elongation was obtained for the samples aged at 220 °C for 6 min, while the lowest tenacity was obtained for the sample subjected to aging under 220 °C for 35 min.

scholarly journals Effects of aging on mitochondrial hydrogen peroxide emission and calcium retention capacity in rat heart

2018 ◽  
Vol 14 (6) ◽  
pp. 920-926 ◽  
Author(s):  
Mi-Hyun No ◽  
Jun-Won Heo ◽  
Su-Zi Yoo ◽  
Han-Sam Jo ◽  
Dong-Ho Park ◽  
...  
Keyword(s):  
Hydrogen Peroxide ◽  
Rat Heart ◽  
Retention Capacity ◽  
Calcium Retention ◽  
Effects Of Aging ◽  
Calcium Retention Capacity

Research on Effects of Slurry Additives in Cu CMP for ULSI Manufacturing

2006 ◽  
Vol 304-305 ◽  
pp. 350-354 ◽  
Author(s):  
X.J. Li ◽  
Dong Ming Guo ◽  
R.K. Ren ◽  
Zhu Ji Jin
Keyword(s):  
Hydrogen Peroxide ◽  
Surface Roughness ◽  
Electrochemical Impedance Spectroscopy ◽  
Citric Acid ◽  
Chemical Mechanical Polishing ◽  
Electrochemical Impedance ◽  
Etching Rate ◽  
Complexing Agent ◽  
Cu Cmp ◽  
Static Etching

In this paper, in order to analyze the oxidation, dissolution and corrosive inhibition effects of additives in the slurry for copper Chemical-mechanical polishing(CMP), the slurry(pH5) with the peroxide as an oxidant, the citric acid as a complexing agent and the benzotriazole(BTA) as an inhibitor is studied. The static etching rate and polishing rate of the Cu-H2O2-Citric acid-BTA slurry are measured. The electrochemical behavior involved in the dissolution and corrosive inhibition of copper in the solutions containing additives is investigated by the electrochemical impedance spectroscopy (EIS) studies. The surface roughness is measured using ZYGO 3-D surface profiler. It is observed that when the slurry is with only 5wt% peroxide existing, copper is stable and slight etching rate on the copper is produced, and the etching rate is only 8.7nm/min. When 0.6wt% citric acid presents after adding 5wt% hydrogen peroxide, the etching rate will increase by 5.3 times, with a blue complexing product emerging. When the inhibitor BTA is added, the corrosion will be effectively restrained. From the EIS results, the impedance of copper in 5wt% peroxide solution which is in passivation can be greatly decreased by adding the citric acid as a complexing reagent. And the impedance of copper in the solution containing peroxide and citric acid can be increased by the addition of BTA. The surface roughness of the wafer polished with the slurry of 5wt% peroxide+0.6wt% citric acid+0.12wt% BTA slurry is Ra 4.7 Å.

Effects of Microstructures on the Mechanical Properties of Dilute Al-Si Alloys

2007 ◽  
Vol 345-346 ◽  
pp. 821-824
Author(s):  
Keiyu Nakagawa ◽  
Teruto Kanadani
Keyword(s):  
Fatigue Strength ◽  
Grain Boundary ◽  
Grain Boundaries ◽  
Aging Time ◽  
Fracture Elongation ◽  
Micro Cracks ◽  
Hand Fracture ◽  
Stress Cycles ◽  
Effects Of Aging ◽  
The Relationship

In this paper, we investigated effects of aging at 473K on the relationship between microstructure in the vicinity of the grain boundaries and fatigue strength for Al-1.2%Si alloy. Results obtained show the following features. (1) As aging time, tA increase, the tensile strength (σB) and 0.2% proof stress (σ0.2) increase slowly, but gradually decrease after reaching a maximum at around 18 ks. On the other hand, fracture elongation shows an opposite trend, suggesting that at aging times above 18ks, over aging occurs. (2) The fatigue strength lowers with increasing aging time, however, when the aging time is more than 18 ks at 473K, the fatigue strength remains almost the same. (3) When the aging time is more than 6 ks, grain boundary precipitates with a size greater than several 10s of nm are observed. (4) When the aging time is 18 ks, an accumulation of dislocations are observed at the grain boundaries and in the vicinity of grain boundary precipitates, and dislocations increase with the number of stress cycles. (5) When the aging time is more than 6 ks, the fatigue fracture surface is mainly intergranular. These results suggest that reduction of fatigue strength results from propagation of micro-cracks which are initiated at the large precipitates on the grain boundaries.

Effects of aging time and natural antioxidants on the color, lipid oxidation and volatiles of irradiated ground beef

Meat Science ◽  
2008 ◽  
Vol 80 (3) ◽  
pp. 582-591 ◽  
Author(s):  
H.A. Ismail ◽  
E.J. Lee ◽  
K.Y. Ko ◽  
D.U. Ahn
Keyword(s):  
Lipid Oxidation ◽  
Aging Time ◽  
Ground Beef ◽  
Natural Antioxidants ◽  
Effects Of Aging

Applications of Raman Spectroscopy in Cu CMP: In-situ Detection of Chemical Species in the Slurry

2006 ◽  
Vol 914 ◽  
Author(s):  
Siddartha Kondoju ◽  
Pierre Lucas ◽  
Srini Raghavan ◽  
Paul Fischer ◽  
Mansour Moinpour ◽  
...  
Keyword(s):  
Hydrogen Peroxide ◽  
Raman Spectroscopy ◽  
Continuous Flow ◽  
Corrosion Inhibitors ◽  
Chemical Species ◽  
Spectroscopic Techniques ◽  
Paper Work ◽  
In Situ Detection ◽  
Cu Cmp

AbstractSlurries used for copper CMP have a rich chemistry, which may change during the course of polishing due to consumption and decomposition of molecular species. Various aspects, such as small layer thickness (<50 μm), continuous flow of the slurry, and dynamics of the film removal process pose great challenge to the monitoring of slurry components between the pad and the wafer. The slurry constituents such as oxidants and corrosion inhibitors have unique signatures that can be detected using spectroscopic techniques. In this paper, work carried out to explore the use of Raman spectroscopy to detect and quantitate chemical species such as hydroxylamine, benzotriazole and hydrogen peroxide in-situ will be presented. More detailed study pertaining to the protonation of hydroxylamine with respect to the pH will also be presented. An abrasion cell integrated with a Raman spectrometer was used to make the measurements.

Spectroscopic studies on U(VI) incorporation into CaCO3: Effects of aging time and U(VI) concentration

Chemosphere ◽  
2019 ◽  
Vol 220 ◽  
pp. 1100-1107 ◽  
Author(s):  
Zhiwei Niu ◽  
Xiaoyan Wei ◽  
Shirong Qiang ◽  
Hanyu Wu ◽  
Duoqiang Pan ◽  
...  
Keyword(s):  
Aging Time ◽  
Spectroscopic Studies ◽  
Effects Of Aging
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