Applications of Raman Spectroscopy in Cu CMP: In-situ Detection of Chemical Species in the Slurry

2006 ◽  
Vol 914 ◽  
Author(s):  
Siddartha Kondoju ◽  
Pierre Lucas ◽  
Srini Raghavan ◽  
Paul Fischer ◽  
Mansour Moinpour ◽  
...  
Keyword(s):  
Hydrogen Peroxide ◽  
Raman Spectroscopy ◽  
Continuous Flow ◽  
Corrosion Inhibitors ◽  
Chemical Species ◽  
Spectroscopic Techniques ◽  
Paper Work ◽  
In Situ Detection ◽  
Cu Cmp

AbstractSlurries used for copper CMP have a rich chemistry, which may change during the course of polishing due to consumption and decomposition of molecular species. Various aspects, such as small layer thickness (<50 μm), continuous flow of the slurry, and dynamics of the film removal process pose great challenge to the monitoring of slurry components between the pad and the wafer. The slurry constituents such as oxidants and corrosion inhibitors have unique signatures that can be detected using spectroscopic techniques. In this paper, work carried out to explore the use of Raman spectroscopy to detect and quantitate chemical species such as hydroxylamine, benzotriazole and hydrogen peroxide in-situ will be presented. More detailed study pertaining to the protonation of hydroxylamine with respect to the pH will also be presented. An abrasion cell integrated with a Raman spectrometer was used to make the measurements.

In Situ Characterization of Surface Evolution on Titanium in Hydrogen Peroxide Containing Solutions

2005 ◽  
Vol 873 ◽  
Author(s):  
Julie J. Muyco ◽  
Jeremy J. Gray ◽  
Timothy V. Ratto ◽  
Christine A. Orme ◽  
Joanna McKittrick ◽  
...  
Keyword(s):  
Hydrogen Peroxide ◽  
Raman Spectroscopy ◽  
Inflammatory Response ◽  
Electrochemical Techniques ◽  
Chemical Species ◽  
Sample Surface ◽  
Titanium Implants ◽  
The Body ◽  
Surface Evolution

AbstractTitanium implants have been used for decades with success in various applications. The characteristics of titanium that allows acceptance in the body are not well defined. It is known that hydrogen peroxide is a chemical species produced during the inflammatory response following implantation. When titanium is exposed to hydrogen peroxide, a Ti-peroxy gel (TiOOH) is formed. Three possible functions of Ti-peroxy gel are: reduction of the inflammatory response through the reduction of hydrogen peroxide and other reactive oxygen species; creation of a favorable surface for calcium phosphate nucleation; and as a transitional layer between the soft tissue and the stiff titanium. These studies utilized atomic force microscopy (AFM) force spectroscopy, electrochemical techniques, Raman spectroscopy, and optical transparency in situ to define kinetic and mechanical properties of Ti-peroxy gel as it forms on titanium during exposure to hydrogen peroxide. Peaks attributed to Ti-peroxy gel were seen to emerge over the course of several hours using in situ Raman spectroscopy. Force-distance curves suggest a layer that thickens with time on the titanium sample surface.

scholarly journals Iron-Imprinted Single-Atomic Site Catalyst-Based Nanoprobe for Detection of Hydrogen Peroxide in Living Cells

2021 ◽  
Vol 13 (1) ◽  
Author(s):  
Zhaoyuan Lyu ◽  
Shichao Ding ◽  
Maoyu Wang ◽  
Xiaoqing Pan ◽  
Zhenxing Feng ◽  
...  
Keyword(s):  
Hydrogen Peroxide ◽  
Active Site ◽  
Single Atom ◽  
Site Structure ◽  
Atomic Site ◽  
Ion Imprinting ◽  
Active Site Structure ◽  
In Situ Detection ◽  
Colorimetric Biosensing

AbstractFe-based single-atomic site catalysts (SASCs), with the natural metalloproteases-like active site structure, have attracted widespread attention in biocatalysis and biosensing. Precisely, controlling the isolated single-atom Fe-N-C active site structure is crucial to improve the SASCs’ performance. In this work, we use a facile ion-imprinting method (IIM) to synthesize isolated Fe-N-C single-atomic site catalysts (IIM-Fe-SASC). With this method, the ion-imprinting process can precisely control ion at the atomic level and form numerous well-defined single-atomic Fe-N-C sites. The IIM-Fe-SASC shows better peroxidase-like activities than that of non-imprinted references. Due to its excellent properties, IIM-Fe-SASC is an ideal nanoprobe used in the colorimetric biosensing of hydrogen peroxide (H2O2). Using IIM-Fe-SASC as the nanoprobe, in situ detection of H2O2 generated from MDA-MB-231 cells has been successfully demonstrated with satisfactory sensitivity and specificity. This work opens a novel and easy route in designing advanced SASC and provides a sensitive tool for intracellular H2O2 detection.

Feasibility Study of Raman Spectroscopy as a Tool to Investigate the Liquid-Phase Chemistry of Aliphatic Organic Peroxides

1997 ◽  
Vol 51 (1) ◽  
pp. 74-80 ◽  
Author(s):  
Peter Jacob ◽  
Bernhard Wehling ◽  
Wieland Hill ◽  
Dieter Klockow
Keyword(s):  
Hydrogen Peroxide ◽  
Raman Spectroscopy ◽  
Liquid Phase ◽  
Chemical Processes ◽  
Organic Peroxides ◽  
Time Resolved ◽  
In Situ Investigation ◽  
Phase Chemistry ◽  
Kinetics Of

The described investigations are focused on peroxides occurring as products in atmospheric chemical processes, namely, hydrogen peroxide, methylhydroperoxide, hydroxymethylhydroperoxide, bis-(hydroxymethyl)peroxide, 1-hydroxyethylhydroperoxide, bis-(hydroxyethyl)peroxide, and hydroxymethylmethylperoxide. The compounds are identified and determined through the position and intensity of their characteristic O–O stretching bands in the range between 767 and 878 cm−1. Time-resolved Raman spectroscopy of peroxide solutions permits the in situ investigation of pathways and kinetics of reactions between peroxides and aldehydes.

Application of In Situ Raman Spectroscopy To Facilitate Use of Hydrogen Peroxide on Kilogram Scale

2014 ◽  
Vol 18 (12) ◽  
pp. 1807-1811 ◽  
Author(s):  
Dawn Cohen ◽  
Andrew Cosbie ◽  
Robert R. Milburn ◽  
Stephen Shaw ◽  
Yong Xie
Keyword(s):  
Hydrogen Peroxide ◽  
Raman Spectroscopy ◽  
In Situ Raman Spectroscopy ◽  
In Situ Raman

Mechanism of Cu removal during CMP in H2O2-glycine based slurries

1999 ◽  
Vol 566 ◽  
Author(s):  
M. Hariharaputhiran ◽  
S. Ramarajan ◽  
Y Li ◽  
S.V. Babu ◽  
S.V. Babu
Keyword(s):  
Hydrogen Peroxide ◽  
Hydroxyl Radical ◽  
Dissolution Rate ◽  
Film Formation ◽  
Ex Situ ◽  
Copper Dissolution ◽  
Radical Generation ◽  
Cu Cmp ◽  
Cu Dissolution

Hydroxyl radical generation has been observed during Cu CMP using hydrogen peroxide-glycine based slurries. While the Cu dissolution/polish rates increased with increasing glycine concentration, the copper dissolution rate decreased with increasing peroxide concentration indicating the occurrence of both dissolution and passive film formation during CMP. This is further confirmed by both in situ and ex situ electrochemical experiments.

Determination of Chemical Species in MDEA – Carbon Dioxide – Water System by Raman Spectroscopy

2015 ◽  
Vol 1113 ◽  
pp. 261-266 ◽  
Author(s):  
Humbul Suleman ◽  
Muhammad Zubair Shahid ◽  
Abdulhalim Shah Maulud ◽  
Zakaria Man ◽  
Mohammad Azmi Bustam Khalil
Keyword(s):  
Carbon Dioxide ◽  
Raman Spectroscopy ◽  
Chemical Speciation ◽  
Water System ◽  
Chemical Species ◽  
Principal Component Regression ◽  
Principal Component ◽  
Carbon Dioxide Absorption

Alkanolamines based carbon dioxide absorption from flue gases remains the most industrially implemented technique. The effective design of absorbers and associated equipment requires robust thermodynamic and kinetic models thus, instigating research efforts in chemical speciation and characterization of CO2loaded alkanolamine solutions. In this study, the potential of Raman spectroscopy has been investigated to determine the in situ chemical speciation in MDEA – CO2– Water system. The Raman spectra have been fitted to thermodynamic values using principal component regression. Results are in good agreement for carbonate, bicarbonate, MDEA and protonated MDEA chemical species.

scholarly journals Description Of Associative Behaviour During Microbial Cellulose Utilization By Clostridium Thermocellum For Application In Advanced Biomass Conversion Process Development

2021 ◽  
Author(s):  
Alexandru Dumitrache
Keyword(s):  
Continuous Flow ◽  
Clostridium Thermocellum ◽  
Process Development ◽  
Flow System ◽  
Biomass Conversion ◽  
Total Carbohydrate ◽  
Metabolic Activities ◽  
In Situ Detection ◽  
Substrate Hydrolysis

Recent findings support the concept that Clostridium thermocellum is a cellulose-utilizing specialist having growth benefits with increasing substrate chain length. We developed a continuous-flow system for in-situ detection of cellulose colonization and qualitatively assayed metabolic activities and behaviour of cellulolytic cultures. This study demonstrates the existence of strongly adherent celluloytic cells arranged in monolayers with invariably end-on attached spores. The substrate-cell distance was recorded to be lower than 0.44 pm and a typical EPS matrix was absent. Measurements on carbon dioxide released in continuous-flow cultures was successfully employed to monitor biofilm activity and total carbohydrate assays do not reveal loss of cellulolysis end-products in the effluent. These findings demonstrate the bacteria have optimized access to the cellulosic substrates and suggest that they have an ability to sequester products of substrate hydrolysis which confers benefits over non-adherent cellulolytic or non-cellulolytic organisms.

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