On determining the optical properties and layer structure from spectroscopic ellipsometric data using automated artifact minimization method
2020 ◽
Vol 46
(16)
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pp. 43
Keyword(s):
2010 ◽
Vol 663-665
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pp. 1053-1056
Keyword(s):
1992 ◽
Vol 110
(1-2)
◽
pp. 233-236
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2010 ◽
Vol 7
(53)
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pp. 1699-1707
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2021 ◽
2015 ◽
Vol 15
(19)
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pp. 11067-11080
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Keyword(s):