Representation of information in SEM by equal signal lines
There are different methods and devices for the increase of the videosignal information in SEM. For example, with the help of special pure electronic [1] and opto-electronic [2] systems equipotential areas on the specimen surface in SEM were obtained. This report generalizes quantitative universal method for space distribution representation of research specimen parameter by contour equal signal lines. The method is based on principle of comparison of information signal value with the fixed levels.Transformation image system for obtaining equal signal lines maps was developed in two versions:1)In pure electronic system [3] it is necessary to compare signal U (see Fig.1-a), which gives potential distribution on specimen surface along each scanning line with fixed base level signals εifor obtaining quantitative equipotential information on solid state surface. The amplitude analyzer-comparator gives flare sport videopulses at any fixed coordinate and any instant time when initial signal U is equal to one of the base level signals ε.