Weak-Beam Thickness-Fringe Contrast Analysis of Defects in GaN Pyramids

1999 ◽  
Vol 5 (S2) ◽  
pp. 736-737
Author(s):  
Zhigang Mao ◽  
Stuart McKeraan ◽  
C. Barry Carter ◽  
Wei Yang ◽  
Scott A. McPherson
Keyword(s):  
Basal Plane ◽  
Threading Dislocations ◽  
Prism Plane ◽  
Fringe Contrast ◽  
Burgers Vector ◽  
Weak Beam ◽  
Contrast Analysis ◽  
Half Loop ◽  
Beam Thickness ◽  
Hcp Structure

The possible dislocations and slip systems in the wurtzite structure are the same as in hcp structure [1]. The Burgers vectors of these dislocations are . The dislocations can lie on either the (0001) basal plane or prism planes. The dislocations lie on pyramidal planes. TEM studies have revealed that there are predominately three types of dislocations in a wurtzite GaN epilayer which has not been grown by selective overgrowth (e. g. [2, 3]). The majority of the dislocations are threading dislocations with Burgers vector which appear randomly in the epilayer, they result from the growth errors during the growth process. The other two types of dislocation are halflpops with a [0001] or Burgers vector. The [0001] dislocation half-loop lies on the prism plane and the dislocation half-loop lies on the (0001) basal plane which usually appears near the epilayer/substrate interface.

Thickness-fringe Contrast Analysis of Defects in GaN

2001 ◽  
Vol 673 ◽  
Author(s):  
Jeffrey K. Farrer ◽  
C. Barry Carter ◽  
Z. Mao ◽  
Stuart McKernan
Keyword(s):  
Defect Density ◽  
Lateral Growth ◽  
Multiple Diffraction ◽  
Fringe Contrast ◽  
Burgers Vector ◽  
Weak Beam ◽  
Transmission Electron ◽  
Contrast Technique ◽  
Contrast Analysis ◽  
Beam Transmission

ABSTRACTThe analysis of thickness-fringe contrast in weak-beam transmission electron microscope (TEM) images has been shown to be a reliable method for the complete determination of the character, as well as the magnitude, of a dislocation Burgers vector. By selecting multiple diffraction conditions and, for each condition, determining the number of terminating thickness fringes at the exit of a dislocation from a wedge-shaped sample, the Burgers vector can be unambiguously determined. Defect analysis of GaN pyramids grown on (111)Si by the lateral epitactic overgrowth (LEO) technique reveals a core region which contains a relatively high density of dislocations and a lateral-growth region where the defect density is decreased. The thickness-fringe contrast technique was used in the lateral growth regions of the pyramids to analyze the dislocation Burgers vectors.

Direct Observation of Stacking Fault Nucleation from Deflected Threading Dislocations with Burgers Vector c+a in PVT Grown 4H-SiC

2014 ◽  
Vol 1693 ◽  
Author(s):  
Fangzhen Wu ◽  
Huanhuan Wang ◽  
Balaji Raghothamachar ◽  
Michael Dudley ◽  
Stephan G. Mueller ◽  
...  
Keyword(s):  
Direct Observation ◽  
Basal Plane ◽  
Stacking Faults ◽  
Stacking Fault ◽  
Formation Mechanisms ◽  
Threading Dislocations ◽  
Burgers Vector ◽  
X Ray ◽  
Transmission Geometry ◽  
Made In

ABSTRACTIn our previous studies [1-3], four kinds of stacking faults in 4H-SiC bulk crystal have been distinguished based on their contrast behavior differences in synchrotron white beam x-ray topography images. These faults are Shockley faults, Frank faults, Shockley plus c/2 Frank faults, and Shockley plus c/4 Frank faults. Our proposed formation mechanisms for these stacking faults involve the overgrowth of the surface outcrop associated with threading screw dislocations (TSDs) or threading mixed dislocations (TMDs) with Burgers vector of c+a by macrosteps and the consequent deflection of TSDs or TMDs onto the basal plane. Previous synchrotron x-ray topography observations were made in offcut basal wafers using transmission geometry. In this paper, further evidence is reported to confirm the proposed stacking fault formation mechanism. Observations are made in axially cut slices with surface plane {11-20}. Several kinds of stacking faults are recognized and their contrast behavior agrees with the four kinds previously reported. Direct observation is obtained of a Shockley plus c/4 Frank stacking fault nucleating from a TMD deflected onto the basal plane. The contrast from stacking faults on the basal plane in the axial slices is enhanced by recording images after rotating the crystal about the active -1010 reflection vector enabling a broader projection of the basal plane.

Deflection of Threading Dislocations with Burgers Vector c/c+a Observed in 4H-SiC PVT–Grown Substrates with Associated Stacking Faults

2012 ◽  
Vol 717-720 ◽  
pp. 347-350 ◽  
Author(s):  
Sha Yan Byrapa ◽  
Fang Zhen Wu ◽  
Huan Huan Wang ◽  
Balaji Raghothamachar ◽  
Gloria Choi ◽  
...  
Keyword(s):  
Detailed Analysis ◽  
Basal Plane ◽  
Stacking Faults ◽  
Image Contrast ◽  
Threading Dislocations ◽  
Burgers Vector ◽  
Calculated Phase ◽  
X Ray ◽  
White Beam ◽  
Contrast Studies

A review is presented of Synchrotron White Beam X-ray Topography (SWBXT) studies of stacking faults observed in PVT-Grown 4H-SiC crystals. A detailed analysis of various interesting phenomena were performed and one such observation is the deflection of threading dislocations with Burgers vector c/c+a onto the basal plane and associated stacking faults. Based on the model involving macrostep overgrowth of surface outcrops of threading dislocations, SWBXT image contrast studies of these stacking faults on different reflections and comparison with calculated phase shits for postulated fault vectors, has revealed faults to be of basically four types: (a) Frank faults; (b) Shockley faults; (c) Combined Shockley + Frank faults with fault vector s+c/2; (d) Combined Shockley + Frank faults with fault vector s+c/4.

The Nucleation and Propagation of Threading Dislocations with C-Component of Burgers Vector in PVT-Grown 4H-SiC

2013 ◽  
Vol 740-742 ◽  
pp. 217-220 ◽  
Author(s):  
Fang Zhen Wu ◽  
Michael Dudley ◽  
Huan Huan Wang ◽  
Sha Yan Byrapa ◽  
Shun Sun ◽  
...  
Keyword(s):  
Basal Plane ◽  
Opposite Sign ◽  
Growth Direction ◽  
Threading Dislocations ◽  
Burgers Vector ◽  
X Ray ◽  
White Beam

Studies of threading dislocations with Burgers vector of c+a have been carried out using synchrotron white beam X-ray topography. The nucleation and propagation of pairs of opposite sign threading c+a dislocations is observed. Overgrowth of inclusions by growth steps leads to lattice closure failure and the stresses associated with this can be relaxed by the nucleation of opposite sign pairs of dislocations with Burgers vector c+a. Once these dislocations are nucleated they propagate along the c-axis growth direction, or can be deflected onto the basal plane by overgrowth of macrosteps. For the c+a dislocations, partial deflection can occasionally occur, e.g. the a-component deflects onto basal plane while the c-component continuously propagates along the growth direction. One factor controlling the details of these deflection processes is suggested to be related to the ratio between the height of the overgrowing macrostep and that of the surface spiral hillock associated with the threading growth dislocations with c-component of Burgers vector.

Deformation-Induced Dislocations in 4H-SiC and GaN

1999 ◽  
Vol 572 ◽  
Author(s):  
M. H. Hong ◽  
A. V. Samant ◽  
V. Orlov ◽  
B. Farber ◽  
C. Kisielowski ◽  
...  
Keyword(s):  
Deformation Temperature ◽  
Stacking Fault ◽  
Dense Array ◽  
Prism Plane ◽  
Burgers Vector ◽  
Temperature Range ◽  
Weak Beam ◽  
Beam Method ◽  
Bulk Single Crystals ◽  
Gan Film

ABSTRACTBulk single crystals of 4H-SiC have been deformed in compression in the temperature range 550–1300°C, whereas a GaN thin film grown on a (0001) sapphire substrate was deformed by Vickers indentation in the temperature range 25–800°C. The TEM observations of the deformed crystals indicate that deformation-induced dislocations in 4H-SiC all lie on the (0001) basal plane but depending on the deformation temperature, are one of two types. The dislocations induced by deformation at temperatures above ∼1 100°C are complete, with a Burgers vector, b, of but are all dissociated into two partials bounding a ribbon of stacking fault. On the other 3 hand, the dislocations induced by deformation in the temperature range 550<T<∼ 1100°C were predominantly single leading partials each dragging a stacking fault behind them. From the width of dissociated dislocations in the high-temperature deformed crystals, the stacking fault energy of 4H-SiC has been estimated to be 14.7±2.5 mJ/m2. Vickers indentations of the [0001]-oriented GaN film produced a dense array of dislocations along the three 〈1120〉 directions at all temperatures. The dislocations were slightly curved with their curvature increasing as the deformation temperature increased. Most of these dislocations were found to have a screw nature with their b parallel to 〈1120〉. Also, within the resolution of the weak-beam method, they were not found to be dissociated. Tilting experiment show that these dislocations lie on the {1100} prism plane rather than the easier (0001) glide plane.

Synchrotron X-ray Topographic Analysis of Dislocation Structures in Bulk SiC Single Crystal

2006 ◽  
Vol 527-529 ◽  
pp. 407-410
Author(s):  
Satoshi Yamaguchi ◽  
Daisuke Nakamura ◽  
Itaru Gunjishima ◽  
Yoshiharu Hirose
Keyword(s):  
Basal Plane ◽  
Mixed Type ◽  
Growth Direction ◽  
Threading Dislocations ◽  
Large Network ◽  
Topographic Analysis ◽  
Edge Type ◽  
Burgers Vector ◽  
X Ray ◽  
Growth Method

The detailed properties of the dislocations of SiC crystals were analyzed using ultrahigh-quality substrates manufactured by RAF (repeated a-face) growth method by means of bulk X-ray topography. From this analysis, we could reveal the detailed features of one type of basal plane dislocations and two types of threading dislocations. The basal plane dislocations were screw type with Burgers vector were parallel to <11-20> direction. One of the threading dislocations was mixed type close to screw dislocation parallel to the growth direction with Burgers vector of 1c+na (n=0, 1, 2, …). Another was the edge type parallel to the c-axis, which was lying between two basal plane dislocations. Moreover, these dislocations were found to be connecting with each other, constituting large network structures.

Defects in ion implanted silicon

1978 ◽  
Vol 36 (1) ◽  
pp. 386-387
Author(s):  
J.A. Lambert ◽  
P.S. Dobson
Keyword(s):  
Defect Structure ◽  
Dislocation Loops ◽  
Frank Loop ◽  
Burgers Vector ◽  
Temperature Range ◽  
Perfect Dislocation ◽  
Contrast Analysis ◽  
Image Position ◽  
Ion Implanted

The defect structure of ion-implanted silicon, which has been annealed in the temperature range 800°C-1100°C, consists of extrinsic Frank faulted loops and perfect dislocation loops, together with‘rod like’ defects elongated along <110> directions. Various structures have been suggested for the elongated defects and it was argued that an extrinsically faulted Frank loop could undergo partial shear to yield an intrinsically faulted defect having a Burgers vector of 1/6 <411>.This defect has been observed in boron implanted silicon (1015 B+ cm-2 40KeV) and a detailed contrast analysis has confirmed the proposed structure.

Determination of the Burgers vector of a dislocation in a Fe-Mn alloy by weak-beam image in HVEM

1978 ◽  
Vol 36 (1) ◽  
pp. 330-331
Author(s):  
Y. Ishida ◽  
H. Ishida ◽  
K. Kohra ◽  
H. Ichinose
Keyword(s):  
High Order ◽  
Simulation Technique ◽  
The Other ◽  
Image Simulation ◽  
Diffraction Vector ◽  
Burgers Vector ◽  
Weak Beam ◽  
Beam Image ◽  
Edge Component

IntroductionA simple and accurate technique to determine the Burgers vector of a dislocation has become feasible with the advent of HVEM. The conventional image vanishing technique(1) using Bragg conditions with the diffraction vector perpendicular to the Burgers vector suffers from various drawbacks; The dislocation image appears even when the g.b = 0 criterion is satisfied, if the edge component of the dislocation is large. On the other hand, the image disappears for certain high order diffractions even when g.b ≠ 0. Furthermore, the determination of the magnitude of the Burgers vector is not easy with the criterion. Recent image simulation technique is free from the ambiguities but require too many parameters for the computation. The weak-beam “fringe counting” technique investigated in the present study is immune from the problems. Even the magnitude of the Burgers vector is determined from the number of the terminating thickness fringes at the exit of the dislocation in wedge shaped foil surfaces.

Black-white contrast of dislocation loops

1978 ◽  
Vol 36 (1) ◽  
pp. 328-329
Author(s):  
J. J. Hren ◽  
W. D. Cooper ◽  
L. J. Sykes
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Dislocation Loops ◽  
Major Premise ◽  
Burgers Vector ◽  
Transmission Electron ◽  
Primary Means ◽  
Contrast Analysis ◽  
Dot Product ◽  
Imaging Conditions

Small dislocation loops observed by transmission electron microscopy exhibit a characteristic black-white strain contrast when observed under dynamical imaging conditions. In many cases, the topography and orientation of the image may be used to determine the nature of the loop crystallography. Two distinct but somewhat overlapping procedures have been developed for the contrast analysis and identification of small dislocation loops. One group of investigators has emphasized the use of the topography of the image as the principle tool for analysis. The major premise of this method is that the characteristic details of the image topography are dependent only on the magnitude of the dot product between the loop Burgers vector and the diffracting vector. This technique is commonly referred to as the (g•b) analysis. A second group of investigators has emphasized the use of the orientation of the direction of black-white contrast as the primary means of analysis.

scholarly journals Dislocation Arrangement in a Thick LEO GaN Film on Sapphire

2000 ◽  
Vol 5 (S1) ◽  
pp. 97-103
Author(s):  
Kathleen A. Dunn ◽  
Susan E. Babcock ◽  
Donald S. Stone ◽  
Richard J. Matyi ◽  
Ling Zhang ◽  
...  
Keyword(s):  
High Resolution ◽  
Electron Diffraction ◽  
Threading Dislocations ◽  
X Ray Diffraction ◽  
Burgers Vector ◽  
X Ray ◽  
The Third ◽  
Dislocation Arrangement ◽  
Image Position ◽  
Gan Film

Diffraction-contrast TEM, focused probe electron diffraction, and high-resolution X-ray diffraction were used to characterize the dislocation arrangements in a 16µm thick coalesced GaN film grown by MOVPE LEO. As is commonly observed, the threading dislocations that are duplicated from the template above the window bend toward (0001). At the coalescence plane they bend back to lie along [0001] and thread to the surface. In addition, three other sets of dislocations were observed. The first set consists of a wall of parallel dislocations lying in the coalescence plane and nearly parallel to the substrate, with Burgers vector (b) in the (0001) plane. The second set is comprised of rectangular loops with b = 1/3 [110] (perpendicular to the coalescence boundary) which originate in the coalescence boundary and extend laterally into the film on the (100). The third set of dislocations threads laterally through the film along the [100] bar axis with 1/3<110>-type Burgers vectors These sets result in a dislocation density of ∼109 cm−2. High resolution X-ray reciprocal space maps indicate wing tilt of ∼0.5º.

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