The Nucleation and Propagation of Threading Dislocations with C-Component of Burgers Vector in PVT-Grown 4H-SiC

2013 ◽  
Vol 740-742 ◽  
pp. 217-220 ◽  
Author(s):  
Fang Zhen Wu ◽  
Michael Dudley ◽  
Huan Huan Wang ◽  
Sha Yan Byrapa ◽  
Shun Sun ◽  
...  
Keyword(s):  
Basal Plane ◽  
Opposite Sign ◽  
Growth Direction ◽  
Threading Dislocations ◽  
Burgers Vector ◽  
X Ray ◽  
White Beam

Studies of threading dislocations with Burgers vector of c+a have been carried out using synchrotron white beam X-ray topography. The nucleation and propagation of pairs of opposite sign threading c+a dislocations is observed. Overgrowth of inclusions by growth steps leads to lattice closure failure and the stresses associated with this can be relaxed by the nucleation of opposite sign pairs of dislocations with Burgers vector c+a. Once these dislocations are nucleated they propagate along the c-axis growth direction, or can be deflected onto the basal plane by overgrowth of macrosteps. For the c+a dislocations, partial deflection can occasionally occur, e.g. the a-component deflects onto basal plane while the c-component continuously propagates along the growth direction. One factor controlling the details of these deflection processes is suggested to be related to the ratio between the height of the overgrowing macrostep and that of the surface spiral hillock associated with the threading growth dislocations with c-component of Burgers vector.

Deflection of Threading Dislocations with Burgers Vector c/c+a Observed in 4H-SiC PVT–Grown Substrates with Associated Stacking Faults

2012 ◽  
Vol 717-720 ◽  
pp. 347-350 ◽  
Author(s):  
Sha Yan Byrapa ◽  
Fang Zhen Wu ◽  
Huan Huan Wang ◽  
Balaji Raghothamachar ◽  
Gloria Choi ◽  
...  
Keyword(s):  
Detailed Analysis ◽  
Basal Plane ◽  
Stacking Faults ◽  
Image Contrast ◽  
Threading Dislocations ◽  
Burgers Vector ◽  
Calculated Phase ◽  
X Ray ◽  
White Beam ◽  
Contrast Studies

A review is presented of Synchrotron White Beam X-ray Topography (SWBXT) studies of stacking faults observed in PVT-Grown 4H-SiC crystals. A detailed analysis of various interesting phenomena were performed and one such observation is the deflection of threading dislocations with Burgers vector c/c+a onto the basal plane and associated stacking faults. Based on the model involving macrostep overgrowth of surface outcrops of threading dislocations, SWBXT image contrast studies of these stacking faults on different reflections and comparison with calculated phase shits for postulated fault vectors, has revealed faults to be of basically four types: (a) Frank faults; (b) Shockley faults; (c) Combined Shockley + Frank faults with fault vector s+c/2; (d) Combined Shockley + Frank faults with fault vector s+c/4.

Synchrotron X-ray Topographic Analysis of Dislocation Structures in Bulk SiC Single Crystal

2006 ◽  
Vol 527-529 ◽  
pp. 407-410
Author(s):  
Satoshi Yamaguchi ◽  
Daisuke Nakamura ◽  
Itaru Gunjishima ◽  
Yoshiharu Hirose
Keyword(s):  
Basal Plane ◽  
Mixed Type ◽  
Growth Direction ◽  
Threading Dislocations ◽  
Large Network ◽  
Topographic Analysis ◽  
Edge Type ◽  
Burgers Vector ◽  
X Ray ◽  
Growth Method

The detailed properties of the dislocations of SiC crystals were analyzed using ultrahigh-quality substrates manufactured by RAF (repeated a-face) growth method by means of bulk X-ray topography. From this analysis, we could reveal the detailed features of one type of basal plane dislocations and two types of threading dislocations. The basal plane dislocations were screw type with Burgers vector were parallel to <11-20> direction. One of the threading dislocations was mixed type close to screw dislocation parallel to the growth direction with Burgers vector of 1c+na (n=0, 1, 2, …). Another was the edge type parallel to the c-axis, which was lying between two basal plane dislocations. Moreover, these dislocations were found to be connecting with each other, constituting large network structures.

Direct Observation of Stacking Fault Nucleation from Deflected Threading Dislocations with Burgers Vector c+a in PVT Grown 4H-SiC

2014 ◽  
Vol 1693 ◽  
Author(s):  
Fangzhen Wu ◽  
Huanhuan Wang ◽  
Balaji Raghothamachar ◽  
Michael Dudley ◽  
Stephan G. Mueller ◽  
...  
Keyword(s):  
Direct Observation ◽  
Basal Plane ◽  
Stacking Faults ◽  
Stacking Fault ◽  
Formation Mechanisms ◽  
Threading Dislocations ◽  
Burgers Vector ◽  
X Ray ◽  
Transmission Geometry ◽  
Made In

ABSTRACTIn our previous studies [1-3], four kinds of stacking faults in 4H-SiC bulk crystal have been distinguished based on their contrast behavior differences in synchrotron white beam x-ray topography images. These faults are Shockley faults, Frank faults, Shockley plus c/2 Frank faults, and Shockley plus c/4 Frank faults. Our proposed formation mechanisms for these stacking faults involve the overgrowth of the surface outcrop associated with threading screw dislocations (TSDs) or threading mixed dislocations (TMDs) with Burgers vector of c+a by macrosteps and the consequent deflection of TSDs or TMDs onto the basal plane. Previous synchrotron x-ray topography observations were made in offcut basal wafers using transmission geometry. In this paper, further evidence is reported to confirm the proposed stacking fault formation mechanism. Observations are made in axially cut slices with surface plane {11-20}. Several kinds of stacking faults are recognized and their contrast behavior agrees with the four kinds previously reported. Direct observation is obtained of a Shockley plus c/4 Frank stacking fault nucleating from a TMD deflected onto the basal plane. The contrast from stacking faults on the basal plane in the axial slices is enhanced by recording images after rotating the crystal about the active -1010 reflection vector enabling a broader projection of the basal plane.

Synchrotron X-Ray Topography Studies of the Propagation and Post-Growth Mutual Interaction of Threading Growth Dislocations with C-Component of Burgers Vector in PVT-Grown 4H-SiC

2012 ◽  
Vol 717-720 ◽  
pp. 343-346 ◽  
Author(s):  
Fang Zhen Wu ◽  
Huan Huan Wang ◽  
Sha Yan Byrapa ◽  
Balaji Raghothamachar ◽  
Michael Dudley ◽  
...  
Keyword(s):  
Opposite Sign ◽  
Equilibrium Concentration ◽  
Vapor Transport ◽  
Mutual Interaction ◽  
Similar Reaction ◽  
Threading Dislocations ◽  
Screw Dislocations ◽  
Burgers Vector ◽  
X Ray ◽  
Nucleation Sites

Synchrotron White Beam X-ray Topography (SWBXT) imaging of wafers cut parallel to the growth axis from 4H-SiC boules grown using Physical Vapor Transport has enabled visualization of the evolution of the defect microstructure. Here we present observations of the propagation and post-growth mutual interaction of threading growth dislocations with c-component of Burgers vector. Detailed contrast extinction studies reveal the presence of two types of such dislocations: pure c-axis screw dislocations and those with Burgers Vector n1c+n2a, where n1is equal to 1 and n2is equal to 1 or 2. In addition, observations of dislocation propagation show that some of the threading dislocations with c-component of Burgers adopt a curved, slightly helical morphology which can drive the dislocations from adjacent nucleation sites together enabling them to respond to the inter-dislocation forces and react. Since all of the dislocations exhibiting such helical configurations have significant screw component, and in view of the fact that such dislocations are typically not observed to glide, it is believed that such morphologies result in large part from the interaction of a non-equilibrium concentration of vacancies with the originally approximately straight dislocation cores during post-growth cooling. Such interactions can lead to complete or partial Burgers vector annihilation. Among the reactions observed are: (a) the reaction between opposite-sign threading screw dislocations with Burgers vectors c and –c wherein some segments annihilate leaving others in the form of trails of stranded loops comprising closed dislocation dipoles; (b) the reaction between threading dislocations with Burgers vectors of -c+a and c+a wherein the opposite c-components annihilate leaving behind the two a-components; (c) the similar reaction between threading dislocations with Burgers vectors of -c and c+a leaving behind the a-component.

Multiplication of Basal Plane Dislocations via Interaction with c-Axis Threading Dislocations in 4H-SiC

2006 ◽  
Vol 911 ◽  
Author(s):  
Yi Chen ◽  
Govindhan Dhanaraj ◽  
Michael Dudley ◽  
Hui Zhang ◽  
Ronghui Ma ◽  
...  
Keyword(s):  
Vapor Deposition ◽  
Basal Plane ◽  
Opposite Sign ◽  
Chemical Vapor ◽  
Threading Dislocations ◽  
Dislocation Loops ◽  
X Ray ◽  
Large Numbers ◽  
Basal Plane Dislocation ◽  
Edge Dislocations

AbstractSilicon carbide (SiC) substrates with chemical vapor deposition (CVD) grown epilayers have been characterized by synchrotron white beam X-ray topography (SWBXT). Large numbers of circular basal plane dislocation loops (BPDs) were observed in the substrate which were anchored by threading screw dislocations (SDs). Threading edge dislocations (TEDs) are not observed to play an important role in the multiplication of BPDs. A SD-assisted “conservative climb” model is proposed to explain the multiplication of BPDs during growth and/or post-growth processes. BPDs are shown to multiply on adjacent parallel basal planes via single SD-assisted as well as opposite sign SD-pair-assisted “conservative climb”.

Complex Behavior of Threading Dislocations Observed in PVT-Grown 4H-SiC Single Crystals

2012 ◽  
Vol 717-720 ◽  
pp. 355-358 ◽  
Author(s):  
Masakazu Katsuno ◽  
Tatsuo Fujimoto ◽  
Hirokatsu Yashiro ◽  
Hiroshi Tsuge ◽  
Shinya Sato ◽  
...  
Keyword(s):  
Single Crystals ◽  
Comparative Studies ◽  
Growth Direction ◽  
Threading Dislocations ◽  
Complex Behavior ◽  
Burgers Vector ◽  
X Ray ◽  
Axis Direction ◽  
Straight Line

Structures and propagating behaviors of threading dislocations (TDs) in PVT-grown 4H-SiC single crystals were both investigated using Synchrotron monochromatic X-ray topography. Comparative studies by examining images obtained for the crystals with different diffraction geometries of (0004) and (11-20) of 4H-SiC revealed that a large amount of TDs are likely to be mixed in character, i.e., dislocations with Burgers vector components of both <0004> and <11-20>. Closer observations of topography images has revealed that, although TDs lie largely along the c-axis direction, some of the TDs show quite a complex propagating behavior: not extending in a straight line but meandering along the growth direction.

scholarly journals Dislocation Arrangement in a Thick LEO GaN Film on Sapphire

2000 ◽  
Vol 5 (S1) ◽  
pp. 97-103
Author(s):  
Kathleen A. Dunn ◽  
Susan E. Babcock ◽  
Donald S. Stone ◽  
Richard J. Matyi ◽  
Ling Zhang ◽  
...  
Keyword(s):  
High Resolution ◽  
Electron Diffraction ◽  
Threading Dislocations ◽  
X Ray Diffraction ◽  
Burgers Vector ◽  
X Ray ◽  
The Third ◽  
Dislocation Arrangement ◽  
Image Position ◽  
Gan Film

Diffraction-contrast TEM, focused probe electron diffraction, and high-resolution X-ray diffraction were used to characterize the dislocation arrangements in a 16µm thick coalesced GaN film grown by MOVPE LEO. As is commonly observed, the threading dislocations that are duplicated from the template above the window bend toward (0001). At the coalescence plane they bend back to lie along [0001] and thread to the surface. In addition, three other sets of dislocations were observed. The first set consists of a wall of parallel dislocations lying in the coalescence plane and nearly parallel to the substrate, with Burgers vector (b) in the (0001) plane. The second set is comprised of rectangular loops with b = 1/3 [110] (perpendicular to the coalescence boundary) which originate in the coalescence boundary and extend laterally into the film on the (100). The third set of dislocations threads laterally through the film along the [100] bar axis with 1/3<110>-type Burgers vectors These sets result in a dislocation density of ∼109 cm−2. High resolution X-ray reciprocal space maps indicate wing tilt of ∼0.5º.

Characterization of Defect Structures in SiC Single Crystals Using Synchrotron X-Ray Topography

1993 ◽  
Vol 307 ◽  
Author(s):  
S. Wang ◽  
M. Dudley ◽  
C. Carter ◽  
D. Asbury ◽  
C. Fazit
Keyword(s):  
Detailed Analysis ◽  
Single Crystals ◽  
Basal Plane ◽  
Defect Structures ◽  
Dislocation Generation ◽  
Screw Dislocations ◽  
X Ray ◽  
White Beam

ABSTRACTSynchrotron white beam X-ray topography has been used to characterize defect structures in 6H-SiC wafers grown on (0001) seeds. Two major types of defects are observed: super screw dislocations approximately perpendicular to the basal plane and dislocation networks lying in the basal plane. The super screw dislocations, which have open cores, are growth dislocations. These dislocations act as sources and/or sinks for the glide dislocation networks. Detailed analysis and discussion of dislocation generation phenomena and Burgers vectors will be presented.

Weak-Beam Thickness-Fringe Contrast Analysis of Defects in GaN Pyramids

1999 ◽  
Vol 5 (S2) ◽  
pp. 736-737
Author(s):  
Zhigang Mao ◽  
Stuart McKeraan ◽  
C. Barry Carter ◽  
Wei Yang ◽  
Scott A. McPherson
Keyword(s):  
Basal Plane ◽  
Threading Dislocations ◽  
Prism Plane ◽  
Fringe Contrast ◽  
Burgers Vector ◽  
Weak Beam ◽  
Contrast Analysis ◽  
Half Loop ◽  
Beam Thickness ◽  
Hcp Structure

The possible dislocations and slip systems in the wurtzite structure are the same as in hcp structure [1]. The Burgers vectors of these dislocations are . The dislocations can lie on either the (0001) basal plane or prism planes. The dislocations lie on pyramidal planes. TEM studies have revealed that there are predominately three types of dislocations in a wurtzite GaN epilayer which has not been grown by selective overgrowth (e. g. [2, 3]). The majority of the dislocations are threading dislocations with Burgers vector which appear randomly in the epilayer, they result from the growth errors during the growth process. The other two types of dislocation are halflpops with a [0001] or Burgers vector. The [0001] dislocation half-loop lies on the prism plane and the dislocation half-loop lies on the (0001) basal plane which usually appears near the epilayer/substrate interface.

Low Defect Density Bulk AlN Substrates for High Performance Electronics and Optoelectronics

2012 ◽  
Vol 717-720 ◽  
pp. 1287-1290 ◽  
Author(s):  
Balaji Raghothamachar ◽  
Rafael Dalmau ◽  
Baxter Moody ◽  
H. Spalding Craft ◽  
Raoul Schlesser ◽  
...  
Keyword(s):  
Single Crystal ◽  
Basal Plane ◽  
High Performance ◽  
Defect Density ◽  
Vapor Transport ◽  
Physical Vapor Transport ◽  
Threading Dislocations ◽  
Crystalline Perfection ◽  
X Ray

Using the physical vapor transport (PVT) method, single crystal boules of AlN have been grown and wafers sliced from them have been characterized by synchrotron white beam X-ray topography (SWBXT) in conjunction with optical microscopy. X-ray topographs reveal that the wafers contain dislocations that are inhomogeneously distributed with densities varying from as low as 0 cm-2 to as high as 104 cm-2. Two types of dislocations have been identified: basal plane dislocations and threading dislocations, both having Burgers vectors of type 1/3<112-0> indicating that their origin is likely due to post-growth deformation. In some cases, the dislocations are arranged in low angle grain boundaries. However, large areas of the wafers are nearly dislocation-free and section X-ray topographs of these regions reveal the high crystalline perfection.

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