Plasma-enhanced chemical vapor deposition of amorphous carbon molecular sieve membranes for gas separation
Keyword(s):
Amorphous carbon membranes were successfully synthesized onto a SiO2–ZrO2/α-Al2O3 nanoporous substrate via plasma-enhanced chemical vapor deposition (PECVD) at room temperature.
2001 ◽
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2009 ◽
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2009 ◽
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