MoO2 as a thermally stable oxide electrode for dynamic random-access memory capacitors

2018 ◽  
Vol 6 (48) ◽  
pp. 13250-13256 ◽  
Author(s):  
Woongkyu Lee ◽  
Cheol Jin Cho ◽  
Woo Chul Lee ◽  
Cheol Seong Hwang ◽  
Robert P. H. Chang ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Random Access ◽  
Random Access Memory ◽  
Dynamic Random Access Memory ◽  
Thermally Stable ◽  
Next Generation ◽  
Oxide Electrode ◽  
Access Memory ◽  
Excellent Thermal Stability ◽  
Stable Oxide

MoO2 is a promising oxide electrode with excellent thermal stability for next-generation DRAM capacitors.

Thermal Stability of Co-Sputtered Ru-Ti Alloy Electrodes for Dynamic Random Access Memory Applications

1998 ◽  
Vol 37 (Part 2, No. 10B) ◽  
pp. L1247-L1250 ◽  
Author(s):  
Ray-Hua Horng ◽  
Dong-Sing Wuu ◽  
Luh-Huei Wu ◽  
Ming-Kwei Lee ◽  
Shih-Hsiung Chan ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Random Access ◽  
Random Access Memory ◽  
Dynamic Random Access Memory ◽  
Ti Alloy ◽  
Access Memory ◽  
Memory Applications ◽  
Thermal Stability Of

Sub-6F2 Charge Trap Dynamic Random Access Memory Using a Novel Operation Scheme

2006 ◽  
Author(s):  
Zongliang Huo ◽  
Seungjae Baik ◽  
Shieun Kim ◽  
In-seok Yeo ◽  
U-in Chung ◽  
...  
Keyword(s):  
Random Access ◽  
Random Access Memory ◽  
Dynamic Random Access Memory ◽  
Access Memory ◽  
Charge Trap
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