Thermally Stable Tungsten Bit-line Process Flow for the Capacitor Over Bit-line-Type Dynamic Random-Access Memory
2000 ◽
Vol 39
(Part 1, No. 6A)
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pp. 3344-3348
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Keyword(s):
2018 ◽
Vol 6
(48)
◽
pp. 13250-13256
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Keyword(s):
1996 ◽
Vol 35
(Part 1, No. 2B)
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pp. 1086-1089
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1996 ◽
Vol 35
(Part 1, No. 9B)
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pp. 4976-4979
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2021 ◽
Vol 21
(8)
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pp. 4216-4222
2004 ◽
Vol 43
(5A)
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pp. 2457-2461
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1998 ◽
Vol 45
(6)
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pp. 1300-1309
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Keyword(s):
Keyword(s):