Dependence of water adsorption on the surface structure of silicon wafers aged under different environmental conditions
2019 ◽
Vol 21
(47)
◽
pp. 26041-26048
◽
Keyword(s):
The structure and isotherm thickness of physisorbed water on a Si/SiOx surface depend on surface wettability and the physical structure of the oxide layer.
2019 ◽
Vol 2019
◽
pp. 1-5
◽
Keyword(s):
1999 ◽
Vol 69
(1-2)
◽
pp. 139-163
◽
2013 ◽
Vol 2013
◽
pp. 1-10
◽
Keyword(s):
2020 ◽
Vol 11
(3)
◽
pp. 68-86
Keyword(s):