Rapid thermal annealing and the anomalous threshold voltage shift of metal‐oxide‐semiconductor structure inn+polycrystalline silicon gate complementary metal‐oxide‐semiconductor technology

1992 ◽  
Vol 61 (4) ◽  
pp. 447-449 ◽  
Author(s):  
Y. K. Fang ◽  
J. C. Hsieh ◽  
C. W. Chen ◽  
C. H. Koung ◽  
N. S. Tsai ◽  
...  
2007 ◽  
Vol 46 (1) ◽  
pp. 51-55 ◽  
Author(s):  
Genshiro Kawachi ◽  
Yoshiaki Nakazaki ◽  
Hiroyuki Ogawa ◽  
Masayuki Jyumonji ◽  
Noritaka Akita ◽  
...  

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