Highly oriented lead zirconium titanate thin films: Growth, control of texture, and its effect on dielectric properties

2001 ◽  
Vol 90 (6) ◽  
pp. 2703-2710 ◽  
Author(s):  
S. Kalpat ◽  
K. Uchino
Keyword(s):  
Thin Films ◽  
Dielectric Properties ◽  
Growth Control ◽  
Zirconium Titanate ◽  
Lead Zirconium Titanate

Effect of Crystal Orientation on Dielectric Properties of Lead Zirconium Titanate Thin Films Prepared by Reactive RF-Sputtering

2001 ◽  
Vol 40 (Part 1, No. 2A) ◽  
pp. 713-717 ◽  
Author(s):  
Sriram Kalpat ◽  
X. Du ◽  
Issac R. Abothu ◽  
Akira Akiba ◽  
Hiroshi Goto ◽  
...  
Keyword(s):  
Thin Films ◽  
Dielectric Properties ◽  
Crystal Orientation ◽  
Rf Sputtering ◽  
Zirconium Titanate ◽  
Lead Zirconium Titanate

Effects of adhesion layers on the ferroelectric properties of lead zirconium titanate thin films deposited on silicon nitride coated silicon substrates

2008 ◽  
Vol 516 (18) ◽  
pp. 6052-6057 ◽  
Author(s):  
Omar Zohni ◽  
Gregory Buckner ◽  
Taeyun Kim ◽  
Angus Kingon ◽  
Jeff Maranchi ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Nitride ◽  
Ferroelectric Properties ◽  
Silicon Substrates ◽  
Zirconium Titanate ◽  
Lead Zirconium Titanate

Dielectric Properties of Highly Oriented Lead Zirconium Titanate Thin Films Prepared by Reactive RF-Sputtering

1999 ◽  
Vol 604 ◽  
Author(s):  
S. Kalpat ◽  
X. Du ◽  
I.R. Abothu ◽  
A. Akiba ◽  
H. Goto ◽  
...  
Keyword(s):  
Thin Films ◽  
Dielectric Constant ◽  
Rf Sputtering ◽  
Hysteresis Loops ◽  
Test System ◽  
Zirconium Titanate ◽  
Lead Zirconium Titanate ◽  
Pzt Thin Films ◽  
Dielectric Constant And Loss ◽  
Oriented Films

AbstractHighly (100) and (111) oriented lead zirconium titanate (PZT) thin films have been grown by using reactive rf-sputtering. PZT thin films with rhombohedral composition have been grown in different orientations using selective rapid thermal annealing cycles. The polarization versus electric field curves and the resistivity of the films were measured using a standardized RT66A ferroelectric test system. The dielectric constant and the loss were determined using an impedence analyzer. The PZT(100) oriented films showed larger dielectric constant and loss than the PZT(111) films. The PZT(100) films possessed sharper square-like hysteresis loops compared to the PZT(111) films, as expected from our phenomenological calculations.

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