O3-sourced atomic layer deposition of high quality Al2O3 gate dielectric for normally-off GaN metal-insulator-semiconductor high-electron-mobility transistors
2015 ◽
Vol 54
(4S)
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pp. 04DF02
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2013 ◽
Vol 52
(11S)
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pp. 11NG04
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2018 ◽
Vol 57
(9)
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pp. 096502
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2015 ◽
Vol 54
(2)
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pp. 020301
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