Monolayer graphene-insulator-semiconductor emitter for large-area electron lithography

2017 ◽  
Vol 110 (23) ◽  
pp. 233109 ◽  
Author(s):  
Matthew P. Kirley ◽  
Tanouir Aloui ◽  
Jeffrey T. Glass
2012 ◽  
Vol 1407 ◽  
Author(s):  
Tianhua Yu ◽  
Edwin Kim ◽  
Nikhil Jain ◽  
Bin Yu

ABSTRACT3D stacked (or uncorrelated) multilayer graphene (s-MLG) is investigated as a potential material platform for carbon-based on-chip interconnects. S-MLG samples are prepared by repeatedly transferring and stacking the large-area CVD-grown graphene monolayers, followed by wire patterning and oxygen plasma etching of graphene. We observed superior wire conduction of s-MLG over that of monolayer graphene or ABAB-stacked multilayer graphene. Further reduction of s-MLG resistivity is anticipated with increasing number of stacked layers. Electrical stress-induced doping technique is used to engineer the Dirac point, as well as to reduce graphene-to-metal contact resistance, improving the overall performance metrics of the s-MLG system. Breakdown experiments show that the current-carrying capacity of s-MLG is significantly enhanced as compared with that of monolayer graphene.


2014 ◽  
Vol 105 (18) ◽  
pp. 181105 ◽  
Author(s):  
Yonghao Liu ◽  
Arvinder Chadha ◽  
Deyin Zhao ◽  
Jessica R. Piper ◽  
Yichen Jia ◽  
...  

2011 ◽  
Vol 151 (7) ◽  
pp. 509-513 ◽  
Author(s):  
L. Zhao ◽  
K.T. Rim ◽  
H. Zhou ◽  
R. He ◽  
T.F. Heinz ◽  
...  

2015 ◽  
Vol 5 (1) ◽  
Author(s):  
Byeong-Ju Park ◽  
Jin-Seok Choi ◽  
Hyun-Suk Kim ◽  
Hyun-You Kim ◽  
Jong-Ryul Jeong ◽  
...  

2019 ◽  
Vol 5 (3) ◽  
pp. 463-470 ◽  
Author(s):  
Changqing Shen ◽  
Xingzhou Yan ◽  
Fangzhu Qing ◽  
Xiaobin Niu ◽  
Richard Stehle ◽  
...  

2016 ◽  
Vol 2016 ◽  
pp. 1-10 ◽  
Author(s):  
S. Chaitoglou ◽  
E. Pascual ◽  
E. Bertran ◽  
J. L. Andujar

The extraordinary properties of graphene make it one of the most interesting materials for future applications. Chemical vapor deposition (CVD) is the synthetic method that permits obtaining large areas of monolayer graphene. To achieve this, it is important to find the appropriate conditions for each experimental system. In our CVD reactor working at low pressure, important factors appear to be the pretreatment of the copper substrate, considering both its cleaning and its annealing before the growing process. The carbon precursor/hydrogen flow ratio and its modification during the growth are significant in order to obtain large area graphene crystals with few defects. In this work, we have focused on the study of the methane and the hydrogen flows to control the production of single layer graphene (SLG) and its growth time. In particular, we observe that hydrogen concentration increases during a usual growing process (keeping stable the methane/hydrogen flow ratio) resulting in etched domains. In order to balance this increase, a modification of the hydrogen flow results in the growth of smooth hexagonal SLG domains. This is a result of the etching effect that hydrogen performs on the growing graphene. It is essential, therefore, to study the moderated presence of hydrogen.


2014 ◽  
Vol 16 (38) ◽  
pp. 20392-20397 ◽  
Author(s):  
Yunzhou Xue ◽  
Bin Wu ◽  
Hongtao Liu ◽  
Jiahui Tan ◽  
Wenping Hu ◽  
...  

Large-area substitutional phosphorus–nitrogen co-doped monolayer graphene is directly synthesized on a Cu surface by chemical vapor deposition using molecules of phosphonitrilic chloride trimer as the phosphorus and nitrogen sources.


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