Spectrometric analysis of silicon nitride films deposited by low-temperature liquid-source CVD
Keyword(s):
2000 ◽
Vol 47
(7)
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pp. 1370-1374
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Keyword(s):
2010 ◽
Vol 23
(2)
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pp. 328-339
Keyword(s):
2002 ◽
Vol 299-302
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pp. 1360-1364
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1992 ◽
Vol 31
(Part 1, No. 2A)
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pp. 176-180
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2010 ◽
Vol 49
(5)
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pp. 056505
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Keyword(s):
1991 ◽
Vol 22
(7-8)
◽
pp. 19-26
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