A novel stick-slip piezoelectric actuator based on two-stage flexible hinge structure

2020 ◽  
Vol 91 (5) ◽  
pp. 055006 ◽  
Author(s):  
Zheng Li ◽  
Liang Zhao ◽  
Xuze Yu
2020 ◽  
Vol 29 (5) ◽  
pp. 055035
Author(s):  
Xiaosong Zhang ◽  
Yang Yu ◽  
Qiang Gao ◽  
Guangda Qiao ◽  
Zelin Li ◽  
...  

Micromachines ◽  
2021 ◽  
Vol 12 (2) ◽  
pp. 154
Author(s):  
Zheng Li ◽  
Zhirong Su ◽  
Liang Zhao ◽  
Haitao Han ◽  
Zhanyu Guo ◽  
...  

A novel piezoelectric actuator using a two-stage flexure hinge structure is proposed in this paper, which is used in a compact and high-precision electromechanical field. The two-stage flexure hinge structure is used to provide horizontal thrust and vertical clamping force to the driving feet, which solves the problems of unstable clamping force and insufficient load capacity in traditional stick-slip piezoelectric actuators. Firstly, the main structure of the driver and the working process under the triangular wave excitation voltage are briefly introduced. Secondly, after many simulation tests, the structure of the actuator is optimized and the stability of the structure in providing clamping force is verified. Finally, through the research of the operating performance, when the amplitude is 150 V and the frequency is 3.25 kHz as the excitation source, the maximum speed can reach 338 mm/s and can bear about 3 kg load. It can be seen from the analysis that the two-stage flexure hinge structure can improve the displacement trajectory.


2018 ◽  
Vol 89 (8) ◽  
pp. 086101 ◽  
Author(s):  
Yikang Li ◽  
Hengyu Li ◽  
Tinghai Cheng ◽  
Xiaohui Lu ◽  
Hongwei Zhao ◽  
...  

Actuators ◽  
2021 ◽  
Vol 10 (2) ◽  
pp. 39
Author(s):  
Yunlai Shi ◽  
Chengshu Lou ◽  
Jun Zhang

To perform a high resolution and long stroke application in optical precision instruments, a linear piezoelectric actuator operated in stick-slip/scan modes for driving a linear motion table is presented. The proposed piezoelectric actuator is a piezoelectric composite structure, which includes a metal elastomer, a piezoelectric stack, and a frictional ball. The purpose of this paper is to describe the operation principle, design, and the running test and resolution test of the linear motion table driven by the proposed piezoelectric actuator. The notable feature is the flexible hinges of the actuator, including composite hinge, pre-pressure adjustment flexible hinge, and transmission flexible hinge, which are designed for decoupling the motion in the action direction of the piezoelectric stack and the direction in which the pre-pressure is applied. A prototype has been fabricated and two operation modes of the piezoelectric actuator, stick-slip and scan mode, were utilized to test the driving characteristics of the linear motion table. Experimental results show that the finest step resolutions in stick-slip mode and scan mode achieved 12 nm and 4 nm, respectively.


Micromachines ◽  
2019 ◽  
Vol 10 (12) ◽  
pp. 863 ◽  
Author(s):  
Weiqing Huang ◽  
Mengxin Sun

A piezoelectric actuator using a lever mechanism is designed, fabricated, and tested with the aim of accomplishing long-travel precision linear driving based on the stick-slip principle. The proposed actuator mainly consists of a stator, an adjustment mechanism, a preload mechanism, a base, and a linear guide. The stator design, comprising a piezoelectric stack and a lever mechanism with a long hinge used to increase the displacement of the driving foot, is described. A simplified model of the stator is created. Its design parameters are determined by an analytical model and confirmed using the finite element method. In a series of experiments, a laser displacement sensor is employed to measure the displacement responses of the actuator under the application of different driving signals. The experiment results demonstrate that the velocity of the actuator rises from 0.05 mm/s to 1.8 mm/s with the frequency increasing from 30 Hz to 150 Hz and the voltage increasing from 30 V to 150 V. It is shown that the minimum step distance of the actuator is 0.875 μm. The proposed actuator features large stroke, a simple structure, fast response, and high resolution.


2020 ◽  
Vol 91 (10) ◽  
pp. 105005
Author(s):  
Zhi Xu ◽  
Xuan Li ◽  
Kuifeng Wang ◽  
Tianwei Liang ◽  
Jingshi Dong ◽  
...  

2009 ◽  
Vol 407-408 ◽  
pp. 159-162
Author(s):  
Hua Wei Chen ◽  
Ichiro Hagiwara

One novel long-travel piezoelectric-driven linear micropositioning stage capable of moving in a stepping mode is developed. The stick-slip friction effect between flexure hinge actuation tips with a sliding stage is used to drive the stage step-by-step through an enlarged displacement of piezoelectric actuator. In order to enlarge the travel range, magnifying mechanism is optimally designed by use of flexure hinge and lever beam. Moreover, dynamic model of such stage is proposed by consideration of reset integrator stick-slip model. The simulation results show that the stage has considerable good dynamic properties.


2020 ◽  
Vol 2020 ◽  
pp. 1-11
Author(s):  
Yuan Wang ◽  
Minglong Xu ◽  
Shubao Shao ◽  
Siyang Song ◽  
Yan Shao

A novel stick-slip rotary piezoelectric actuator is designed for optical use. The actuator is proposed, fabricated, and tested with the aim of realizing both fine resolution and a long stroke. The dynamic model of the actuator is established, and simulations are performed to discover how the input driving voltage affects the stick-slip motion of the actuator. An experimental system is built to evaluate the performance of the actuator at different frequencies, voltages, and numbers of driving piezoelectric stacks. Experimental results show that the minimal output stepping angle is 3.5 μrad (0.2 millidegrees) under a sawtooth waveform having a voltage of 13 V and frequency of 3000 Hz and that the velocity reaches 0.44 rad/s (25°/s) under a sawtooth waveform having a voltage of 93 V and frequency of 3000 Hz, while the stroke is infinite. The proposed actuator provides stable and accurate rotary motion and realizes a high velocity.


IEEE Access ◽  
2019 ◽  
Vol 7 ◽  
pp. 157724-157729 ◽  
Author(s):  
Jiafeng Yao ◽  
Junjie Cai ◽  
Yili Hu ◽  
Jianming Wen ◽  
Nen Wan ◽  
...  

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