A low frequency operation high speed stick-slip piezoelectric actuator achieved by using a L-shape flexure hinge

The piezoelectrically-actuated stick-slip nanopositioning stage (PASSNS) has been applied extensively, and many designs of PASSNSs have been developed. The friction force between the stick-slip surfaces plays a critical role in successful movement of the stage, which influences the load capacity, dynamic performance, and positioning accuracy of the PASSNS. Toward solving the influence problems of friction force, this paper presents a novel stick-slip nanopositioning stage where the flexure hinge-based friction force adjusting unit was employed. Numerical analysis was conducted to estimate the static performance of the stage, a dynamic model was established, and simulation analysis was performed to study the dynamic performance of the stage. Further, a prototype was manufactured and a series of experiments were carried out to test the performance of the stage. The results show that the maximum forward and backward movement speeds of the stage are 1 and 0.7 mm/s, respectively, and the minimum forward and backward step displacements are approximately 11 and 12 nm, respectively. Compared to the step displacement under no working load, the forward and backward step displacements only increase by 6% and 8% with a working load of 20 g, respectively. And the load capacity of the PASSNS in the vertical direction is about 72 g. The experimental results confirm the feasibility of the proposed stage, and high accuracy, high speed, and good robustness to varying loads were achieved. These results demonstrate the great potential of the developed stage in many nanopositioning applications.

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Novel Precision PZT-Driven Micropositioning Stage with Large Travel Range

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.407-408.159 ◽

2009 ◽

Vol 407-408 ◽

pp. 159-162

Author(s):

Hua Wei Chen ◽

Ichiro Hagiwara

Keyword(s):

Dynamic Model ◽

Piezoelectric Actuator ◽

Dynamic Properties ◽

Flexure Hinge ◽

Slip Model ◽

Stick Slip ◽

Friction Effect ◽

Simulation Results

One novel long-travel piezoelectric-driven linear micropositioning stage capable of moving in a stepping mode is developed. The stick-slip friction effect between flexure hinge actuation tips with a sliding stage is used to drive the stage step-by-step through an enlarged displacement of piezoelectric actuator. In order to enlarge the travel range, magnifying mechanism is optimally designed by use of flexure hinge and lever beam. Moreover, dynamic model of such stage is proposed by consideration of reset integrator stick-slip model. The simulation results show that the stage has considerable good dynamic properties.

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The Asymmetric Flexure Hinge Structures and the Hybrid Excitation Methods for Piezoelectric Stick-Slip Actuators

10.5772/intechopen.95536 ◽

2021 ◽

Author(s):

Tinghai Cheng ◽

Xiaosong Zhang ◽

Xiaohui Lu ◽

Hengyu Li ◽

Qi Gao ◽

...

Keyword(s):

High Speed ◽

Low Voltage ◽

Mode Conversion ◽

Resonant Mode ◽

Superior Performance ◽

Flexure Hinge ◽

Asymmetric Structure ◽

Stick Slip ◽

Output Performance ◽

Long Stroke

Piezoelectric stick–slip actuators have become viable candidates for precise positioning and precise metering due to simple structure and long stroke. To improve the performances of the piezoelectric stick–slip actuators, our team deeply studies the actuators from both structural designs and driving methods. In terms of structural designs, the trapezoid-type, asymmetrical flexure hinges and mode conversion piezoelectric stick–slip actuators are proposed to improve the velocity and load based on the asymmetric structure; besides, a piezoelectric stick–slip actuator with a coupled asymmetrical flexure hinge mechanism is also developed to achieve the bidirectional motion. In terms of driving methods, a non-resonant mode smooth driving method (SDM) based on ultrasonic friction reduction is first proposed to restrain the backward motion during the rapid contraction stage. Then, a resonant mode SDM is further developed to improve the output performance of the piezoelectric stick–slip actuator. On this basis, the low voltage and symmetry of the SDM are also discussed. Finally, the direction-guidance hybrid method (DGHM) excitation method is presented to achieve superior performance, especially for high speed.

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Simple and high-performance stick-slip piezoelectric actuator based on an asymmetrical flexure hinge driving mechanism

Journal of Intelligent Material Systems and Structures ◽

10.1177/1045389x19862376 ◽

2019 ◽

Vol 30 (14) ◽

pp. 2125-2134 ◽

Cited By ~ 6

Author(s):

Qi Gao ◽

Meng He ◽

Xiaohui Lu ◽

Chi Zhang ◽

Tinghai Cheng

Keyword(s):

Piezoelectric Actuator ◽

High Performance ◽

Maximum Velocity ◽

Maximum Load ◽

Maximum Efficiency ◽

Flexure Hinge ◽

Tangential Displacement ◽

Driving Mechanism ◽

Stick Slip ◽

New Type

This article presented a new type of stick-slip piezoelectric actuator based on an asymmetrical flexure hinge driving mechanism. The key of the driving mechanism was a four-bar mechanism with different minimum thicknesses of right-circle flexure hinges. Combined with a symmetrical indenter, the asymmetrical flexure hinge driving mechanism generated controllable tangential displacement by changing the locking force. Therefore, the simple structured stick-slip piezoelectric actuator achieved considerable improvements especially in output speed and efficiency. In order to obtain improved actuator properties, the minimum thicknesses of asymmetrical flexure hinge driving mechanism, the tangential and normal displacements of the indenter were analyzed and investigated by finite element method. A prototype was fabricated and experiment investigation of the actuator characteristics was presented. Testing results indicated that the actuator achieved the maximum velocity of 15.04 mm/s and its maximum load reached 440 g under a voltage of 100 Vp-p and a frequency of 490 Hz. The maximum efficiency of the actuator was 3.66% with a load of 280 g under a locking force of 5 N and the actuated velocity of 10.17 mm/s.

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Design and Locomotion Study of Stick-Slip Piezoelectric Actuator Using Two-Stage Flexible Hinge Structure

Micromachines ◽

10.3390/mi12020154 ◽

2021 ◽

Vol 12 (2) ◽

pp. 154

Author(s):

Zheng Li ◽

Zhirong Su ◽

Liang Zhao ◽

Haitao Han ◽

Zhanyu Guo ◽

...

Keyword(s):

Piezoelectric Actuator ◽

Load Capacity ◽

Flexure Hinge ◽

Maximum Speed ◽

Clamping Force ◽

Two Stage ◽

Stick Slip ◽

The Stability ◽

Horizontal Thrust ◽

Electromechanical Field

A novel piezoelectric actuator using a two-stage flexure hinge structure is proposed in this paper, which is used in a compact and high-precision electromechanical field. The two-stage flexure hinge structure is used to provide horizontal thrust and vertical clamping force to the driving feet, which solves the problems of unstable clamping force and insufficient load capacity in traditional stick-slip piezoelectric actuators. Firstly, the main structure of the driver and the working process under the triangular wave excitation voltage are briefly introduced. Secondly, after many simulation tests, the structure of the actuator is optimized and the stability of the structure in providing clamping force is verified. Finally, through the research of the operating performance, when the amplitude is 150 V and the frequency is 3.25 kHz as the excitation source, the maximum speed can reach 338 mm/s and can bear about 3 kg load. It can be seen from the analysis that the two-stage flexure hinge structure can improve the displacement trajectory.

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Design and Analysis of a Stepping Piezoelectric Actuator Free of Backward Motion

Actuators ◽

10.3390/act10080200 ◽

2021 ◽

Vol 10 (8) ◽

pp. 200

Author(s):

Xiaofeng Yang ◽

Jinyan Tang ◽

Wenxin Guo ◽

Hu Huang ◽

Haoyin Fan ◽

...

Keyword(s):

Piezoelectric Actuator ◽

Matrix Method ◽

Piezoelectric Actuators ◽

Flexure Hinge ◽

Compliance Matrix ◽

Stick Slip ◽

New Strategy ◽

Piezoelectric Stacks ◽

Compliance Matrix Method ◽

Phase Differences

Although the stick-slip principle has been widely employed for designing piezoelectric actuators, there still exits an intrinsic drawback, i.e., the backward motion, which significantly affects its output performances and applications. By analyzing the generation mechanism of backward motion in stick-slip piezoelectric actuators, the elliptical trajectory was employed to design a novel stepping piezoelectric actuator free of backward motion. Accordingly, a prototype of piezoelectric actuator was designed, which utilized a flexure hinge mechanism and two vertically arranged piezoelectric stacks to generate the required elliptical trajectory. The compliance matrix method was used to theoretically analyze the flexure hinge mechanism. The theoretical and measured elliptical trajectories under various phase differences were compared, and the phase difference of 45° was selected accordingly. Under a critical relative gap, output performances of the actuator working under the elliptical trajectory were characterized, and then compared with that obtained under the normal stick-slip driving principle. Experimental results indicated that forward and reverse stepping displacement with completely suppressed backward motion could be achieved when employing the elliptical trajectory, verifying its feasibility. This study provides a new strategy for designing a stepping piezoelectric actuator free of backward motion.

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Design, modeling, and performance of a bidirectional stick-slip piezoelectric actuator with coupled asymmetrical flexure hinge mechanisms

Journal of Intelligent Material Systems and Structures ◽

10.1177/1045389x20942325 ◽

2020 ◽

Vol 31 (17) ◽

pp. 1961-1972

Author(s):

Xiaohui Lu ◽

Qiang Gao ◽

Qi Gao ◽

Yang Yu ◽

Xiaosong Zhang ◽

...

Keyword(s):

Piezoelectric Actuator ◽

Load Capacity ◽

Maximum Load ◽

Maximum Efficiency ◽

Flexure Hinge ◽

Tangential Displacement ◽

Maximum Output ◽

Stick Slip ◽

Force Variation ◽

And Performance

A stick-slip piezoelectric actuator with bidirectional motion is proposed and measured, which uses coupled asymmetrical flexure hinge mechanisms and symmetrical indenter to generate controllable tangential displacement. The operating principle of the proposed stick-slip actuator is illustrated, and the normal force variation between the stator and slider is analyzed. A dynamic model based on the method of dimensionality reduction is established to simulate the displacement and load capacity. In order to obtain improved actuator properties, the design rules of the coupled flexure hinge mechanisms are discussed, and the tangential and normal displacements of the indenter are investigated by the finite element method. A prototype is fabricated, and the experiment investigation of the actuator characteristics is presented. Testing results indicate that the actuator achieves the maximum output velocity of 10.14 mm/s and its maximum load reaches 1.5 N under a voltage of 100 Vp–p and a frequency of 850 Hz in the positive x-direction. The maximum efficiency of the actuator is 0.57% with a load of 90 g, a locking force of 5 N, and the actuated velocity of 5.48 mm/s. In addition, experimental results confirm the feasibility of the presented model by comparing numerical simulation results.

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