Novel Precision PZT-Driven Micropositioning Stage with Large Travel Range

2009 ◽  
Vol 407-408 ◽  
pp. 159-162
Author(s):  
Hua Wei Chen ◽  
Ichiro Hagiwara
Keyword(s):  
Dynamic Model ◽  
Piezoelectric Actuator ◽  
Dynamic Properties ◽  
Flexure Hinge ◽  
Slip Model ◽  
Stick Slip ◽  
Friction Effect ◽  
Simulation Results

One novel long-travel piezoelectric-driven linear micropositioning stage capable of moving in a stepping mode is developed. The stick-slip friction effect between flexure hinge actuation tips with a sliding stage is used to drive the stage step-by-step through an enlarged displacement of piezoelectric actuator. In order to enlarge the travel range, magnifying mechanism is optimally designed by use of flexure hinge and lever beam. Moreover, dynamic model of such stage is proposed by consideration of reset integrator stick-slip model. The simulation results show that the stage has considerable good dynamic properties.

Simple and high-performance stick-slip piezoelectric actuator based on an asymmetrical flexure hinge driving mechanism

2019 ◽  
Vol 30 (14) ◽  
pp. 2125-2134 ◽  
Author(s):  
Qi Gao ◽  
Meng He ◽  
Xiaohui Lu ◽  
Chi Zhang ◽  
Tinghai Cheng
Keyword(s):  
Piezoelectric Actuator ◽  
High Performance ◽  
Maximum Velocity ◽  
Maximum Load ◽  
Maximum Efficiency ◽  
Flexure Hinge ◽  
Tangential Displacement ◽  
Driving Mechanism ◽  
Stick Slip ◽  
New Type

This article presented a new type of stick-slip piezoelectric actuator based on an asymmetrical flexure hinge driving mechanism. The key of the driving mechanism was a four-bar mechanism with different minimum thicknesses of right-circle flexure hinges. Combined with a symmetrical indenter, the asymmetrical flexure hinge driving mechanism generated controllable tangential displacement by changing the locking force. Therefore, the simple structured stick-slip piezoelectric actuator achieved considerable improvements especially in output speed and efficiency. In order to obtain improved actuator properties, the minimum thicknesses of asymmetrical flexure hinge driving mechanism, the tangential and normal displacements of the indenter were analyzed and investigated by finite element method. A prototype was fabricated and experiment investigation of the actuator characteristics was presented. Testing results indicated that the actuator achieved the maximum velocity of 15.04 mm/s and its maximum load reached 440 g under a voltage of 100 Vp-p and a frequency of 490 Hz. The maximum efficiency of the actuator was 3.66% with a load of 280 g under a locking force of 5 N and the actuated velocity of 10.17 mm/s.

scholarly journals Design and Locomotion Study of Stick-Slip Piezoelectric Actuator Using Two-Stage Flexible Hinge Structure

Micromachines ◽  
2021 ◽  
Vol 12 (2) ◽  
pp. 154
Author(s):  
Zheng Li ◽  
Zhirong Su ◽  
Liang Zhao ◽  
Haitao Han ◽  
Zhanyu Guo ◽  
...  
Keyword(s):  
Piezoelectric Actuator ◽  
Load Capacity ◽  
Flexure Hinge ◽  
Maximum Speed ◽  
Clamping Force ◽  
Two Stage ◽  
Stick Slip ◽  
The Stability ◽  
Horizontal Thrust ◽  
Electromechanical Field

A novel piezoelectric actuator using a two-stage flexure hinge structure is proposed in this paper, which is used in a compact and high-precision electromechanical field. The two-stage flexure hinge structure is used to provide horizontal thrust and vertical clamping force to the driving feet, which solves the problems of unstable clamping force and insufficient load capacity in traditional stick-slip piezoelectric actuators. Firstly, the main structure of the driver and the working process under the triangular wave excitation voltage are briefly introduced. Secondly, after many simulation tests, the structure of the actuator is optimized and the stability of the structure in providing clamping force is verified. Finally, through the research of the operating performance, when the amplitude is 150 V and the frequency is 3.25 kHz as the excitation source, the maximum speed can reach 338 mm/s and can bear about 3 kg load. It can be seen from the analysis that the two-stage flexure hinge structure can improve the displacement trajectory.

scholarly journals Design and Analysis of a Stepping Piezoelectric Actuator Free of Backward Motion

Actuators ◽  
2021 ◽  
Vol 10 (8) ◽  
pp. 200
Author(s):  
Xiaofeng Yang ◽  
Jinyan Tang ◽  
Wenxin Guo ◽  
Hu Huang ◽  
Haoyin Fan ◽  
...  
Keyword(s):  
Piezoelectric Actuator ◽  
Matrix Method ◽  
Piezoelectric Actuators ◽  
Flexure Hinge ◽  
Compliance Matrix ◽  
Stick Slip ◽  
New Strategy ◽  
Piezoelectric Stacks ◽  
Compliance Matrix Method ◽  
Phase Differences

Although the stick-slip principle has been widely employed for designing piezoelectric actuators, there still exits an intrinsic drawback, i.e., the backward motion, which significantly affects its output performances and applications. By analyzing the generation mechanism of backward motion in stick-slip piezoelectric actuators, the elliptical trajectory was employed to design a novel stepping piezoelectric actuator free of backward motion. Accordingly, a prototype of piezoelectric actuator was designed, which utilized a flexure hinge mechanism and two vertically arranged piezoelectric stacks to generate the required elliptical trajectory. The compliance matrix method was used to theoretically analyze the flexure hinge mechanism. The theoretical and measured elliptical trajectories under various phase differences were compared, and the phase difference of 45° was selected accordingly. Under a critical relative gap, output performances of the actuator working under the elliptical trajectory were characterized, and then compared with that obtained under the normal stick-slip driving principle. Experimental results indicated that forward and reverse stepping displacement with completely suppressed backward motion could be achieved when employing the elliptical trajectory, verifying its feasibility. This study provides a new strategy for designing a stepping piezoelectric actuator free of backward motion.

Design, modeling, and performance of a bidirectional stick-slip piezoelectric actuator with coupled asymmetrical flexure hinge mechanisms

2020 ◽  
Vol 31 (17) ◽  
pp. 1961-1972
Author(s):  
Xiaohui Lu ◽  
Qiang Gao ◽  
Qi Gao ◽  
Yang Yu ◽  
Xiaosong Zhang ◽  
...  
Keyword(s):  
Piezoelectric Actuator ◽  
Load Capacity ◽  
Maximum Load ◽  
Maximum Efficiency ◽  
Flexure Hinge ◽  
Tangential Displacement ◽  
Maximum Output ◽  
Stick Slip ◽  
Force Variation ◽  
And Performance

A stick-slip piezoelectric actuator with bidirectional motion is proposed and measured, which uses coupled asymmetrical flexure hinge mechanisms and symmetrical indenter to generate controllable tangential displacement. The operating principle of the proposed stick-slip actuator is illustrated, and the normal force variation between the stator and slider is analyzed. A dynamic model based on the method of dimensionality reduction is established to simulate the displacement and load capacity. In order to obtain improved actuator properties, the design rules of the coupled flexure hinge mechanisms are discussed, and the tangential and normal displacements of the indenter are investigated by the finite element method. A prototype is fabricated, and the experiment investigation of the actuator characteristics is presented. Testing results indicate that the actuator achieves the maximum output velocity of 10.14 mm/s and its maximum load reaches 1.5 N under a voltage of 100 Vp–p and a frequency of 850 Hz in the positive x-direction. The maximum efficiency of the actuator is 0.57% with a load of 90 g, a locking force of 5 N, and the actuated velocity of 5.48 mm/s. In addition, experimental results confirm the feasibility of the presented model by comparing numerical simulation results.

scholarly journals Design, Analysis, and Experiment on a Novel Stick-Slip Piezoelectric Actuator with a Lever Mechanism

Micromachines ◽  
2019 ◽  
Vol 10 (12) ◽  
pp. 863 ◽  
Author(s):  
Weiqing Huang ◽  
Mengxin Sun
Keyword(s):  
Piezoelectric Actuator ◽  
Simple Structure ◽  
Fast Response ◽  
Displacement Sensor ◽  
Design Parameters ◽  
The Finite Element Method ◽  
Stick Slip ◽  
Lever Mechanism ◽  
Series Of Experiments ◽  
Stator Design

A piezoelectric actuator using a lever mechanism is designed, fabricated, and tested with the aim of accomplishing long-travel precision linear driving based on the stick-slip principle. The proposed actuator mainly consists of a stator, an adjustment mechanism, a preload mechanism, a base, and a linear guide. The stator design, comprising a piezoelectric stack and a lever mechanism with a long hinge used to increase the displacement of the driving foot, is described. A simplified model of the stator is created. Its design parameters are determined by an analytical model and confirmed using the finite element method. In a series of experiments, a laser displacement sensor is employed to measure the displacement responses of the actuator under the application of different driving signals. The experiment results demonstrate that the velocity of the actuator rises from 0.05 mm/s to 1.8 mm/s with the frequency increasing from 30 Hz to 150 Hz and the voltage increasing from 30 V to 150 V. It is shown that the minimum step distance of the actuator is 0.875 μm. The proposed actuator features large stroke, a simple structure, fast response, and high resolution.

Intelligent Information of TS Fuzzy PID Control System of BLDCM

2013 ◽  
Vol 846-847 ◽  
pp. 313-316 ◽  
Author(s):  
Xiao Yun Zhang
Keyword(s):  
Control System ◽  
Dynamic Model ◽  
Pid Control ◽  
Control Method ◽  
Design Method ◽  
Fuzzy Pid ◽  
Fuzzy Pid Control ◽  
Control Precision ◽  
Simulation Results ◽  
Intelligent Information

This paper presented a new method based on the Fuzzy self - adaptive PID for BLDCM. This method overcomes some defects of the traditional PID control. Such as lower control precision and worse anti - jamming performance. It dynamic model of BLDCM was built, and then design method for TS fuzzy PID model is given, At last, it compared simulation results of PID control method with TS Fuzzy PID control method. The results show that the TS Fuzzy PID control method has more excellent dynamic antistatic performances, as well as anti-jamming performance. The experiment shows that TS fuzzy PID control has the stronger adaptability robustness and transplant.

Inverse Kinematic Solution and Dynamic Model to 3PTT Parallel Mechanism

2014 ◽  
Vol 945-949 ◽  
pp. 1421-1425
Author(s):  
Xiu Qing Hao
Keyword(s):  
Dynamic Model ◽  
Dynamic Simulation ◽  
Parallel Mechanism ◽  
Inverse Kinematic ◽  
Euler Method ◽  
Research Subject ◽  
Adams Software ◽  
Inverse Kinematic Analysis ◽  
Simulation Results ◽  
Kinematic Solution

Take typical parallel mechanism 3PTT as research subject, its inverse kinematic analysis solution was gotten. Dynamic model of the mechanism was established by Newton-Euler method, and the force and torque equations were derived. Dynamic simulation of 3PTT parallel mechanism was done by using ADAMS software, and simulation results have verified the correctness of the theoretical conclusions.

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