Distribution and Burgers vectors of dislocations in semiconductor wafers investigated by rocking-curve imaging

2005 ◽  
Vol 38 (1) ◽  
pp. 91-96 ◽  
Author(s):  
Daniel Lübbert ◽  
Claudio Ferrari ◽  
Petr Mikulík ◽  
Petra Pernot ◽  
Lukas Helfen ◽  
...  

The method called `rocking-curve imaging' (RCI) has recently been developed to visualize lattice imperfections in large crystals such as semiconductor wafers with high spatial resolution. The method is based on a combination of X-ray rocking-curve analysis and digital X-ray diffraction topography. In this article, an extension of the method is proposed by which dislocation densities in large-scale samples (semiconductor wafer crystals) can be quantified and their variation across the sample surface determined in an instrumentally simple way. Results from a nearly dislocation-free S-doped InP crystal and a semi-insulating GaAs are presented; both display a clearly non-random distribution of dislocations.

Author(s):  
W. Z. Chang ◽  
D. B. Wittry

Since Du Mond and Kirkpatrick first discussed the principle of a bent crystal spectrograph in 1930, curved single crystals have been widely utilized as spectrometric monochromators as well as diffractors for focusing x rays diverging from a point. Curved crystal diffraction theory predicts that the diffraction parameters - the rocking curve width w, and the peak reflection coefficient r of curved crystals will certainly deviate from those of their flat form. Due to a lack of curved crystal parameter data in current literature and the need for optimizing the choice of diffraction geometry and crystal materials for various applications, we have continued the investigation of our technique presented at the last conference. In the present abstract, we describe a more rigorous and quantitative procedure for measuring the parameters of curved crystals.The diffraction image of a singly bent crystal under study can be obtained by using the Johann geometry with an x-ray point source.


2021 ◽  
Vol 800 ◽  
pp. 140249
Author(s):  
Juan Macchi ◽  
Steve Gaudez ◽  
Guillaume Geandier ◽  
Julien Teixeira ◽  
Sabine Denis ◽  
...  

2013 ◽  
Vol 772 ◽  
pp. 193-199 ◽  
Author(s):  
Carsten Ohms ◽  
Rene V. Martins

Bi-metallic piping welds are frequently used in light water nuclear reactors to connect ferritic steel pressure vessel nozzles to austenitic stainless steel primary cooling piping systems. An important aspect for the integrity of such welds is the presence of residual stresses. Measurement of these residual stresses presents a considerable challenge because of the component size and because of the material heterogeneity in the weld regions. The specimen investigated here was a thin slice cut from a full-scale bi-metallic piping weld mock-up. A similar mock-up had previously been investigated by neutron diffraction within a European research project called ADIMEW. However, at that time, due to the wall thickness of the pipe, stress and spatial resolution of the measurements were severely restricted. One aim of the present investigations by high energy synchrotron radiation and neutrons used on this thin slice was to determine whether such measurements would render a valid representation of the axial strains and stresses in the uncut large-scale structure. The advantage of the small specimen was, apart from the easier manipulation, the fact that measurement times facilitated a high density of measurements across large parts of the test piece in a reasonable time. Furthermore, the recording of complete diffraction patterns within the accessible diffraction angle range by synchrotron X-ray diffraction permitted mapping the texture variations. The strain and stress results obtained are presented and compared for the neutron and synchrotron X-ray diffraction measurements. A strong variation of the texture pole orientations is observed in the weld regions which could be attributed to individual weld torch passes. The effect of specimen rocking on the scatter of the diffraction data in the butt weld region is assessed during the neutron diffraction measurements.


1990 ◽  
Vol 208 ◽  
Author(s):  
Neil Loxley ◽  
D. Keith Bowen ◽  
Brian K. Tanner

ABSTRACTReplacement of the pinhole collimator on a double axis X-ray diffractometer with a device incorporating a channel-cut crystal permits the beam to be pre-conditioned in angular divergence. We examine the merits of such devices, known as channel-cut collimators (CCC's), of different materials and reflections. The experimental performance of InP 004 and Si 022 CCC's is presented.With a reference crystal on the first axis, set in the dispersive peometry with respect to the CCC, conditioning in wavelength spread is achieved. Dispersion broadening is effectively eliminated and no resetting of the reference crystal is required when changing specimen materials or reflections. The devices have extremely low background and reduced Bragg tails. Application of the 4-reflection CCC to rocking curve analysis of thin epitaxial layers, ultra-low angle scattering from biological systems, grazing incidence reflectometry and triple axis diffraction of semi-conductors is discussed.


1971 ◽  
Vol 178 (1051) ◽  
pp. 131-149 ◽  

A previous occasion on which the Croonian lecture was directly concerned with the mechanism of muscular contraction was in 1945, when it was delivered by Professor W. T. Astbury. On that occasion he commented that it was a sign of the times that a physicist should be asked to give the Croonian lecture, and went on to say, and I quote: ‘We are at the dawn of a new era, the era of “molecular biology”, as I like to call it, and there is an urgency about the need for more intensive application of physics and chemistry, and specially structural analysis, to biological problems.’ These were very prophetic words, and, as a physicist just entering biology, I was much interested to read them, and to learn about his experiments. The basic experimental finding which Astbury reported (1947) was that there did not seem to be any important change in the wide angle X-ray diagram from muscle upon contraction; hence it followed that muscles did not contract by any process which simply involved the large-scale disorientation of originally well-ordered polypeptide chains, nor by an alteration in chain configuration in the well-ordered parts of the structure. Astbury suggested instead that there might be ‘specifically active foci’ which one could perhaps paraphrase as ‘larger structural units’ (i.e. larger than individual polypeptide chains) concerned in contraction, which might be studied in the electron microscope or by low angle X-ray diffraction.


2020 ◽  
Vol 90 (5) ◽  
pp. 795
Author(s):  
Р.В. Селюков ◽  
В.В. Наумов

Textured Pt films with thickness h=20-80 nm were sputter deposited on oxidized c-Si (100) wafers and annealed in vacuum at 500°C/60 min. The thickness dependencies of the crystalline texture parameters and of the fraction of crystalline phase δ are obtained for as-deposited and annealed films using X-ray diffraction. The determination of δ in textured films is carried out by the new method based on rocking curve analysis. It is found that annealing leads to the texture improvement and to the increasing of δ for all h. The less h, the stronger effects of texture improvement and of δ increasing. These results are explained by the annealing-induced formation of large secondary grains whose volume fraction increases as h decreases. The inhomogeneity of the depth distributions of texture parameters and of δ are investigated for the as-deposited Pt films.


2020 ◽  
Vol 82 (11) ◽  
pp. 2415-2424
Author(s):  
S. Mokhtari ◽  
N. Dokhan ◽  
S. Omeiri ◽  
B. Berkane ◽  
M. Trari

Abstract The hematite (α-Fe2O3) nanostructures were synthesized by thermal oxidation of metal at 500 °C under atmospheric pressure. We studied the effect of the electrochemical pretreatment of the substrate before calcinations and its impact on the morphology, crystalline structure, lattice microstructural, and optical properties of α-Fe2O3. Uniform nanosheets were observed on the sample surface after calcination; their dimension and morphology were accentuated by the pretreatment, as confirmed by the SEM images. The characteristics of the nanostructures, analyzed by X-ray diffraction (XRD), revealed a rhombohedral symmetry with the space group R-3c and lattice constants: a = 0.5034 nm and c = 1.375 nm. The average crystallite size and strain, determined from the Williamson-Hall (W-H) plot, showed substantial variations after the substrate pretreatment. The Raman spectroscopy confirmed the changes in the crystal properties of the hematite submitted to pretreatment. The diffuse reflectance allowed to evaluate the optical gap which lies between 1.2 and 1.97 eV, induced by the electrochemical processing. The photocatalytic activity of α-Fe2O3 films was assessed by the degradation of methylene blue (MB) under LED light; 15% enhancement of the degradation for the pretreated specimens was noticed.


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