Hysteretic Modelling of Piezoelectric Actuator Attached on Flexure Hinge Mechanism

Author(s):  
Adha Cahyadi ◽  
Yoshio Yamamoto
2009 ◽  
Vol 407-408 ◽  
pp. 159-162
Author(s):  
Hua Wei Chen ◽  
Ichiro Hagiwara

One novel long-travel piezoelectric-driven linear micropositioning stage capable of moving in a stepping mode is developed. The stick-slip friction effect between flexure hinge actuation tips with a sliding stage is used to drive the stage step-by-step through an enlarged displacement of piezoelectric actuator. In order to enlarge the travel range, magnifying mechanism is optimally designed by use of flexure hinge and lever beam. Moreover, dynamic model of such stage is proposed by consideration of reset integrator stick-slip model. The simulation results show that the stage has considerable good dynamic properties.


2019 ◽  
Vol 26 (3) ◽  
pp. 917-924 ◽  
Author(s):  
Nen Wan ◽  
Jianming Wen ◽  
Yili Hu ◽  
Junwu Kan ◽  
Jianping Li

2019 ◽  
Vol 30 (14) ◽  
pp. 2125-2134 ◽  
Author(s):  
Qi Gao ◽  
Meng He ◽  
Xiaohui Lu ◽  
Chi Zhang ◽  
Tinghai Cheng

This article presented a new type of stick-slip piezoelectric actuator based on an asymmetrical flexure hinge driving mechanism. The key of the driving mechanism was a four-bar mechanism with different minimum thicknesses of right-circle flexure hinges. Combined with a symmetrical indenter, the asymmetrical flexure hinge driving mechanism generated controllable tangential displacement by changing the locking force. Therefore, the simple structured stick-slip piezoelectric actuator achieved considerable improvements especially in output speed and efficiency. In order to obtain improved actuator properties, the minimum thicknesses of asymmetrical flexure hinge driving mechanism, the tangential and normal displacements of the indenter were analyzed and investigated by finite element method. A prototype was fabricated and experiment investigation of the actuator characteristics was presented. Testing results indicated that the actuator achieved the maximum velocity of 15.04 mm/s and its maximum load reached 440 g under a voltage of 100 Vp-p and a frequency of 490 Hz. The maximum efficiency of the actuator was 3.66% with a load of 280 g under a locking force of 5 N and the actuated velocity of 10.17 mm/s.


2011 ◽  
Vol 179-180 ◽  
pp. 1368-1373 ◽  
Author(s):  
Hua Wei Ji ◽  
Yong Qing Wen

In recent years, a flexure hinged micro-displacement platform driven by piezoelectric actuator is being widely used in vibration suppression and micro positioning applications for its fast response, nanometer resolution, no backlash, no friction and bigger driving force. This kind of precision micro positioning system with a high displacement resolution and wide motion range has been required for industrialized applications for a long time. This paper discusses the design and the characteristics of a flexure hinge-based micro-displacement platform driven by piezoelectric actuator, a four-bar parallel mechanism and a monolithic symmetrical mechanism are adopted in the design. An analytical model is presented and a series of formulae for the static behavior of the platform are derived. Based on the theoretical analysis, the optimum design schema is put forward. The experimental demonstration to study the performance of the platform is described, and the method for reducing nonlinearity errors is proposed. The experimental results are in close agreement with those predicted by the theoretical analysis.


Author(s):  
Jau-Liang Chen ◽  
Yan-Ming Chen

The purpose of this research is trying to design a 6 degree-of-freedom micro-precision positioning stage with monolithic mechanism. It is hoped that this stage can reach 10 μm strokes along linear axis and with rotational angle no less than 50 μrad. The dimension of this positioning stage should be less than 200 mm × 200 mm × 50 mm. By using flexure hinge and piezoelectric actuator, this stage can achieve nanometer resolution. From the experimental results, it is found that the stage can achieve a maximum displacement of 29.3 μm in X axis; 11.94 μm in Y axis; and 6.74 μm in Z axis. The stage can also achieve a maximum rotation of 405.41 μrad around Z axis; 57.18 μrad around X axis; and 63.72 μrad around Y axis. With open loop control, we have shown that the minimum step for the stage is 110 nm in X-axis; 45 nm in Y axis; and 30 nm in Z-axis.


Micromachines ◽  
2021 ◽  
Vol 12 (2) ◽  
pp. 154
Author(s):  
Zheng Li ◽  
Zhirong Su ◽  
Liang Zhao ◽  
Haitao Han ◽  
Zhanyu Guo ◽  
...  

A novel piezoelectric actuator using a two-stage flexure hinge structure is proposed in this paper, which is used in a compact and high-precision electromechanical field. The two-stage flexure hinge structure is used to provide horizontal thrust and vertical clamping force to the driving feet, which solves the problems of unstable clamping force and insufficient load capacity in traditional stick-slip piezoelectric actuators. Firstly, the main structure of the driver and the working process under the triangular wave excitation voltage are briefly introduced. Secondly, after many simulation tests, the structure of the actuator is optimized and the stability of the structure in providing clamping force is verified. Finally, through the research of the operating performance, when the amplitude is 150 V and the frequency is 3.25 kHz as the excitation source, the maximum speed can reach 338 mm/s and can bear about 3 kg load. It can be seen from the analysis that the two-stage flexure hinge structure can improve the displacement trajectory.


Actuators ◽  
2021 ◽  
Vol 10 (8) ◽  
pp. 200
Author(s):  
Xiaofeng Yang ◽  
Jinyan Tang ◽  
Wenxin Guo ◽  
Hu Huang ◽  
Haoyin Fan ◽  
...  

Although the stick-slip principle has been widely employed for designing piezoelectric actuators, there still exits an intrinsic drawback, i.e., the backward motion, which significantly affects its output performances and applications. By analyzing the generation mechanism of backward motion in stick-slip piezoelectric actuators, the elliptical trajectory was employed to design a novel stepping piezoelectric actuator free of backward motion. Accordingly, a prototype of piezoelectric actuator was designed, which utilized a flexure hinge mechanism and two vertically arranged piezoelectric stacks to generate the required elliptical trajectory. The compliance matrix method was used to theoretically analyze the flexure hinge mechanism. The theoretical and measured elliptical trajectories under various phase differences were compared, and the phase difference of 45° was selected accordingly. Under a critical relative gap, output performances of the actuator working under the elliptical trajectory were characterized, and then compared with that obtained under the normal stick-slip driving principle. Experimental results indicated that forward and reverse stepping displacement with completely suppressed backward motion could be achieved when employing the elliptical trajectory, verifying its feasibility. This study provides a new strategy for designing a stepping piezoelectric actuator free of backward motion.


2020 ◽  
Vol 31 (17) ◽  
pp. 1961-1972
Author(s):  
Xiaohui Lu ◽  
Qiang Gao ◽  
Qi Gao ◽  
Yang Yu ◽  
Xiaosong Zhang ◽  
...  

A stick-slip piezoelectric actuator with bidirectional motion is proposed and measured, which uses coupled asymmetrical flexure hinge mechanisms and symmetrical indenter to generate controllable tangential displacement. The operating principle of the proposed stick-slip actuator is illustrated, and the normal force variation between the stator and slider is analyzed. A dynamic model based on the method of dimensionality reduction is established to simulate the displacement and load capacity. In order to obtain improved actuator properties, the design rules of the coupled flexure hinge mechanisms are discussed, and the tangential and normal displacements of the indenter are investigated by the finite element method. A prototype is fabricated, and the experiment investigation of the actuator characteristics is presented. Testing results indicate that the actuator achieves the maximum output velocity of 10.14 mm/s and its maximum load reaches 1.5 N under a voltage of 100 Vp–p and a frequency of 850 Hz in the positive x-direction. The maximum efficiency of the actuator is 0.57% with a load of 90 g, a locking force of 5 N, and the actuated velocity of 5.48 mm/s. In addition, experimental results confirm the feasibility of the presented model by comparing numerical simulation results.


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