Strategy to Characterize Electromigration Short Length Effects in Cu/low-k Interconnects

Author(s):  
Z. Zhang ◽  
M. Kraatz ◽  
M. Hauschildt ◽  
S. Choi ◽  
A. Clausner ◽  
...  
Keyword(s):  
Low K ◽  
Author(s):  
Avril V. Somlyo ◽  
H. Shuman ◽  
A.P. Somlyo

This is a preliminary report of electron probe analysis of rabbit portal-anterior mesenteric vein (PAMV) smooth muscle cryosectioned without fixation or cryoprotection. The instrumentation and method of electron probe quantitation used (1) and our initial results with cardiac (2) and skeletal (3) muscle have been presented elsewhere.In preparations depolarized with high K (K2SO4) solution, significant calcium peaks were detected over the sarcoplasmic reticulum (Fig 1 and 2) and the continuous perinuclear space. In some of the fibers there were also significant (up to 200 mM/kg dry wt) calcium peaks over the mitochondria. However, in smooth muscle that was not depolarized, high mitochondrial Ca was found in fibers that also contained elevated Na and low K (Fig 3). Therefore, the possibility that these Ca-loaded mitochondria are indicative of cell damage remains to be ruled out.


2018 ◽  
Vol 2 (1) ◽  
pp. 45-54
Author(s):  
Qurotul Aini ◽  
Siti Ria Zuliana ◽  
Nuke Puji Lestari Santoso

The scale is usually used to check and determine the value of a qualitative factor in quantitative measures. The measurement scale is a management in agreement that is used as a reference to determine the short length of the interval that is in the measuring instrument, so that the measuring instrument when used in measurements will produce quantitative data. The results of the scale management calculation must be interpreted carefully because in addition to producing a rough picture, the respondent's answers are not just straightforward to be trusted. Types of measurement scales: Likert scale, Guttman scale, semantic differential scale, rating scale, Thurstone scale, Borgadus scale, and various other measurement management scales. One of the most difficult jobs for information technology researchers faced with the necessity of measuring variables is: finding directions in the midst of many existing sizes. If there is a good size for a particular variable, it seems that there are not many reasons to compile a new size yourself. Keywords: Scale, Measurement, Variables.


2010 ◽  
Vol 130 (4) ◽  
pp. 319-324
Author(s):  
Kouichiro Mizuno ◽  
Hirotake Sugawara ◽  
Akihiro Murayama
Keyword(s):  

2003 ◽  
Vol 766 ◽  
Author(s):  
Ahila Krishnamoorthy ◽  
N.Y. Huang ◽  
Shu-Yunn Chong

AbstractBlack DiamondTM. (BD) is one of the primary candidates for use in copper-low k integration. Although BD is SiO2 based, it is vastly different from oxide in terms of dielectric strength and reliability. One of the main reliability concerns is the drift of copper ions under electric field to the surrounding dielectric layer and this is evaluated by voltage ramp (V-ramp) and time dependent dielectric breakdown (TDDB). Metal 1 and Metal 2 intralevel comb structures with different metal widths and spaces were chosen for dielectric breakdown studies. Breakdown field of individual test structures were obtained from V-ramp tests in the temperature range of 30 to 150°C. TDDB was performed in the field range 0.5 – 2 MV/cm. From the leakage between combs at the same level (either metal 1 or metal 2) Cu drift through SiC/BD or SiN/BD interface was characterized. It was found that Cu/barrier and barrier/low k interfaces functioned as easy paths for copper drift thereby shorting the lines. Cu/SiC was found to provide a better interface than Cu/SiN.


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