Si-cap-free SiGe p-channel FinFETs and gate-all-around transistors in a replacement metal gate process: Interface trap density reduction and performance improvement by high-pressure deuterium anneal

2015 ◽  
Author(s):  
H. Mertens ◽  
R. Ritzenthaler ◽  
H. Arimura ◽  
J. Franco ◽  
F. Sebaai ◽  
...  
Keyword(s):  
High Pressure ◽  
Performance Improvement ◽  
Trap Density ◽  
Interface Trap Density ◽  
Interface Trap ◽  
Metal Gate ◽  
Density Reduction ◽  
And Performance

Interface Trap Density Reduction for Al2O3/GaN (0001) Interfaces by Oxidizing Surface Preparation prior to Atomic Layer Deposition

2015 ◽  
Vol 7 (23) ◽  
pp. 12774-12780 ◽  
Author(s):  
Dmitry M. Zhernokletov ◽  
Muhammad A. Negara ◽  
Rathnait D. Long ◽  
Shaul Aloni ◽  
Dennis Nordlund ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Surface Preparation ◽  
Atomic Layer ◽  
Trap Density ◽  
Interface Trap Density ◽  
Interface Trap ◽  
Density Reduction ◽  
Layer Deposition

Interface Trap Density Reduction Due to AlGeO Interfacial Layer Formation by Al Capping on Al2O3/GeOx/Ge Stack

2017 ◽  
Vol 64 (4) ◽  
pp. 1412-1417 ◽  
Author(s):  
Chih-Hsiung Huang ◽  
Yu-Shiang Huang ◽  
Da-Zhi Chang ◽  
Tzo-Yao Lin ◽  
Chee Wee Liu
Keyword(s):  
Interfacial Layer ◽  
Trap Density ◽  
Interface Trap Density ◽  
Interface Trap ◽  
Layer Formation ◽  
Density Reduction

scholarly journals High-pressure microwave plasma oxidation of 4H-SiC with low interface trap density

AIP Advances ◽  
2019 ◽  
Vol 9 (12) ◽  
pp. 125150 ◽  
Author(s):  
Xinyu Liu ◽  
Jilong Hao ◽  
Nannan You ◽  
Yun Bai ◽  
Shengkai Wang
Keyword(s):  
High Pressure ◽  
Microwave Plasma ◽  
Trap Density ◽  
Interface Trap Density ◽  
Interface Trap ◽  
Plasma Oxidation

Analyzing the interface trap density in SiGe capacitors using an abnormal flat band voltage shift at low temperature

2020 ◽  
Vol 13 (11) ◽  
pp. 111006
Author(s):  
Li-Chuan Sun ◽  
Chih-Yang Lin ◽  
Po-Hsun Chen ◽  
Tsung-Ming Tsai ◽  
Kuan-Ju Zhou ◽  
...  
Keyword(s):  
Low Temperature ◽  
Trap Density ◽  
Flat Band ◽  
Interface Trap Density ◽  
Interface Trap ◽  
Flat Band Voltage ◽  
Voltage Shift

Direct Measurement of Top and Sidewall Interface Trap Density in SOI FinFETs

2007 ◽  
Vol 28 (3) ◽  
pp. 232-234 ◽  
Author(s):  
G. Kapila ◽  
B. Kaczer ◽  
A. Nackaerts ◽  
N. Collaert ◽  
G. V. Groeseneken
Keyword(s):  
Direct Measurement ◽  
Trap Density ◽  
Interface Trap Density ◽  
Interface Trap

On the Correct Extraction of Interface Trap Density of MOS Devices With High-Mobility Semiconductor Substrates

2008 ◽  
Vol 55 (2) ◽  
pp. 547-556 ◽  
Author(s):  
Koen Martens ◽  
Chi On Chui ◽  
Guy Brammertz ◽  
Brice De Jaeger ◽  
Duygu Kuzum ◽  
...  
Keyword(s):  
High Mobility ◽  
Trap Density ◽  
Interface Trap Density ◽  
Interface Trap ◽  
Mos Devices ◽  
Semiconductor Substrates

scholarly journals Interface trap density and mobility extraction in InGaAs buried quantum well metal-oxide-semiconductor field-effect-transistors by gated Hall method

2014 ◽  
Vol 104 (13) ◽  
pp. 131605 ◽  
Author(s):  
Thenappan Chidambaram ◽  
Dmitry Veksler ◽  
Shailesh Madisetti ◽  
Andrew Greene ◽  
Michael Yakimov ◽  
...  
Keyword(s):  
Quantum Well ◽  
Metal Oxide ◽  
Field Effect ◽  
Field Effect Transistors ◽  
Metal Oxide Semiconductor ◽  
Trap Density ◽  
Oxide Semiconductor ◽  
Interface Trap Density ◽  
Interface Trap ◽  
Hall Method
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