Thermal-Fluid MEMS Devices: A Decade of Progress and Challenges Ahead

Microdevices are becoming more prevalent and important in current and future technologies. Over the past decade, countless studies have been conducted in developing thermal microdevices. This paper focuses on the progress of research made during the last decade regarding heat transfer and fluid flow in microheat sinks, micropumps, microturbines, microengines, micromixers, as well as microsensors. Recent experimental techniques in the thermal microelectromechanical systems (MEMS) field have also been presented. Although some thermal MEMS devices have penetrated the commercial market, the mass implementation of thermal MEMS devices in future technology is still quite far, and is highly desirable. During the next decade, vast amounts of research need to be conducted before other microdevices can infiltrate the mainstream. Possible future directions of research have also been provided.

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2020 Max Jacob Memorial Award (P. C. Wayner, Jr.) Review: Change-of-Phase in an Extended Meniscus

Journal of Heat Transfer ◽

10.1115/1.4052688 ◽

2021 ◽

Author(s):

Peter C. Wayner Jr. ◽

Joel L. Plawsky

Keyword(s):

Heat Transfer ◽

Fluid Flow ◽

Space Station ◽

Intermolecular Forces ◽

Film Boiling ◽

International Space ◽

The Past ◽

The Subject ◽

Memorial Award

Abstract The extended meniscus and the intermolecular and capillary forces that govern its behavior and connection to change of phase heat transfer have been the subject of an increasing body of research over the past 50 years. We have been fortunate to be at the forefront of this effort starting from the development of a capillary feeder, in Earth's gravity, to stabilize film boiling to running a series of transparent heat pipe experiments aboard the International Space Station hoping to better understand the role of intermolecular forces in microgravity. The use of ellipsometry and interferometry to highlight the location and state of the vapor-liquid interface have been key to these studies and have helped to uncover many new, interesting, and sometimes unexpected, phenomena associated with fluid flow and change-of-phase heat transfer.

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MEMS development focusing on collaboration using common facilities: a retrospective view and future directions

Microsystems & Nanoengineering ◽

10.1038/s41378-021-00290-x ◽

2021 ◽

Vol 7 (1) ◽

Author(s):

Masayoshi Esashi

Keyword(s):

Integrated Circuits ◽

Large Scale ◽

Microelectromechanical Systems ◽

Pressure Sensors ◽

Tactile Sensor ◽

Mems Devices ◽

Future Directions ◽

Active Matrix ◽

Large Scale Integration ◽

Scale Integration

AbstractI have been developing MEMS (microelectromechanical systems) technology and supporting the industry through collaboration. A facility was built in house on a 20 mm square wafer for use in prototyping MEMS and ICs (integrated circuits). The constructed MEMS devices include commercialized integrated capacitive pressure sensors, electrostatically levitated rotational gyroscopes, and two-axis optical scanners. Heterogeneous integration, which is a MEMS on an LSI (large-scale integration), was developed for sophisticated systems using LSI made in a foundry. This technology was applied for tactile sensor networks for safe robots, multi FBAR filters on LSI, active-matrix multielectron emitter arrays, and so on. The facility used to produce MEMS on 4- and 6-inch wafers was developed based on an old semiconductor factory and has been used as an open hands-on access facility by many companies. Future directions of MEMS research are discussed.

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Thermal Cloak: Theory, Experiment and Application

Materials ◽

10.3390/ma14247835 ◽

2021 ◽

Vol 14 (24) ◽

pp. 7835

Author(s):

Xiuli Yue ◽

Junyi Nangong ◽

Peiyan Chen ◽

Tiancheng Han

Keyword(s):

Heat Transfer ◽

Thermal Conduction ◽

Transformation Optics ◽

Future Directions ◽

The Past ◽

Great Progress ◽

Potential Applications ◽

Invisibility Cloaks ◽

Theory And Experiment ◽

Made In

In the past two decades, owing to the development of metamaterials and the theoretical tools of transformation optics and the scattering cancellation method, a plethora of unprecedented functional devices, especially invisibility cloaks, have been experimentally demonstrated in various fields, e.g., electromagnetics, acoustics, and thermodynamics. Since the first thermal cloak was theoretically reported in 2008 and experimentally demonstrated in 2012, great progress has been made in both theory and experiment. In this review, we report the recent advances in thermal cloaks, including the theoretical designs, experimental realizations, and potential applications. The three areas are classified according to the different mechanisms of heat transfer, namely, thermal conduction, thermal convection, and thermal radiation. We also provide an outlook toward the challenges and future directions in this fascinating area.

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Analysis and Comparison of RNA Pseudouridine Site Prediction Tools

Current Bioinformatics ◽

10.2174/1574893614666191018171521 ◽

2020 ◽

Vol 15 (4) ◽

pp. 279-286 ◽

Cited By ~ 1

Author(s):

Wei Chen ◽

Kewei Liu

Keyword(s):

Experimental Techniques ◽

Rna Modification ◽

Future Directions ◽

Computational Approaches ◽

Site Prediction ◽

Cellular Processes ◽

Prediction Tools ◽

The Past

Background: Pseudouridine (Ψ) is the most abundant RNA modification and has important functions in a series of biological and cellular processes. Although experimental techniques have made great contributions to identify Ψ sites, they are still labor-intensive and costineffective. In the past few years, a series of computational approaches have been developed, which provided rapid and efficient approaches to identify Ψ sites. Results: To provide the readership with a clear landscape about the recent development in this important area, in this review, we summarized and compared the representative computational approaches developed for identifying Ψ sites. Moreover, future directions in computationally identifying Ψ sites were discussed as well. Conclusion: We anticipate that this review will provide novel insights into the researches on pseudouridine modification.

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Integrated MEMS Technologies

MRS Bulletin ◽

10.1557/mrs2001.62 ◽

2001 ◽

Vol 26 (4) ◽

pp. 291-295 ◽

Cited By ~ 8

Author(s):

Andrea E. Franke ◽

Tsu-Jae King ◽

Roger T. Howe

Keyword(s):

Microelectromechanical Systems ◽

Inertial Sensors ◽

State Of The Art ◽

Mems Devices ◽

Sensors And Actuators ◽

Component Level ◽

Substantial Impact ◽

The Past ◽

Current State ◽

Mems Technology

While microelectromechanical systems (MEMS) technology has made a substantial impact over the past decade at the device or component level, it has yet to realize the “S” in its acronym, as complex microsystems consisting of sensors and actuators integrated with sense, control, and signal-processing electronics are still beyond the current state of the art. There are several incentives to co-fabricate MEMS devices and electronics on a single silicon chip, which apply to applications such as inertial sensors.

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On Future Directions in Pathology

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100053991 ◽

1982 ◽

Vol 40 ◽

pp. 274-277

Author(s):

Benjamin F. Trump ◽

Irene K. Berezesky ◽

Raymond T. Jones

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Clinical Pathology ◽

Future Directions ◽

Diagnostic Pathology ◽

The Past ◽

Transmission Electron ◽

Organ Systems ◽

The Many

The role of electron microscopy and associated techniques is assured in diagnostic pathology. At the present time, most of the progress has been made on tissues examined by transmission electron microscopy (TEM) and correlated with light microscopy (LM) and by cytochemistry using both plastic and paraffin-embedded materials. As mentioned elsewhere in this symposium, this has revolutionized many fields of pathology including diagnostic, anatomic and clinical pathology. It began with the kidney; however, it has now been extended to most other organ systems and to tumor diagnosis in general. The results of the past few years tend to indicate the future directions and needs of this expanding field. Now, in addition to routine EM, pathologists have access to the many newly developed methods and instruments mentioned below which should aid considerably not only in diagnostic pathology but in investigative pathology as well.

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