Bubble Nucleation and Growth on Surface of Rapidly Heated Micro Heaters
Keyword(s):
Time dependent surface temperatures on a micro heater were measured when a voltage pulse of 25~200 μs was applied to the heater. The dimensions of the micro polysilicon heaters fabricated on a silicon substrate are 50×5×0.523 μm3 for a micro line heater and 65×65×0.523 μm3 for a micro square heater. With the minimum voltage needed for bubble growth, the temperature for bubble nucleation on the heater immersed in FC-72 was measured to be 420.7 K for the micro line heater, which is close to the superheat limit of the working fluid. On the other hand a bubble nucleates at temperature of 388 K on the square heater. Bubble nucleation, growth and subsequent collapse process were visualized by a microscope-35 mm camera with a μs flash unit.
Keyword(s):
2017 ◽
Vol 15
(01)
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pp. 1830001
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Keyword(s):
1967 ◽
Vol 45
(24)
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pp. 3143-3151
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