Investigation of Oxide-Removal of Various Metal Particles for Fabricating MEMS-Based Corrosion Sensor
Recently, our research group has proposed a MEMS-based solid state corrosion sensor, which is based on embedding metal particle into elastomeric polymers to form a composite-based sensing material. The chemical and dimensional properties of the metal particles and polymer matrix will provide the tailorability in sensor sensitivity, selectivity, time response, and operating life-span. However, the oxidization of metallic particles prior to embedding is adverse for electrical transduction of such sensor. This paper will be based on the investigation of chemical etching protocols used to remove the oxide coating from metal particles without adversely alter the particle itself. The etching process must also be compatible with common MEMS fabrication processes and not limited by the wide range of particle sizes used (30nm–100um). More specifically, metal particles such as Titanium, Aluminum, Nickel, and Stainless Steel are currently being used and investigated.