Micro-EDM Milling of Micro Compressor Prototype
Micro power system is becoming more and more important for micro- and nano-scale system. The fast development of MEMS (Micro Electromechanical Systems) has strongly enhanced the application of new harder work materials. The fabrication of metallic 3D microstructures has been one of the most attractive topics of micro machining. Currently the basic materials of Micro-turbine Engineering were nonmetal materials such as SiC, most of them are 2D or quasi-3D structures. This paper focuses on the manufacturing process on micro compressor prototype by micro-EDM milling. The micro compressor prototype contains the rotor disk and stator disk. A simple tool path generation by CAD/CAM software and a general electrode wear compensation strategy is presented. The micro compressor prototype with rotor and stator disks was successfully fabricated by using this strategy, and the materials of workpieces are nickel alloy GH4169 and titanium alloy TC4.