Micro-Machinability Studies of Single Crystal Silicon Using Diamond End-Mill

2016 ◽  
Author(s):  
Zi Jie Choong ◽  
Dehong Huo ◽  
Patrick Degenaar ◽  
Anthony O’Neill

This paper presents the research on the machinability studies in micro-milling of (001) silicon wafer. Excessive generation of undesirable surface and subsurface damages such as surface edge chipping often occurs when machined at depth of cut of several hundreds of microns. Ideal machining strategy to reduce the generation of edge chipping is required. Investigations on the effect of machining conditions on the cutting performances and size effect on the specific cutting energy in silicon micro-milling were conducted. These investigations provide understandings on the behavior of cutting mechanism during machining and helps to identify suitable machining parameters for fracture free machining using diamond end mills. Full slot milling were performed along <100> and <110> directions on a (001) surface wafer under various machining conditions. Results show that machined surfaces along <100> were of better quality than those along <110> and is in agreement with previous studies. Furthermore, good machining quality was achieved when machined at depth of cut of 10 μm or feed per tooth of 0.075 μm/tooth, regardless of the machining conditions. In addition, investigation for the size effect on specific cutting energy also shows that brittle mode machining begins when feed per tooth increases beyond 0.4 μm/tooth.

2012 ◽  
Vol 576 ◽  
pp. 46-50 ◽  
Author(s):  
M.A. Mahmud ◽  
A.K.M. Nurul Amin ◽  
M.D. Arif

This paper presents the thorough experimental analysis on high speed end milling of single crystal silicon using diamond coated tools. Experiments were conducted on CNC milling machine. The design of the experiments was based on the central composite design (CCD) technique of Design Expert software. Response Surface Methodology (RSM) was used to develop mathematical imperial model to establish a correlation between machining parameters (cutting speed, feed and depth of cut) and machined surface roughness in high speed end milling of single crystal silicon using 2mm diameter diamond coated tools. The optimum machining parameters were determined using the optimization tool of Design Expert software based on the desirability function. Finally, confirmation tests were performed to validate the developed model.


2019 ◽  
Vol 10 (2) ◽  
pp. 561-573 ◽  
Author(s):  
Muhammad Ali Khan ◽  
Syed Husain Imran Jaffery ◽  
Mushtaq Khan ◽  
Muhammad Younas ◽  
Shahid Ikramullah Butt ◽  
...  

Abstract. Productivity and economy are key elements of any sustainable manufacturing system. While productivity is associated to quantity and quality, economy focuses on energy efficient processes achieving an overall high output to input ratio. Machining of hard-to-cut materials has always posed a challenge due to increased tool wear and energy loss. Cryogenics have emerged as an effective means to improve sustainability in the recent past. In the present research the use of cooling conditions has been investigated as an input variable to analyze its effect on tool wear, specific cutting energy and surface roughness in combination with other input machining parameters of feed rate, cutting speed and depth of cut. Experimental design was based on Taguchi design of experiment. Analysis of Variance (ANOVA) was carried out to ascertain the contribution ratio of each input. Results showed the positive effect of coolant usage, particularly cryogenic, on process responses. Tool wear was improved by 33 % whereas specific cutting energy and surface roughness were improved by 10 % and 9 % respectively by adapting the optimum machining conditions.


Author(s):  
Sourabh Paul ◽  
PP Bandyopadhyay ◽  
S Paul

A lot of research has been undertaken in the area of conventional machining to study the effect of process parameters, tool geometry, machining environment and so on on machinability. But only recently, the research community has started analysing the carbon footprint of manufacturing processes. But very few articles could be located that attempted simultaneous minimisation of specific cutting energy and back force over a wide domain of process and tool-geometric parameters. This article has experimentally studied the effect of variation in depth of cut, feed, nose radius and tool geometry on simultaneous minimisation of specific cutting energy and back force while turning AISI 1060 steel with uncoated carbide inserts under dry machining environment. Minimisation of specific cutting energy and back force as individual criterion leads to conflicting choice of machining parameters. A combined criterion based on specific cutting energy and back force has been defined and for the minimisation of the same, cutting tools with positive rake need to be used, with high feed and moderate depth of cut.


Materials ◽  
2019 ◽  
Vol 12 (16) ◽  
pp. 2590
Author(s):  
Young-Hun Lee ◽  
Choon-Man Lee

This research objective was to determine the significant parameters for effective plasma assisted machining (PAM) of Ti-6Al-4V and to derive optimal processing conditions. PAM parameters such as feed rate, spindle speed, and depth of cut have significant effects on its machining characteristic. In this study, the design of experiments (DOE) was used to select optimal machining conditions for PAM. The signal-to-noise (S/N) ratio was analyzed using the Taguchi method and the contributions of the factors were determined using analysis of variance (ANOVA). Finally, the optimal PAM machining conditions were selected using response optimization. In addition, the energy efficiency of conventional machining (CM) and the PAM were compared. The energy efficiency was analyzed by specific cutting energy. The cutting force and surface roughness of PAM decreased by 60.2% and 70.5%, respectively, in optimal PAM machining conditions.


Author(s):  
Jiunn-Jyh Junz Wang ◽  
Yong-Yuan Liao

This paper investigated the scribing process characteristics of the hard and brittle materials including single crystal silicon, STV glass, and sapphire substrate. Under various cutting angles, major process characteristics are examined including the groove geometry, specific cutting energy, and critical depth of cut at the onset of ductile-to-brittle cutting transition. As the cutting depth increases, groove geometry clearly reveals the ductile-to-brittle transition from the plastic deformation to a brittle fracture state. The material size effect in the ductile region as well as the transition in scribing behavior is well reflected by change in the specific cutting energy. Further, it is shown that the change of specific cutting energy as a function of the cutting depth can serve as a criterion for estimating the critical depth of cut. Such estimated critical depth of cut is confirmed by measurement from a 3D confocal microscope. The critical depths of cut for these hard materials are found to be between 0.1μm and 0.5μm depending on the materials and cutting angles.


2016 ◽  
Vol 725 ◽  
pp. 641-646
Author(s):  
Takuya Inoue ◽  
Keiji Yamada ◽  
Katsuhiko Sekiya ◽  
Ryutaro Tanaka ◽  
Yasuo Yamane

The surface of worn dies are often machined to remove the worn layer and then to re-form its shape. But, in machining operations for hardened materials, the high cutting force sometimes yields bending deflection of low stiffness tools, and results the decrease in productivity and accuracy.In this study, surface treatment by pulsed laser is applied for the high hardness materials to improve the machinability in the machining operation. Die steels are used as work material machined with ball endmills of carbide in the experiments where the cutting force and the actual depth of cut are measured to obtain the specific cutting energy and to evaluate the machinability. In endmilling operations of the nitrided die steels, the actual depth of cut is decreased by the bending deflection of endmill. However, the surface treatment with laser moderates the decreasing of the actual depth of cut. It is confirmed that the surface of workpiece pre-treated with laser has larger roughness than un-treated ones, and the specific cutting energy is decreased by laser surface pre-treatment.


2016 ◽  
Vol 842 ◽  
pp. 14-18
Author(s):  
Sri Raharno ◽  
Yatna Yuwana Martawirya ◽  
Heng Rath Visith ◽  
Jeffry Aditya Cipta Wijaya

Manufacturing industries have consumed 30% of the total world energy. The main energy source used in those manufacturing industries is the electricity generated from fossil fuels such as oil, gas, and coal as a result in causing the environmental and economic issues. This paper presents an experimental study in order to get the minimum energy consumption during turning of aluminum 6010 with the conventional machine tool under dry cutting condition by optimizing the cutting parameters to contribute to those issues. An analysis of variance (ANOVA) was employed to analyze the effects and contribution of depth of cut, feed, and cutting speed on the response variable, specific cutting energy. The result of this experiment showed that the feed was the most significant factor for minimizing energy consumption followed by the cutting speed and the depth of cut. The minimum energy consumption was obtained when the highest level of cutting parameters have been used.


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