Layer structure evaluation of multilayer x-ray mirror by combination of focused ion beam etching and transmission electron microscopy
1993 ◽
Vol 11
(6)
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pp. 2127
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1998 ◽
Vol 16
(3)
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pp. 1127-1130
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2015 ◽
Vol 28
(5)
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pp. 1529-1538
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1999 ◽
Vol 17
(4)
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pp. 1201-1204
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