Study on physical model of resist surface charge in multi-beam mask writer and single variable-shaped beam writers

Author(s):  
Haruyuki Nomura ◽  
Noriaki Nakayamada ◽  
Hayato Kimura ◽  
Keisuke Yamaguchi ◽  
Takanao Touya ◽  
...  
2020 ◽  
Author(s):  
Haruyuki Nomura ◽  
Noriaki Nakayamada ◽  
Takehiko Katsumata ◽  
Rumi Ito ◽  
Yoshinori Kojima

Minerals ◽  
2021 ◽  
Vol 11 (5) ◽  
pp. 521
Author(s):  
Frank K. Crundwell

The kinetics of the dissolution of salts and minerals remains a field of active research because these reactions are important to many fields, such as geochemistry, extractive metallurgy, corrosion, biomaterials, dentistry, and dietary uptake. A novel model, referred to as the surface-vacancy model, has been proposed by the author as a general mechanism for the primary events in dissolution. This paper expands on the underlying physical model while serving as an update on current progress with the application of the model. This underlying physical model envisages that cations and anions depart separately from the surface leaving a surface vacancy of charge opposite to that of the departing ion on the surface. This results in an excess surface charge, which in turn affects the rate of departing ions. Thus, a feedback mechanism is established in which the departing of ions creates excess surface charge, and this net surface charge, in turn, affects the rate of departure. This model accounts for the orders of reaction, the equilibrium conditions, the acceleration or deceleration of rate in the initial phase and the surface charge. The surface-vacancy model can also account for the effect of impurities in the solution, while it predicts phenomena, such as ‘partial equilibrium’, that are not contemplated by other models. The underlying physical model can be independently verified, for example, by measurements of the surface charge. This underlying physical model has implications for fields beyond dissolution studies.


Author(s):  
N.J. Tao ◽  
J.A. DeRose ◽  
P.I. Oden ◽  
S.M. Lindsay

Clemmer and Beebe have pointed out that surface structures on graphite substrates can be misinterpreted as biopolymer images in STM experiments. We have been using electrochemical methods to react DNA fragments onto gold electrodes for STM and AFM imaging. The adsorbates produced in this way are only homogeneous in special circumstances. Searching an inhomogeneous substrate for ‘desired’ images limits the value of the data. Here, we report on a reversible method for imaging adsorbates. The molecules can be lifted onto and off the substrate during imaging. This leaves no doubt about the validity or statistical significance of the images. Furthermore, environmental effects (such as changes in electrolyte or surface charge) can be investigated easily.


Author(s):  
Oleksii Timkov ◽  
Dmytro Yashchenko ◽  
Volodymyr Bosenko

The article deals with the development of a physical model of a car equipped with measuring, recording and remote control equipment for experimental study of car properties. A detailed description of the design of the physical model and of the electronic modules used is given, links to application libraries and the code of the first part of the program for remote control of the model are given. Atmega microcontroller on the Arduino Uno platform was used to manage the model and register the parameters. When moving the car on the memory card saved such parameters as speed, voltage on the motor, current on the motor, the angle of the steered wheel, acceleration along three coordinate axes are recorded. Use of more powerful microcontrollers will allow to expand the list of the registered parameters of movement of the car. It is possible to measure the forces acting on the elements of the car and other parameters. In the future, it is planned to develop a mathematical model of motion of the car and check its adequacy in conducting experimental studies on maneuverability on the physical model. In addition, it is possible to conduct studies of stability and consumption of electrical energy. The physical model allows to quickly change geometric dimensions and mass parameters. In the study of highway trains, this approach will allow to investigate the various layout schemes of highway trains in the short term. It is possible to make two-axle road trains and saddle towed trains, three-way hitched trains of different layout. The results obtained will allow us to improve not only the mathematical model, but also the experimental physical model, and move on to further study the properties of hybrid road trains with an active trailer link. This approach allows to reduce material and time costs when researching the properties of cars and road trains. Keywords: car, physical model, experiment, road trains, sensor, remote control, maneuverability, stability.


Author(s):  
E. M. Solovyov ◽  
V. I. Novikov ◽  
B. V. Spitsyn ◽  
M. R. Kiselev ◽  
V. A. Sorokin ◽  
...  

1981 ◽  
Vol 4 ◽  
Author(s):  
T. J. Stultz ◽  
J. F. Gibbons

ABSTRACTStructural and electrical characterization of laser recrystallized LPCVD silicon films on amorphous substrates using a shaped cw laser beam have been performed. In comparing the results to data obtained using a circular beam, it was found that a significant increase in grain size can be achieved and that the surface morphology of the shaped beam recrystallized material was much smoother. It was also found that whereas circular beam recrystallized material has a random grain structure, shaped beam material is highly oriented with a <100> texture. Finally the electrical characteristics of the recrystallized film were very good when measured in directions parallel to the grain boundaries.


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