Dry Etching Characteristics of 16-nm Amorphous Carbon Layer in a Dual-Frequency Plasma Etcher

2020 ◽  
Vol 46 (7) ◽  
pp. 732-739
Author(s):  
Hee-Woon Cheong ◽  
Ji-Won Kim ◽  
Kyungji Kim ◽  
Hwally Lee
RSC Advances ◽  
2015 ◽  
Vol 5 (45) ◽  
pp. 36104-36107 ◽  
Author(s):  
Lei Wang ◽  
Boyang Ruan ◽  
Jiantie Xu ◽  
Hua Kun Liu ◽  
Jianmin Ma

The high-capacity of Nb2O5 nanosheets has been successfully realized through introducing amorphous carbon layers, which have been demonstrated to have a large capacity owing to the existence of defects on amorphous carbon layers.


2018 ◽  
Vol 663 ◽  
pp. 21-24 ◽  
Author(s):  
Se Jun Park ◽  
Dohyung Kim ◽  
Seungmoo Lee ◽  
Yongjoon Ha ◽  
Mingyoo Lim ◽  
...  

1992 ◽  
Vol 270 ◽  
Author(s):  
Li Chang

ABSTRACTDiamond films prepared by microwave plasma chemical vapor deposition, using a gas mixture of methane and hydrogen with ethanol, were formed on silicon substrates. Highresolution transmission electron microscopy was employed to characterize the microstructure at interface regions. It was found that the diamond crystals were grown on an amorphous carbon layer. Twins and stacking faults were observed at the regions interfaced with the amorphous carbon layer, suggesting that the defects may already exist in the nucleation stage and at the very first stage of growth. Also, some diamond nuclei embedded in the amorphous layer were observed.


2018 ◽  
Vol 29 (30) ◽  
pp. 305302 ◽  
Author(s):  
Paweł Piotr Michałowski ◽  
Iwona Pasternak ◽  
Paweł Ciepielewski ◽  
Francisco Guinea ◽  
Włodek Strupiński

1998 ◽  
Vol 4 (S2) ◽  
pp. 708-709
Author(s):  
A. Krishnan ◽  
E. Dujardin ◽  
T.W. Ebbesen ◽  
M.M.J. Treacy

The recent discovery of graphite cones [1,2] has raised some interesting questions about the nucleation and growth of curved graphitic structures. Here we report the structural peculiarities of one member of the ensemble, i.e. the flat graphite disks. Unlike graphite flakes seen in carbon soot which are irregularly shaped, the disks in this sample often show regular faceting which might give us additional insight into the growth mechanisms.The samples were examined in a Hitachi H9000 NAR TEM. Samples were sonicated in high purity methanol and dispersed on a 300 mesh Cu grid coated with a 20 nm thick amorphous carbon layer. Typical disk diameters range from 0.5 to 3.0 μm, with thickness ranging from 10 nm to 50 nm.A close examination reveals that the edges of the disks are faceted and typically have 12 sides. In most cases, the edges show a long facet alternating with a shorter facet.


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