PLASMA-ASSISTED VACUUM-COATING PROCESSES

1992 ◽  
Vol 06 (01) ◽  
pp. 1-24 ◽  
Author(s):  
GERHARD KIENEL
Keyword(s):  
Thin Films ◽  
Melting Point ◽  
Substrate Temperature ◽  
Important Variable ◽  
Coating Material ◽  
Melting Points ◽  
Coating Materials ◽  
Substrate Temperatures

For the properties of thin films produced in a vacuum the most important variable is the mobility of the particles in the course of condensation, which is dependent on the melting point of the coating material, the substrate temperature and the energy of the particles as they strike the substrate. Because of the generally higher particle energies in plasma-assisted processes, under comparable coating conditions lower substrate temperatures suffice than in the case of conventional evaporative coating. Especially with coating materials having higher melting points, compact films can be produced only if the particle energies are sufficiently high.

Effect of Substrate Temperature on the Electrochromic Properties of Cobalt Hydroxide Thin Films Prepared by Reactive Sputtering

2011 ◽  
Vol 1328 ◽  
Author(s):  
KyoungMoo Lee ◽  
Yoshio Abe ◽  
Midori Kawamura ◽  
Hidenobu Itoh
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Indium Tin Oxide ◽  
Large Change ◽  
Amorphous Structure ◽  
Cobalt Hydroxide ◽  
X Ray Diffraction ◽  
X Ray ◽  
Glass Substrates ◽  
Substrate Temperatures

ABSTRACTCobalt hydroxide thin films with a thickness of 100 nm were deposited onto glass, Si and indium tin oxide (ITO)-coated glass substrates by reactively sputtering a Co target in H2O gas. The substrate temperature was varied from -20 to +200°C. The EC performance of the films was investigated in 0.1 M KOH aqueous solution. X-ray diffraction (XRD) and Fourier transform infrared (FTIR) spectroscopy of the samples indicated that Co3O4 films were formed at substrate temperatures above 100°C, and amorphous CoOOH films were deposited in the range from 10 to -20°C. A large change in transmittance of approximately 26% and high EC coloration efficiency of 47 cm2/C were obtained at a wavelength of 600 nm for the CoOOH thin film deposited at -20°C. The good EC performance of the CoOOH films is attributed to the low film density and amorphous structure.

Influence of Substrate Temperature on Some Properties of Close-Spacing Thermally Evaporated CdTe Thin Films

2008 ◽  
Vol 55-57 ◽  
pp. 881-884 ◽  
Author(s):  
Thitinai Gaewdang ◽  
N. Wongcharoen ◽  
P. Siribuddhaiwon ◽  
N. Promros
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Suitable Condition ◽  
Xrd Analysis ◽  
Thermal Evaporation Method ◽  
Cdte Thin Films ◽  
Influence Of Substrate ◽  
Substrate Temperatures ◽  
Deposited Films ◽  
Resistance Value

CdTe thin films with different substrate temperatures have been deposited by thermal evaporation method on glass substrate in vacuum chamber having low pressure about 3.0x10-5 mbar. According to XRD analysis, CdTe thin films are polycrystalline belonging to cubic structure with preferential orientation of (111) plane. The strongest peak intensity of XRD is observed in the film prepared with substrate temperature of 150°C. Band gap and band tail values of the as-deposited films were evaluated from the optical transmission spectra. The lowest dark sheet resistance value was obtained from the film prepared with substrate temperature of 150°C as well. Regarding to our experimental results, it may be indicated that the 150°C substrate temperature is the most suitable condition in preparing CdTe thin films for solar cell applications.

Supercapacitive Properties of Cobalt Oxide Thin Films Prepared by Electrostatic Spray Deposition Technique at Different Substrate Temperature

2016 ◽  
Vol 675-676 ◽  
pp. 261-264
Author(s):  
Kasidid Chansaengsri ◽  
Korakot Onlaor ◽  
Thutiyaporn Thiwawong ◽  
Benchapol Tunhoo
Keyword(s):  
Thin Films ◽  
Phase Transformation ◽  
Substrate Temperature ◽  
Cobalt Oxide ◽  
Spray Deposition ◽  
High Specific Capacitance ◽  
Oxide Thin Films ◽  
Electrostatic Spray Deposition ◽  
Electrostatic Spray ◽  
Substrate Temperatures

In this work, cobalt oxide thin films were prepared by electrostatic spray deposition (ESD) technique. The influence of the substrate temperatures on properties of film was investigated. Phase transformation of cobalt oxide thin films due to the effect of different substrate temperature was also observed. Cyclic voltammetry was used to measure the performance of cobalt oxide supercapacitor. At higher substrate temperature, the cobalt oxide thin films exhibit the high specific capacitance due to the effect of phase transformation in cobalt oxide films.

EFFECT OF SUBSTRATE TEMPERATURE ON THE STRUCTURAL AND OPTICAL PROPERTIES OF NiTsPc THIN FILMS

2019 ◽  
Vol 27 (03) ◽  
pp. 1950124 ◽  
Author(s):  
MOHAMMED YARUB HANI ◽  
ADDNAN H. AL-AARAJIY ◽  
AHMED M. ABDUL-LETTIF
Keyword(s):  
Thin Films ◽  
Grain Size ◽  
Optical Properties ◽  
Substrate Temperature ◽  
Energy Gap ◽  
Chemical Spray Pyrolysis ◽  
Structural And Optical Properties ◽  
Absorption Bands ◽  
Tauc Plot ◽  
Substrate Temperatures

Nickel(II) phthalocyanine-tetrasulfonic acid tetrasodium salt (NiTsPc) thin films were deposited on glass substrates at different substrate temperatures ([Formula: see text]) by chemical spray pyrolysis (CSP) technique. The substrate temperature varied from 110∘C to 310∘C in 50∘C steps. The substrate surface temperature is the main parameter that determines the film morphology and properties of the thin films. The structural properties of the deposited NiTsPc thin films were investigated by X-ray diffraction (XRD) and from the obtained results, it was shown that depositing thin films using 210∘C as [Formula: see text] results in higher crystallinity. Atomic force microscope (AFM) was employed to obtain the surface topography and to calculate the roughness and grain size. The smoothest thin film surface was obtained when using at 160∘C, while the highest roughness was obtained at 310∘C. The optical properties were investigated by ultraviolet visible (UV-Vis) spectrophotometer and fluorescence spectrophotometer. From the absorption spectra recorded in the wavelength range 190–1100[Formula: see text]nm, two absorption bands were observed, which are known as Soret and Q-band. By observing the absorption spectrum, it can be concluded that the deposited thin films at 110∘C–310∘C have direct energy gap. From Tauc plot relation, the energy gap ([Formula: see text]) was calculated. The values of the energy gap were between 3.05 and 3.14[Formula: see text]eV. It was observed that different [Formula: see text] highly affects the structural and optical properties of the deposited thin films. The crystallinity, grain size, roughness and the optical properties were strongly affected by the different substrate temperatures.

Electrical Properties of Pulsed Laser Deposited ZnO Thin Films

2009 ◽  
Vol 67 ◽  
pp. 121-125
Author(s):  
Chattopadhyay Sourav ◽  
Kumar Nath Tapan
Keyword(s):  
Thin Films ◽  
Surface Morphology ◽  
Substrate Temperature ◽  
Hall Mobility ◽  
Pulsed Laser ◽  
Deposition Process ◽  
Zno Thin Films ◽  
Zno Films ◽  
Visible Absorption ◽  
Substrate Temperatures

Epitaxial Single-crystal ZnO thin films have been grown on c-plane (0001) sapphire by Pulsed Laser Deposition process at different substrate temperatures (300 – 800 °C) with 10-1 mbar oxygen pressure. The thicknesses of the films have been varied by varying number of pulses with a repetition rate of 10 pulse/sec. It is found that the sheet resistivity of ZnO thin films grown on c-plane sapphires are in the order of 10-2 Ω-cm and it increases with increasing substrate temperatures and film thickness. The carrier concentrations and Hall mobility are found to be in the order of 1017 cm-3 and ~195 cm2/V-s, respectively. The Hall mobility slightly decreases with increase of substrate temperature and thickness of the films. It is also found that the ZnO films are structurally uniform and well oriented with perfect wurtzite structure with c/a ratio 5.1. We have also deposited non-epitaxial ZnO films on (100) p-Silicon substrates at the same conditions. From HR FE-SEM micrographs, surface morphology of ZnO films grown at lower substrate temperature are found to be uniform compared to the films grown at higher temperatures showing non-uniformity and misoriented wurtzite structures. However, the surface morphology of ZnO flims grown epitaxially on (0001) sapphire are found to be more uniform and it does not change much with growth temperature. The resistivity of the films grown on p-Silicon at higher temperatures is in the order of 103 Ω-cm whereas films grown at lower substrate temperatures show comparatively lower resistivities (~ 102 Ω-cm). From the recorded UV-Visible absorption spectrum the band gap of the film has been estimated to be 3.38 eV.

Correlation of the Stress-Temperature History with Microstructure in A1-0.5Cu and A1-0.15Pd Thin Films

1994 ◽  
Vol 356 ◽  
Author(s):  
D. D. Knorr ◽  
K.P. Rodbell
Keyword(s):  
Thin Films ◽  
Thermal Expansion ◽  
Substrate Temperature ◽  
Grain Growth ◽  
Room Temperature ◽  
Temperature History ◽  
Thermal Expansion Mismatch ◽  
Grain Sizes ◽  
Substrate Temperatures ◽  
Precipitate Structure

AbstractBlanket films (1 μm thick) of both A1-0.5Cu and A1-0.15Pd were deposited at room temperature, 150°C, and 300°C. Stress in the as-deposited wafers increased with substrate temperature, as expected from the thermal expansion mismatch on cooling. All conditions were tiicrmally cycled to 450°C three times while continuously monitoring stress. The shapes of the curves were different for the two alloys because precipitates dissolve and reprecipitate in AlCu, but are present over the entire temperature range in AlPd. Lesser differences were evident comparing the stress-temperature behavior for the various substrate temperatures within a single alloy. The precipitate structure also influences the grain growth during thermal cycling, where substantially larger median grain sizes are found in AlCu compared to AlPd.

Influence of the substrate temperature on the structure of SrBi2Ta2O9 thin films obtained by laser ablation

1998 ◽  
Vol 541 ◽  
Author(s):  
J. A. Díaz ◽  
M. P. Cruz ◽  
O. E. Contreras ◽  
J. M. Siqueiros ◽  
J. Portelles
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Substrate Temperature ◽  
Structural Properties ◽  
Systematic Study ◽  
Sem And Tem ◽  
Substrate Temperatures

AbstractA systematic study is presented of the resulting SBT films deposited by PLD at substrate temperatures from 300 to 600°C. The characteristics of the film as-deposited are determined. Special attention is focused on the compositional and structural properties. XRD, SEM, and TEM analyses are reported.

Effect of Substrate Temperature on One-Step Magnetron-Sputtered Cu(In,Ga)Se2 Thin Films for Solar Cells

2013 ◽  
Vol 291-294 ◽  
pp. 703-707
Author(s):  
Gui Shan Liu ◽  
Hao Na Li ◽  
Xiao Yue Shen ◽  
Zhi Qiang Hu ◽  
Hong Shun Hao
Keyword(s):  
Thin Films ◽  
Absorption Coefficient ◽  
Substrate Temperature ◽  
Soda Lime ◽  
Soda Lime Glass ◽  
X Ray Diffraction ◽  
Measurement Analysis ◽  
One Step ◽  
High Absorption Coefficient ◽  
Substrate Temperatures

CIGS thin films were deposited on soda lime glass by one-step magnetron sputtering using a single quaternary-CIGS target in stoichiometric proportions. The influences of substrate temperature on the structural, optical, and electrical properties of Cu(In,Ga)Se2 (CIGS) thin films were investigated. The phase structure of CIGS thin films was characterized by X-ray diffraction (XRD). The morphology and thickness of CIGS thin films were observed by Scanning Electron Microscope (SEM). The absorption coefficient of CIGS thin films was measured by Ultraviolet-visible Spectrophotometer. Four-point probe method was used to test the resistivity of CIGS thin films. Based on the results of characterization, the increase in crystallite size of CIGS was found to be significantly noticeable with increasing substrate temperature. UV-vis measurement analysis suggested that CIGS thin films deposited at different substrate temperatures had high absorption coefficient (~104 cm-1) and optical band gap (1.07-1.23 eV). The substrate temperature dependence of the resistivity of the films indicated that the resistivity of the films fall to about 0.5 Ω۰cm as the substrate glass was heated up to 300 °C.

scholarly journals High temperature ferromagnetic ordering in c-axis oriented ZnO:Mn nanoparticle thin films by tailoring substrate temperature

2014 ◽  
Vol 32 ◽  
pp. 1460341 ◽  
Author(s):  
Usman Ilyas ◽  
P. Lee ◽  
T. L. Tan ◽  
R. V. Ramanujan ◽  
Sam Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Magnetic Measurements ◽  
Deep Level ◽  
Growth Conditions ◽  
Optical Quality ◽  
Host Matrix ◽  
X Ray ◽  
Ferromagnetic Ordering ◽  
Substrate Temperatures

This study reports the enhanced ferromagnetic ordering in ZnO:Mn nanoparticle thin films, grown at different substrate temperatures using pulsed laser deposition. The optimum growth conditions were deduced from X-ray, photoemission and magnetic measurements. The X-ray measurements reveal that there was an optimum substrate temperature where the thin films showed relatively stronger texture, better crystallinity and lower strain. Substrate temperature tuned the deep level recombination centers in ZnO:Mn , which changed the optical quality by altering the electronic structure. The M-H curves, in the present study, revealed superior ferromagnetic response of 20-nm sized particles in ZnO:Mn thin film grown at a substrate temperature of 450 °C. Ferromagnetic ordering becomes weaker at higher/lower substrate temperatures due to the activation of native defects in ZnO host matrix.

scholarly journals Hydrogenated Nano-Crystalline Silicon Thin Films in SiO2 Matrix for Next Generation Solar Cells Using Glow Discharged Decomposition

2018 ◽  
Vol 8 (1) ◽  
pp. 25
Author(s):  
Moniruzzaman Syed ◽  
Cameron Hynes ◽  
Brittany Anderson ◽  
Temer S Ahmadi ◽  
Boon Tong Goh ◽  
...  
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Energy Gap ◽  
Volume Fraction ◽  
Crystalline Silicon ◽  
Strong Dependence ◽  
Blue Shift ◽  
Nanocrystalline Silicon ◽  
Optical Energy Gap ◽  
Substrate Temperatures

Hydrogenated Nanocrystalline Silicon (nc-Si:H) thin films using SiH4/H2 mixture by glow discharged decomposition were investigated on c-Si and glass substrates. The effects of substrate temperature on the Structural, Optical and Electrical properties of the films were investigated by X-ray diffraction, Raman scattering, FT/IR, Optical transmission and Atomic Force Microscopy (AFM). Substrate temperatures ([TSB]) of the films were changed from 100oC to 250oC. It has been revealed the strong dependence on the film’s properties with the substrate temperatures. XRD and Raman measurements were shown that the higher substrate temperature (250oC) exhibits the highest crystalline volume fraction ([ρ] = 95%) and the lowest crystalline size ([Ω] = 3.5 nm) as well, having the highest H-content and the lowest O-content. At 250oC, the lowest mobility and the highest resistivity were also found to be ~37.5 cm2/v.s and 7.35 Ω-cm. Refractive index and the optical energy gap (Eg) were estimated by 3.8 and 1.9 eV having the growth rate of 4.2 nm/min. At 250oC, it was resulted in a blue shift of the absorption edge having uniform grain distributions. Results indicate that in situ hydrogen cleaning effects is prominent and localized orderly high density Si-Si bonds are exhibiting quantum size effects at highest substrate temperature.

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