NANOCOMPOSITE nc-TiC/a-C:H FILMS FABRICATED BY DUAL PLASMA TECHNIQUE

2007 ◽  
Vol 14 (05) ◽  
pp. 891-897
Author(s):  
YAOHUI WANG ◽  
XU ZHANG ◽  
YUANZHI XU ◽  
XIANYING WU ◽  
HUIXING ZHANG ◽  
...  

Nanocomposite nc-TiC / a-C : H films have been deposited via filtered cathodic vacuum arc technique, employing Ti target and C 2 H 2 gas as material precursors. The composition and nanostructure of film, correlated to mechanical and tribological properties of film, are varied by changing C 2 H 2 flow rate and filter coil current. Glancing angle X-ray diffraction has been used to show that salient TiC (111) peak exists in film with grain size of order of 8–10 nm, as a function of filter coil current. Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) investigations demonstrate that the nc-TiC / a-C : H films mainly contain nanocrystalline graphite and sp2-bonded carbon, both as a function of C 2 H 2 flow rate. Mechanical tests confirm that the nc-TiC / a-C : H films possess superior hardness of 33.9 GPa and elastic modulus of 237.6 GPa.

2008 ◽  
Vol 15 (06) ◽  
pp. 781-786 ◽  
Author(s):  
KUI ZHOU ◽  
XIANYING WU ◽  
XU ZHANG ◽  
LIZHAO QIN ◽  
BIN LIAO

Nanocomposite nc - ZrCN / a - C : H(N) films were prepared by filtered cathodic vacuum arc technique using the C 2 H 2 and N 2 gas as the precursor. The effect of the C 2 H 2 and N 2 flow rate on the microstructure, internal stress, phase composition, and mechanical properties of nanocomposite nc - ZrCN / a - C : H(N) films has been investigated by glancing incidence X-ray diffraction (GIXRD), surface profiler, and X-ray photoelectron spectroscopy(XPS). It was revealed that the C 2 H 2 and N 2 flow rate affected the structure, Zr content, and internal stress of the films significantly. Furthermore, XRD pattern indicated the presence of the ZrCN crystalline grains in the range of 3–10 nm, and the deconvolution results for XPS spectra showed that the film mainly was constituted by Zr – C , C = C (sp2) and C – C (sp3) bonds.


2016 ◽  
Vol 852 ◽  
pp. 1132-1139
Author(s):  
Han Zhou ◽  
Qing Yan Hou ◽  
Tian Qing Xiao ◽  
Bin Liao ◽  
Xian Ying Wu ◽  
...  

Nickel/carbon nanocomposite films with different C2H2 flow rate were deposited by filtered cathodic vacuum arc (FCVA) device. The composition and nanostructure of the films were investigated by X-ray diffraction (XRD), Raman scattering spectroscopy, X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM). The grain size increase from 8.7 nm at the C2H2 flow rate of 10 sccm to the maximum of 11.5 nm at 30 sccm, after that it decrease. The mean phase separation is in the range of 0.2-2.6 nm. The hardness of 21.6 Gpa was obtained at 50sccm.


2009 ◽  
Vol 16 (02) ◽  
pp. 265-270 ◽  
Author(s):  
LIKUN PAN ◽  
HAIBO LI ◽  
ZHUO SUN ◽  
CHANGQING SUN

Cu , Al , and Ti films of ~ 10 nm thickness were deposited on porous silicon (PS) at room temperature using Filtered Cathodic Vacuum Arc system and annealed at 800°C for 10 min in vacuum. The PS layers were obtained by anodization of Si wafer. X-ray photoelectron spectroscopy, photoluminescence (PL), photo-absorption (PA), and X-ray diffraction studies revealed that before annealing just Cu -deposited sample exhibited PL blueshift, PA redshift, and Si -2p level shift due to the Cu diffusion at the surface of PS. While after annealing, Cu - and Ti -deposited samples exhibited obvious PA redshift and Si -2p level shift, which arise from the crystal field variation due to the formation of Cu / Ti silicides at the surface as well as the conduction electronic transportation.


2000 ◽  
Vol 614 ◽  
Author(s):  
Hao Wang ◽  
S.P. Wong ◽  
W.Y. Cheung ◽  
N. Ke ◽  
M.F. Chiah ◽  
...  

ABSTRACTNanocomposite Co-C thin films of about 15 nm thick were prepared by pulsed filtered vacuum arc deposition. The films were characterized by x-ray photoelectron spectroscopy, non-Rutherford backscattering spectrometry, x-ray diffraction, magnetic force microscopy and magnetic measurements. The as-deposited films were amorphous. After annealing at 350°C for one hour in vacuum (< 10−3 Pa), the films were found to consist of nanocrystalline Co grains encapsulated in carbon. The superparamagnetism of the annealed Co36C64 film was demonstrated by the measurement of DC susceptibility and magnetic hysteresis using a SQUID magnetometer. The superparamagnetic relaxation blocking temperature was marked to be about 12K by the peak of the zero-field-cooled magnetization under a field of 100 Oe. The magnetic properties of these annealed granular Co-C films transform from superparamagnetism to ferromagnetism when the Co concentration increases.


2009 ◽  
Vol 75 ◽  
pp. 7-12
Author(s):  
P.W. Shum ◽  
Zhi Feng Zhou ◽  
K.Y. Li

Carbon ion implantation has often been considered as an additional method to further improve the wear, corrosion and oxidation resistance of hard coatings on tools or machine parts. The present research investigates the effect of carbon implantation on the structural and mechanical properties of the sputter-deposited solid solution Ti-Al-N coatings. The carbon implantation was carried out by using metal vapour vacuum arc ion source (MEVVA) with solid cathode at energies of 5 and 50 keV, and a dose of 6×1017 atoms cm-2. The mechanical and the microstructure properties of the implanted layer were identified by a variety of analytic techniques, such as nano-indentation, x-ray photoelectron spectroscopy (XPS) and x-ray diffraction (XRD) etc. Additionally, the wear performance of the samples was evaluated by a typical ball-on-disk tribometer in dry conditions. The results showed that the coatings with high energy carbon implantation exhibited an enhanced hardness. The improved hardness could be attributed to the formation of TiC phase, as indicated in XPS. In the sliding tests, the coatings with the post-treatment of carbon implantation showed an improved tribological property in terms of friction coefficient and wear rate. The friction coefficient could be reduced from 0.6 to 0.1. The coatings had ten-fold better wear resistance than the coating without ion implantation.


Author(s):  
Kyriaki Polychronopoulou ◽  
Claus Rebholz ◽  
Nicholaos G. Demas ◽  
Andreas A. Polycarpou ◽  
Lefki Theodorou ◽  
...  

This study describes the correlation between the microstructure, mechanical and tribological properties of Ti1−xCx coatings (with x being in the range of 0–0.5), deposited by reactive magnetron sputtering from a Ti target in Ar/C2H2 mixtures at ∼200 °C. The mechanical and tribological properties were found to strongly depend on the chemical composition and the microstructure present. Very dense structures and highest hardness and elastic modulus, combined with low wear rates, were observed for films with chemical composition close to TiC. X-ray diffraction (XRD) studies showed that the coating deposited at high C2H2 flow rates composed of randomly oriented TiC crystallites. Morphological investigations by scanning electron microscopy (SEM) indicate that the morphology is strongly dependent on the carbon content of the coating. Coatings composition and bonding environment was investigated using X-ray photoelectron spectroscopy (XPS). Both the mechanical properties and tribological performance of the coatings were found to be dependent on carbon content.


2005 ◽  
Vol 885 ◽  
Author(s):  
Jin-Bao Wu ◽  
Yin-Wen Tsai ◽  
Chin-Te Shih ◽  
Mei-Yi Li ◽  
Ming-Sheng Leu ◽  
...  

ABSTRACTFor the purpose of developing the corrosion-resistant and low-cost metallic bipolar plates for direct methanol fuel cell (DMFC), Ti mesh, stainless steel and Si(100) were coated with TiN by using the filtered cathodic vacuum arc system (FCVA). These TiN films have received considerable attention because of its high anti-corrosion behavior and low contact-resistance. In order to improve the corrosion protective ability of TiN films and decrease pinholes of coating, growth modifications such as thickness of the coatings and bias applied to substrates have also been carried out. The microstructures and composition of TiN film were identified by the instrumental analyses such as scanning electron microscopy (SEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). The corrosion behavior of TiN coatings was studied in 0.5 M H2SO4 solutions by using potentiodynamic polarization method. The DC bias of −150 V was applied to the substrates to achieve a dense structure of approximately 400 nm coating of TiN, so that good corrosion protection of the Ti mesh and stainless steel substrates can be achieved. The TiN coating on stainless steel exhibited excellent corrosion behavior especially in lower corrosion current than 2×10−7 A/cm2.


2012 ◽  
Vol 557-559 ◽  
pp. 1893-1896
Author(s):  
You Long Zhou ◽  
Zhou Chen ◽  
Sheng Xing Ji ◽  
Huang Nan ◽  
Nan Huang

Abstract:(Ti, Al)N films were deposited on high-speed steel (HSS) by filtered cathodic vacuum arc (FCVA) technique under a nitrogen atmosphere. X-ray diffraction was used to characterize the structure of the films .The micro-hardness was tested. The result shows that the crystal structure and mechanical properties of (Ti,Al)N films are strongly dependent on the nitrogen partial pressure. The structure of (Ti,Al)N films is composed of Ti2N phase, TiN phase and TixAly phase. The hardness increases to a maximum at the nitrogen partial pressure of 8•0×10-2Pa, then decreases with increasing nitrogen partial pressure.


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