Real Time In-Situ Probing of Atomic Layer Deposition Processes using
Infrared and Near Infrared Spectroscopy
Keyword(s):
2011 ◽
Vol 51
(10)
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pp. 2024-2034
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2019 ◽
Vol 37
(2)
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pp. 020927
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Keyword(s):
2014 ◽
Vol 118
(11)
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pp. 5862-5871
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1996 ◽
Vol 7
(1)
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pp. 1-16
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Keyword(s):
2018 ◽
Vol 20
(39)
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pp. 25343-25356
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Keyword(s):
2018 ◽
Vol 36
(3)
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pp. 031513
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