In order to identify candidate high entropy alloys (HEAs) that have the hexagonal closed packed crystal structure, gradient thin films in the OsRuWMoRe system were deposited by sputtering from multiple elemental targets onto Si substrates. In addition to having compositional gradients, the films exhibited regions with different phases, some of which were single-phase and non-equiatomic. Such alloys have the potential to exhibit properties superior to the primarily equiatomic HEAs that have been the focus of most work in this area. To screen the phases that exist across the thin film gradient samples, a range of characterization techniques were employed, including focused ion beam and scanning electron microscopy, X-ray energy dispersive spectroscopy, X-ray diffraction and electron backscattered diffraction analysis. The combinatorial method described in this study enabled the identification of a candidate single-phase HEA that was subsequently fabricated as a bulk alloy.
