scholarly journals Optical Emission Spectroscopic Analysis of Plasma Plume during Pulsed Laser Deposition of PZT

2014 ◽  
Vol 2014 ◽  
pp. 1-9 ◽  
Author(s):  
S. Sasanka Kumar ◽  
R. Reshmi ◽  
N. V. Joshy ◽  
A. C. Saritha ◽  
M. K. Jayaraj

Spatial variation in intensity of spectral emission, electron temperature, number density, and the time of flight (TOF) of ions and neutrals at various oxygen ambiances has been investigated on ferroelectric lead zirconium titanate (PZT) plasma using optical emission spectroscopy. Plasma produced by ablating PZT ceramic target using Nd-YAG laser operating at the third harmonics (λ=355 nm, τ=10 ns, repetition frequency 10 Hz) was investigated at various oxygen partial pressures and at various distances from the target surface. Here energy density for laser fluence was fixed as 3.13 Jcm−2 and distance from the target and ambient gas pressure were varied. The electron number density Ne and electron temperature of the PZT plasma at the early stage of plume expansion were measured as 1.7×1017 Jcm−2 and 13200 K, respectively, and thus verified the existence of local thermodynamic equilibrium (LTE). Time of flight spectra (TOF) of neutral and singly ionized species in plasma were recorded. The result shows that plasma parameters and velocity of species are of same order for various oxygen partial pressures but have a decreasing tendency with distance. The energy of almost all species in the plume become more or less same at 0.1 mbar. These conditions favour the growth of perovskite PZT thin films.

2020 ◽  
pp. 110-113

In this research the diagnostic of optical emission spectroscopy from exploding copper wires have done for different current. By using Boltzman plot can be calculated the plasma electron temperature , and by using Stark broadening can be evaluated the electron density for different current of (75, 100 and 150)A with diameter 0.25 mm in deionized water. It was observed that the electron density decrease with an increasing the current from 75 A to 150 A while the electron temperatures increase for the same current. The plasma has a peak 652 nm corresponding to Hα line for .hydrogen .atoms which obtained from .optical emission spectrum (OES), the peaks belong to atomic copper lines. The plasma electron temperature related with emission line intensity and number .density with the formed copper nanoparticles size was studied.


Coatings ◽  
2021 ◽  
Vol 11 (10) ◽  
pp. 1221
Author(s):  
Jun-Hyoung Park ◽  
Ji-Ho Cho ◽  
Jung-Sik Yoon ◽  
Jung-Ho Song

We present a non-invasive approach for monitoring plasma parameters such as the electron temperature and density inside a radio-frequency (RF) plasma nitridation device using optical emission spectroscopy (OES) in conjunction with multivariate data analysis. Instead of relying on a theoretical model of the plasma emission to extract plasma parameters from the OES, an empirical correlation was established on the basis of simultaneous OES and other diagnostics. Additionally, we developed a machine learning (ML)-based virtual metrology model for real-time Te and ne monitoring in plasma nitridation processes using an in situ OES sensor. The results showed that the prediction accuracy of electron density was 97% and that of electron temperature was 90%. This method is especially useful in plasma processing because it provides in-situ and real-time analysis without disturbing the plasma or interfering with the process.


2021 ◽  
Vol 2114 (1) ◽  
pp. 012049
Author(s):  
Uday H. Tawfeeq ◽  
Ahmed K. Abbas ◽  
Kadhim A. Aadim

Abstract In this work, optical emission spectroscopy (OES) was used to estimate the parameters of plasma electron temperature (Te), electron density (ne), plasma frequency (fp), Debye length (λD), and Debye number (ND). Understanding how an energy pulsed laser affects these variables is also important. Irradiation of pure cadmium using an Nd: YAG laser pulse with a wavelength(1064)nm and energy ranging from (200-600)millijoules, of frequency (6) Hz. The spectrum of laser-induced plasma was detected under atmospheric pressure. It was discovered that when the energy of the laser pulse rises, the intensity of the CdI and CdII lines increases.


Nukleonika ◽  
2016 ◽  
Vol 61 (2) ◽  
pp. 149-153
Author(s):  
Maryna S. Ladygina ◽  
Elzbieta Skladnik-Sadowska ◽  
Dobromil R. Zaloga ◽  
Marek J. Sadowski ◽  
Monika Kubkowska ◽  
...  

Abstract This paper presents results of experimental studies of tungsten samples of 99.95% purity, which were irradiated by intense plasma-ion streams. The behaviour of tungsten, and particularly its structural change induced by high plasma loads, is of great importance for fusion technology. The reported measurements were performed within a modified PF-1000U plasma-focus facility operated at the IFPiLM in Warsaw, Poland. The working gas was pure deuterium. In order to determine the main plasma parameters and to study the behaviour of impurities at different instants of the plasma discharge, the optical emission spectroscopy was used. The dependence of plasma parameters on the initial charging voltage (16, 19 and 21 kV) was studied. Detailed optical measurements were performed during interactions of a plasma stream with the tungsten samples placed at the z-axis of the facility, at a distance of 6 cm from the electrode outlets. The recorded spectra showed distinct WI and WII spectral lines. Investigation of a target surface morphology, after its irradiation by intense plasma streams, was performed by means of an optical microscope. The observations revealed that some amounts of the electrodes material (mainly copper) were deposited upon the irradiated sample surface. In all the cases, melted zones were observed upon the irradiated target surface, and in experiments performed at the highest charging voltage there were formed some cracks.


2017 ◽  
Vol 35 (1) ◽  
pp. 159-169 ◽  
Author(s):  
H. Iftikhar ◽  
S. Bashir ◽  
A. Dawood ◽  
M. Akram ◽  
A. Hayat ◽  
...  

AbstractThe effect of the transverse magnetic field on laser-induced breakdown spectroscopy and surface modifications of germanium (Ge) has been investigated at various fluences. Ge targets were exposed to Nd: YAG laser pulses (1064 nm, 10 ns, 1 Hz) at different fluences ranging from 3 to 25.6 J/cm2 to generate Ge plasma under argon environment at a pressure of 50 Torr. The magnetic field of strength 0.45 Tesla perpendicular to the direction of plasma expansion was employed by using two permanent magnets. The emission spectra of laser-induced Ge plasma was detected by the laser-induced breakdown spectroscopy system. The electron temperature and number density of Ge plasma are evaluated by using the Boltzmann plot and stark broadening methods, respectively. The variations in emission intensity, electron temperature (Te), and number density (ne) of Germanium plasma are explored at various fluences, with and without employment of the magnetic field. It is observed that the magnetic field is responsible for significant enhancement of both excitation temperature and number density at all fluences. It is revealed that an excitation temperature increases from Te,max,without B = 16,190 to Te,max,with B = 20,123 K. Similarly, the two times enhancement in the electron density is observed from ne,max,without B = 2 × 1018 to ne,max,with B = 4 × 1018 cm−3. The overall enhancement in Ge plasma parameters in the presence of the magnetic field is attributed to the Joule heating effect and adiabatic compression. With increasing fluence both plasma parameters increase and achieve their maxima at a fluence of 12.8 J/cm2 and then decrease. In order to correlate the plasma parameters with surface modification, scanning electron microscope analysis of irradiated Ge was performed. Droplets and cones are formed for both cases. However, the growth of ridges and distinctness of features is more pronounced in case of the absence of the magnetic field; whereas surface structures become more diffusive in the presence of the magnetic field.


2021 ◽  
pp. 4694-4701
Author(s):  
Qusay Adnan Abbas

      The present work investigated the effect of distance from target surface on the parameters of lead plasma excited by 1064nm Q-switched Nd:YAG laser. The excitation was conducted in air, at atmospheric pressure, with pulse length of 5 ns, and at different pulse laser energies. Electron temperature was calculated by Boltzmann plot method based on the PbI emission spectral lines (369.03 nm, 416.98 nm, 523.48, and 561.94 nm). The PbI lines were recorded at different distances from the target surface at laser pulse energies of 260 and 280 mJ. The emission intensity of plasma increased with increasing the lens-to-target distance. The results also detected an increase in electron temperature with increasing the distance between the focal lens and the surface of the target in all laser energies under study. In addition, the electron number density was determined by using the Stark broadening method. The data illustrated that the electron number density was increased with increasing the distance from target surface, reaching the maximum at a distance of 11 cm for all pulse laser energy levels under study.


2020 ◽  
Vol 10 (22) ◽  
pp. 8117
Author(s):  
Chi Chen ◽  
Wenjie Fu ◽  
Chaoyang Zhang ◽  
Dun Lu ◽  
Meng Han ◽  
...  

The Langmuir probe is a feasible method to measure plasma parameters. However, as the reaction progresses in the discharged plasma, the contamination would be attached to the probe surface and lead to a higher incorrect electron temperature. Then, the electron density cannot be obtained. This paper reports a simple approach to combining the Langmuir probe and the optical emission spectrometry (OES), which can be used to obtain the electron temperature to solve this problem. Even the Langmuir probe is contaminative, the probe current–voltage (I–V) curve with the OES spectra also gives the approximate electron temperature and density. A homemade coaxial line microwave plasma source driven by a 2.45 GHz magnetron was adopted to verify this mothed, and the electron temperature and density in different pressure (40–80 Pa) and microwave power (400–800 W) were measured to verify that it is feasible.


2013 ◽  
Vol 770 ◽  
pp. 245-248 ◽  
Author(s):  
Kanchaya Honglertkongsakul

Argon plasma jet in a single-electrode configuration was generated at low temperature and atmospheric pressure by 50 kHz radiofrequency power supply. Optical Emission Spectroscopy (OES) was used to investigate the local emissivity of argon plasma in the range between 200 and 1,100 nm. The spatial distribution of reactive species was measured at different distances of the plasma expansion from the nozzle exit such as 0.0, 0.5, 1.0, 1.5, 2.0, 2.5 and 3.0 cm. These measurements were obtained to analyze the plasma parameters such as electron temperature and electron density. The effect of distances of the plasma expansion from the nozzle exit on the plasma parameters was studied. The main intensive argon lines were found in the region between 690 and 970 nm. The electron temperature was found in the range of 0.5-1.1 eV. The electron density was found in the range of 4.0x1012-1.2x1013 cm-3. The plasma parameters strongly depended on the distances of the plasma expansion from the nozzle exit.


2020 ◽  
pp. 1665-1671
Author(s):  
Madyan A. Khalaf ◽  
Baida M. Ahmed ◽  
Kadhim A. Aadim

In this work, the optical emission spectrum technique was used to analyze the spectrum resulting from the CdO:Sn plasma produced by laser Nd:YAG with a wavelength of (1064) nm, duration of (9) ns, and a focal length of (10) cm in the range of energy of 500-800 mJ. The electron temperature (Te) was calculated using the in ratio line intensities method, while the electron density (ne) was calculated using Saha-Boltzmann equation. Also, other plasma parameters were calculated, such as plasma (fp), Debye length (λD) and Debye number (ND). At mixing ratios of X=0.1, 0.3 and 0.5, the CdO1-X :SnX plasma spectrum was recorded for different energies. The changes in electron temperature and the densities were studied as a function of the laser energies. Outcome measure value of the electron temperature at the ratio of  X = 0.1 was (1.079-1.054) eV, while at  X=0.3 the Te range was (0.952- 0.921) eV and at X=0.5 it was (0.928-0.906) eV.


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