Fabrication of micro-mechanical planar cantilever beam-mass structures on quartz substrates using an ECDM process

2021 ◽  
pp. 095440542110406
Author(s):  
Saranya Sambathkumar ◽  
Ravi Sankar Arunagirinathan
Keyword(s):  
Cantilever Beam ◽  
Removal Rate ◽  
Free Standing ◽  
Feedback Mechanisms ◽  
Energy Harvesters ◽  
Glass Substrates ◽  
Additional Equipment ◽  
Micro Channels ◽  
Micro Holes ◽  
Quartz Substrates

Electrochemical discharge machining (ECDM) processes have been used to realize miniature structures such as micro-channels and micro-holes on non-conductive materials such as quartz and Pyrex for a variety of applications. However, for realizing mechanical/physical sensors, actuators, energy harvesters, and resonators on glass substrates, free-standing devices with movable components such as beam-mass structures and cantilevers are required. There has been a negligible focus on developing miniature glass-based devices with movable components primarily due to the non-linear material removal rate (MRR) of the ECDM processes, requiring continuous measurement, tracking, and maintaining the working gap in the range of a few micrometers during micromachining. A couple of techniques were proposed to address maintaining a constant working gap, however, using costly equipment with complex feedback mechanisms. We report a two-stage experimental approach – without using feedback mechanisms and additional equipment – to realize micro-mechanical planar cantilever beam-mass structures on thick quartz substrates in the present work. In the first stage, the process parameters such as applied voltage, tool travel rate (TTR), and initial working gap ( Wg) are optimized for fabricating broader and deeper micro-channels using needle-shaped tools. In the second stage, using the optimized parameters, an array of micro-channels is fabricated. The cumulative depth, corresponding depth, and the width of each layer of the channels are measured, and this data is utilized for fabricating planar beam-mass structures on quartz substrates. We envisage that the experimental results of the present study would be beneficial for ECDM researchers to fabricate glass-based miniature devices with movable components without using complex tools and equipment.

Dynamic Response of Spiral Cantilever Undergoing Magnetic Coupling

2014 ◽  
Vol 14 (08) ◽  
pp. 1440021
Author(s):  
Xiaoling Bai ◽  
Yumei Wen ◽  
Ping Li ◽  
Jin Yang ◽  
Xiao Peng ◽  
...  
Keyword(s):  
Dynamic Response ◽  
Cantilever Beam ◽  
Magnetic Force ◽  
Coupling Effect ◽  
Magnetic Coupling ◽  
Resonant Frequencies ◽  
Energy Harvesters ◽  
Magnetic Transducer ◽  
Underlying Mechanisms ◽  
Tip Mass

Cantilever beams have found intensive and extensive uses as underlying mechanisms for energy transduction in sensors as well as in energy harvesters. In magnetoelectric (ME) transduction, the underlying cantilever beam usually will undergo magnetic coupling effect. As the beam itself is either banded with magnetic transducer or magnets, the dynamic motion of the cantilever can be modified due to the magnetic force between the magnets and ME sensors. In this study, the dynamic response of a typical spiral cantilever beam with magnetic coupling is investigated. The spiral cantilever acts as the resonator of an energy harvester with a tip mass in the form of magnets, and a ME transducer is positioned in the air gap and interacts with the magnets. It is expected that this spiral configuration is capable of performing multiple vibration modes over a small frequency range and the response frequencies can be magnetically tunable. The experimental results show that the magnetic coupling between the magnets and the transducer plays a favorable role in achieving tunable resonant frequencies and reducing the frequency spacings. This will benefits the expansion of the response band of a device and is especially useful in energy harvesting.

Pulsed laser deposition of oriented V2O5 thin films

2000 ◽  
Vol 15 (10) ◽  
pp. 2249-2265 ◽  
Author(s):  
Jeanne M. McGraw ◽  
John D. Perkins ◽  
Falah Hasoon ◽  
Philip A. Parilla ◽  
Chollada Warmsingh ◽  
...  
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Oxygen Pressure ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Glass Substrates ◽  
Wide Range ◽  
Phase Pure ◽  
Amorphous Quartz ◽  
Quartz Substrates

We have found that by varying only the substrate temperature and oxygen pressure five different crystallographic orientations of V2O5 thin films can be grown, ranging from amorphous to highly textured crystalline. Dense, phase-pure V2O5 thin films were grown on SnO2/glass substrates and amorphous quartz substrates by pulsed laser deposition over a wide range of temperatures and oxygen pressures. The films' microstructure, crystallinity, and texturing were characterized by electron microscopy, x-ray diffraction, and Raman spectroscopy. Temperature and oxygen pressure appeared to play more significant roles in the resulting crystallographic texture than did the choice of substrate. A growth map summarizes the results and delineates the temperature and O2 pressure window for growing dense, uniform, phase-pure V2O5 films.

scholarly journals Performance Evaluation and Comparison between Direct and Chemical-Assisted Picosecond Laser Micro-Trepanning of Single Crystalline Silicon

Materials ◽  
2018 ◽  
Vol 12 (1) ◽  
pp. 41 ◽  
Author(s):  
Hao Zhu ◽  
Zhaoyang Zhang ◽  
Kun Xu ◽  
Jinlei Xu ◽  
Shuaijie Zhu ◽  
...  
Keyword(s):  
Material Removal ◽  
Crystalline Silicon ◽  
Removal Rate ◽  
Picosecond Laser ◽  
Orthogonal Experimental Design ◽  
Single Crystalline Silicon ◽  
Machining Performance ◽  
Single Crystalline ◽  
Direct Laser ◽  
Micro Holes

The fabrication of micro-holes in silicon substrates that have a proper taper, higher depth-to-diameter ratio, and better surface quality has been attracting intense interest for a long time due to its importance in the semiconductor and MEMS (Micro-Electro-Mechanical System) industry. In this paper, an experimental investigation of the machining performance of the direct and chemical-assisted picosecond laser trepanning of single crystalline silicon is conducted, with a view to assess the two machining methods. The relevant parameters affecting the trepanning process are considered, employing the orthogonal experimental design scheme. It is found that the direct laser trepanning results are associated with evident thermal defects, while the chemical-assisted method is capable of machining micro-holes with negligible thermal damage. Range analysis is then carried out, and the effects of the processing parameters on the hole characteristics are amply discussed to obtain the recommended parameters. Finally, the material removal mechanisms that are involved in the two machining methods are adequately analyzed. For the chemical-assisted trepanning case, the enhanced material removal rate may be attributed to the serious mechanical effects caused by the liquid-confined plasma and cavitation bubbles, and the chemical etching effect provided by NaOH solution.

EXPERIMENTAL INVESTIGATION OF MICRO-EDM OPERATION IN INCONEL 718

2021 ◽  
pp. 2150102
Author(s):  
MAYANK CHOUBEY ◽  
K. P. MAITY
Keyword(s):  
Experimental Investigation ◽  
Inconel 718 ◽  
Electrical Discharge Machining ◽  
Removal Rate ◽  
Micro Edm ◽  
Machining Processes ◽  
Machining Time ◽  
Machine Material ◽  
Micro Holes ◽  
Unconventional Machining

The increasing trends towards miniaturized and lightweight components for various engineering and aerospace applications by unconventional machining the demand for micro-electrical discharge machining (EDM) have become increasingly wide. Micro-EDM is one of the most promising unconventional machining processes as compared to other unconventional machining due to its lower cost, ease of operation, and accuracy. This research explores the experimental investigation of micro-EDM operation on hard and difficult to machine material Inconel 718. The micro-holes were fabricated on an Inconel 718 workpiece with a copper electrode. The influence of input process parameters on material removal rate (MRR), machining time, and quality of the fabricated micro-holes were studied. Overcut and taperness of the fabricated micro-sized through holes were measured to address the accuracy of the fabricated micro-holes in micro-EDM operation. Experimental results reveal that the increase in current and voltage increases the MRR, and reduced machining time but at the cost of dimensional accuracy of the fabricated holes. The high value of current and voltage resulted in poor surface quality. The optimum machining condition that gives higher MRR with higher machining precision was obtained by experimenting while machining Inconel 718.

Embedded Metamaterial Subframe Patch for Increased Power Output of Piezoelectric Energy Harvesters

2021 ◽  
pp. 1-9
Author(s):  
Saman Farhangdoust ◽  
Gary Georgeson ◽  
Jeong-Beom Ihn ◽  
Armin Mehrabi
Keyword(s):  
Energy Harvesting ◽  
Cantilever Beam ◽  
Renewable Energy Sources ◽  
Piezoelectric Element ◽  
Energy Harvesters ◽  
Piezoelectric Energy ◽  
Harvesting Systems ◽  
Host Structure ◽  
Self Powered ◽  
Low Efficiency

Abstract These days, piezoelectric energy harvesting (PEH) is introduced as one of the clean and renewable energy sources for powering the self-powered sensors utilized for wireless condition monitoring of structures. However, low efficiency is the biggest drawback of the PEHs. This paper introduces an innovative embedded metamaterial subframe (MetaSub) patch as a practical solution to address the low throughput limitation of conventional PEHs whose host structure has already been constructed or installed. To evaluate the performance of the embedded MetaSub patch (EMSP), a cantilever beam is considered as the host structure in this study. The EMSP transfers the auxetic behavior to the piezoelectric element (PZT) wherever substituting a regular beam with an auxetic beam is either impracticable or suboptimal. The concept of the EMSP is numerically validated, and the COMSOL Multiphysics software was employed to investigate its performance when a cantilever beam is subjected to different amplitude and frequency. The FEM results demonstrate that the harvesting power in cases that use the EMSP can be amplified up to 5.5 times compared to a piezoelectric cantilever energy harvester without patch. This paper opens up a great potential of using EMSP for different types of energy harvesting systems in biomedical, acoustics, civil, electrical, aerospace, and mechanical engineering applications.

An Experimental Study of the Abrasive Water Jet Micro-Machining Process for Quartz Crystals

2012 ◽  
Vol 565 ◽  
pp. 339-344 ◽  
Author(s):  
H. Qi ◽  
J.M. Fan ◽  
Jun Wang
Keyword(s):  
Experimental Study ◽  
Removal Rate ◽  
Water Jet ◽  
Machining Process ◽  
Bottom Surface ◽  
Micro Machining ◽  
Abrasive Water Jet ◽  
Process Variables ◽  
Jet Impact ◽  
Micro Channels

An experimental study of the machining process for micro-channels on a brittle quartz crystal material by an abrasive slurry jet (ASJ) is presented. A statistical experiment design considering the major process variables is conducted, and the machined surface morphology and channelling performance are analysed to understand the micro-machining process. It is found that a good channel top edge appearance and bottom surface quality without wavy patterns can be achieved by employing relatively small particles at shallow jet impact angles. The major channel performance measures, i.e. material removal rate (MRR) and channel depth, are then discussed with respect to the process parameters. It shows that with a proper control of the process variables, the abrasive water jet (AWJ) technology can be used for the micro-machining of brittle materials with high quality and productivity.

Microfluidic Device for Synthesis of Lipid Bi-Layers

2008 ◽  
Author(s):  
B. M. R. U. Banneyake ◽  
Debjyoti Banerjee
Keyword(s):  
Organic Solvent ◽  
Microfluidic Device ◽  
Single Channel ◽  
Hydrophobic Surface ◽  
Mirror Image ◽  
Buffer Solution ◽  
Pump System ◽  
Glass Substrates ◽  
Micro Channels ◽  
Cell Components

Lipid bi-layers are ubiquitous components of biological cells — and are found in variety of cell components ranging from cell membranes to membranes of organelles inside the cells. In biological membranes, lipid bi-layer membranes carry membrane proteins, which serve as single channel nanopores that are used to study transport of proteins and characterize the properties of proteins. However, lipid bi-layers have very short half lives, which are usually less than an hour. The lipid bi-layers are usually obtained by physico-chemical interactions between a lipid containing organic solvent, an aqueous buffer solution and a hydrophobic surface. We have developed a continuous flow through microfluidic device using pressure driven flow (by means of a tandem syringe pump system) for synthesis of lipid bi-layers. The microfluidic device consists of two glass substrates with micro-channels and microchambers microfabricated using photolithography and wet glass etching. The microchannels in each substrate is in the form of “+” shape and form a mirror image of each other. A Teflon sheet (∼200 microns thickness) is sandwiched between the glass substrates with a ∼200 microns diameter hole etched in the center to communicate with the two sets of microchannels. A lipid solution in an organic solvent (Pentane) and KCl buffer solution are alternately flown through the legs of the microchannel. The conductivity of the buffer is monitored using a current amplifier. The formation of the lipid bi-layer is confirmed by monitoring the resistivity and the impedance to high frequency electrical oscillations. The flow rate in the microfluidic device is optimized to obtain the lipid bi-layer.

scholarly journals Non-linear piezoelectric fluidic energy harvesters: The mutual interaction of two oscillating cylinders

2020 ◽  
Vol 31 (20) ◽  
pp. 2378-2389
Author(s):  
Vahid Azadeh-Ranjbar ◽  
Yi Han ◽  
Niell Elvin ◽  
Yiannis Andreopoulos
Keyword(s):  
Cantilever Beam ◽  
Degrees Of Freedom ◽  
Bluff Body ◽  
Mutual Interaction ◽  
Bluff Bodies ◽  
Velocity Range ◽  
Freestream Velocity ◽  
Energy Harvesters ◽  
Piezoelectric Layers ◽  
Non Linear

The presence of a bluff body upstream of a cantilever beam promotes persistent, aero-elastic vibrations of the beam. Vortex-induced vibration in an array of two mutually interacting bluff bodies in such configurations undergoing two-degrees of freedom transverse oscillation has not been investigated before. In the present work, we have studied experimentally, the unsteady response of an array of two similar rigid cylinders, positioned side-by-side in reference to the freestream velocity, each one mounted on the upstream end of an elastic cantilever beam. By fitting the beams with piezoelectric layers, these configurations are converted to piezoelectric fluid energy harvesters (PFEH) that can extract small amounts of energy from the flow. Comparing the performance of linear (L-PFEH), non-linear (NL-PFEH), and a non-linear array (NLA-PFEH) of harvesters show that NLA-PFEH has the widest broadband operating velocity range and the greatest generated power followed by NL-PFEH and then L-PFEH. The maximum electric power output of NLA-PFEH was ~1000% greater than for NL-PFEH with a corresponding ~250% increase in the operating velocity range. Different cylinder configurations reveal the presence of hysteresis in the behavior of NLA-PFEH when the distance between the cylinders (so-called cylinder gap to diameter ratio), G/ D < 0.5. At large distances from each other ( G/ D ≥ 4), the two cylinders behave like independent, isolated harvester units with rather weak mutual interaction.

Investigating the Effect of Machining Parameters on Microdrilling of Titanium Grade 19 Alloy

2013 ◽  
Author(s):  
Shivraj Yeole ◽  
Nagabhushana Ramesh Nunna ◽  
Balu Naik Banoth
Keyword(s):  
Process Parameters ◽  
Material Removal ◽  
Removal Rate ◽  
Electrode Wear ◽  
Machining Parameters ◽  
Micro Edm ◽  
Electrode Diameter ◽  
Micro Holes ◽  
Titanium Grade ◽  
Edm Process

Electrical Discharge Micro Drilling (EDMD) is considered as one of the most effective method for machining difficult to cut and hard materials like titanium alloy. However, selection of process parameters for achieving superior surface finish, higher machining rate and accuracy is a challenging task in drilling micro-holes. In this paper, an attempt is made to optimize micro-EDM process parameters for drilling micro holes on titanium grade 19 alloy. In order to verify the optimal micro-EDM process parameters settings, material removal rate (MRR), electrode wear rate (EWR) and over cut (OC) were chosen as the responses to be observed. Pulse on time, pulse off time, electrode diameter and current were selected as the governing process parameters for evaluation by Taguchi method. Nine micro holes of 300 μm, 400 μm and 500 μm were drilled using L9 orthogonal array (OA) design. Optimal combination of machining parameters were obtained through Signal-to-Noise (S/N) ratio analysis. It is seen that machining performances like material removal rate and overcut are affected by the peak current whereas electrode wear is affected by peak current and electrode diameter. Morphology of the micro holes has been studied through SEM micrographs of machined micro-hole.

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