Modeling optical microscope images of integrated-circuit structures

1991 ◽  
Vol 8 (5) ◽  
pp. 778 ◽  
Author(s):  
Chi-Min Yuan ◽  
Andrzej J. Strojwas
2015 ◽  
Vol 2015 ◽  
pp. 1-11
Author(s):  
Ahmet Ozan Gezerman ◽  
Burcu Didem Çorbacıoğlu

The use of three different materials, 2-mercaptobenzimidazole, 2-mercaptobenzothiazole, and thioglycolic acid, was investigated to improve the performance of electroless nickel-plating baths. By changing the concentrations of these materials, sample plates were coated. Optical microscope images were obtained by selecting representative coated plates. From the results of the investigations, the effects of these materials on electroless nickel plating were observed, and the most appropriate amounts of these materials for nickel plating were determined. Moreover, the nickel plating speed observed with the bath solution containing 2-mercaptobenzimidazole, 2-mercaptobenzothiazole, and thioglycolic acid is higher than that in the case of traditional electroless plating baths, but the nickel consumption amount in the former case is lower. In order to minimize the waste water generated from electroless nickel-plating baths, we determined the lowest amounts of the chemicals that can be used for the concentrations reported in the literature.


Reflection scanning acoustic microscopy (SAM) at 1 GHz has been used to examine artificially induced cracks in alumina samples. The results are compared with the corresponding optical micrographs and scanning electron microscope images. For a sample with a 0.08 μm centre-line average (CLA) surface finish, the SAM working with a 400 μm frame size, showed that a crack that appeared to be about 150 μm in length in the corresponding optical image was, in fact, at least 200 μm in length. For a sample with a good engineering finish of 0.15 μm CLA, the SAM was able to reveal crack detail to a degree comparable with that revealed by an optical microscope working under optimum conditions. On a sample with a highly polished surface it was possible to distinguish between cracks and grain boundaries by using the V (z) response of the SAM, in agreement with theory.


2007 ◽  
Vol 1057 ◽  
Author(s):  
Nobuyuki Iwata ◽  
Yasunori Iio ◽  
Shigo Ando ◽  
Ryo Nokariya ◽  
Hiroshi Yamamoto

ABSTRACTThe free electron laser (FEL) of 450 or 500 nm was irradiated onto the pressed C60 powder in vacuum. The grains with μm-order were observed showing the colors of blue, purple, yellow, and white in optical microscope images. The Ag(2) derived mode around 1460 cm−1 in Raman spectra was observed from the grain, indicating the polymerization. The 100 μm-length grain was obtained just after dissolving the FEL irradiated specimens into the toluene and evaporating it. In order to expand the scale of C60 polymer grains and to obtain an amorphous C60 polymer, the FEL irradiation was carried out in solution to reduce the directivity for polymerization. Although polymerization was not promoted in C60 precipitation in supersaturated solution due to low density of C60, the precipitation grown with the liquid-liquid interfacial precipitation (LLIP) method showed the 1454 cm−1 Ag(2) derived mode in addition to the peaks around 1460 cm−1 in toluene. In m-xylene with LLIP method, in a whole area of C60 pillar-grains, polymerization was confirmed by the Raman analysis.


1999 ◽  
Vol 194 (2-3) ◽  
pp. 369-373 ◽  
Author(s):  
Hosaka ◽  
Shintani ◽  
Kikukawa ◽  
Itoh

Author(s):  
Danilo Golijanin

Emission of visible light from forward and reverse biased silicon p-n junctions due to the radiative electron-hole recombination has been known since the mid-50s. The weak light emission was also seen from a silicon-dioxide dielectric in an integrated gate oxide capacitor formed between a polysilicon gate and an (n or p) well in an integrated circuit. The difference in carrier energies for each of these recombination mechanisms gives rise to a specific photon wavelength (energy) distribution in the visible range. All photoemitting events are characterized by a very low level light intensity due to the low quantum efficiency of about 10−5 - 10−4 photons per one electron-hole recombination.The first practical photoemission microscope was constructed by Khurana and Chiang. They took the advantage of the advances in night vision technology and used it for imaging the faint ("invisible") light coming from various silicon structures. A typical photoemission microscope consists of an x-y-z stage with the device holder, an optical microscope, a lightsensitive camera all set within a light-tight enclosure and a computer system for image acquisition and processing.


Author(s):  
Stephen Bradley Ippolito ◽  
Hirotoshi Terada

Abstract Tailoring the angular spectrum with annular illumination and collection can significantly improve integrated circuit analysis with an optical microscope, when combined with solid immersion. We present the development, testing, and optimization of a simple and compact apparatus to implement annular illumination and collection in a Hamamatsu iPHEMOS system. We demonstrated improved imaging of an IBM 45nm silicon-oninsulator circuit, with annular illumination and collection in confocal scanning optical microscopy and widefield microscopy with an InGaAs camera.


Sign in / Sign up

Export Citation Format

Share Document