Influence of Silicon, Oxygen and Nitrogen Admixtures Upon the Properties of Plasma Deposited Amorphous Diamond-Like Carbon Coatings

2006 ◽  
Vol 9 (2) ◽  
Author(s):  
Vilma Buršíková ◽  
Lenka Zajíčková ◽  
Pavel Dvořák ◽  
Miroslav Valtr ◽  
Jiří Buršík ◽  
...  
Keyword(s):  
Mechanical Stability ◽  
Chemical Vapor ◽  
Optical Emission ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Depth Sensing ◽  
Capacitively Coupled ◽  
Reactive Plasma ◽  
Composition And Structure ◽  
Silicon Oxygen

AbstractAmorphous diamond-like carbon films (DLC) with various silicon, oxygen and nitrogen content were deposited by plasma enhanced chemical vapor deposition (PECVD) technique. The films were prepared from the mixture of methane and hexamethyldisiloxane (HMDSO) in r.f. capacitively coupled discharges (13.56 MHz). The reactive plasma was investigated by optical emission spectroscopy and capacitive coupled planar probe. A combination of RBS, ERDA, FTIR and XPS methods was used to study the films’ chemical composition and structure. The mechanical properties were studied using a depth sensing indentation technique. The films were mainly composed of C-C, C-H and C-Si bonds. The optimum deposition conditions for the preparation of DLC films, with enhanced thermo-mechanical stability, were determined.

Surface studies of diamond-like carbon films grown by plasma-enhanced chemical vapor deposition

2010 ◽  
Vol 42 (12-13) ◽  
pp. 1702-1705 ◽  
Author(s):  
R. Maheswaran ◽  
R. Sivaraman ◽  
O. Mahapatra ◽  
P. C. Rao ◽  
C. Gopalakrishnan ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Surface Studies

Formation of Diamond-Like Carbon Films by Photoemission-Assisted Plasma-Enhanced Chemical Vapor Deposition

2013 ◽  
Vol 52 (11R) ◽  
pp. 110123 ◽  
Author(s):  
Meng Yang ◽  
Susumu Takabayashi ◽  
Shuichi Ogawa ◽  
Hiroyuki Hayashi ◽  
Radek Ješko ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Diamond Like Carbon

Synthesis of diamond-like carbon films on Si substrates by photoemission-assisted plasma-enhanced chemical vapor deposition

2012 ◽  
Vol 523 ◽  
pp. 25-28 ◽  
Author(s):  
Meng Yang ◽  
Shuichi Ogawa ◽  
Susumu Takabayashi ◽  
Taiichi Otsuji ◽  
Yuji Takakuwa
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Si Substrates

The Effect of CNT Content on the Tribological Properties of CNTs Doped Diamond-Like Carbon Films

2015 ◽  
Vol 642 ◽  
pp. 231-235
Author(s):  
Che Hung Wei ◽  
Jui Feng Yang ◽  
Chao I Wang
Keyword(s):  
Friction Coefficient ◽  
Critical Load ◽  
Internal Stress ◽  
Tribological Properties ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Element Analysis ◽  
Multi Walled Carbon Nanotubes ◽  
Walled Carbon Nanotubes

Diamond-like carbon (DLC) films is useful in many applications. To improve the tribological properties in DLC, we spin coat the multi-walled carbon nanotubes (CNTs) with different solution on (100) silicon. DLC was deposited by plasma enhanced chemical vapor deposition (PECVD) with C2H2and H2. The results show that the ID/IGratio is increasing with higher CNTs content while the friction coefficient and critical load are decreasing with larger CNTs contents. The decreasing friction coefficient results from graphitation on the surface due to higher sp2content. The decreasing critical load is attributed to higher internal stress. The effect of friction coefficient and CNT concentration on stress distribution is studied by a nanoscratch finite element analysis. The results indicate that low friction coefficient and high CNT concentration will reduce the stress magnitude in the film. Therefore, the decreasing friction coefficient in CNT doped DLC film with increasing CNT concentration should reduce stress in the film and is good for adhesion. The discrepancy between friction coefficient and critical load is explained in terms of high internal stress during deposition. A surface treatment on CNT before deposition to reduce internal stress is currently under investigation.

A comparative microtribological investigation of diamond-like carbon films for applications in microsystems

2002 ◽  
Vol 750 ◽  
Author(s):  
S. Imad-Uddin Ahmed ◽  
Giuseppe Bregliozzi ◽  
Henry Haefke
Keyword(s):  
Dominant Role ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Vacuum Arc ◽  
Diamond Like Carbon ◽  
Mild Wear ◽  
High Frequency Plasma ◽  
Frequency Plasma ◽  
Applied Forces ◽  
Film Roughness

ABSTRACTThis study reports on the microfrictional properties under reciprocating sliding of different types of commercially available diamond-like carbon (DLC) films, prepared using low and high frequency plasma-assisted chemical vapor deposition (PACVD) and the vacuum arc method. Silicon and sapphire balls were used as counterbodies. Friction-load curves suggest that, for applied forces in the N to μN regime, two properties have a strong influence on the microfriction: First, the chemical composition plays a dominant role and second, the film roughness. With silicon against DLC, microfriction of hydrogen-free DLC films was greater than the hydrogen containing films. With sapphire counterbodies, microfriction was inversely proportional to film roughness. For all films tested, microfriction was independent of the sliding velocity. Mild wear in the form of scratches was observed only on silicon, while no wear could be detected on any of the DLC films. These results illustrate the utility of implementing microtribological testing in a coating development for microsystems.

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