Abnormal grain growth of sputtered CuNi(Mn) thin films

2000 ◽  
Vol 15 (5) ◽  
pp. 1062-1068 ◽  
Author(s):  
W. Brückner ◽  
V. Weihnacht ◽  
W. Pitschke ◽  
J. Thomas ◽  
S. Baunack
Keyword(s):  
Thin Films ◽  
Grain Growth ◽  
Abnormal Grain Growth ◽  
Temperature Cycle ◽  
X Ray Diffraction ◽  
Transmission Electron ◽  
Columnar Grains ◽  
Maximum Temperatures ◽  
Film Substrate ◽  
20 Nm

The evolution in both stress and microstructure was investigated on sputtered Cu0.57Ni0.42Mn0.01thin films of 400 nm thickness during the first temperature cycle up to 550 °C. Samples from stress–temperature measurements up to various maximum temperatures were analyzed by x-ray diffraction, scanning and transmission electron microscopy, and Auger electron spectroscopy. The columnar grains with lateral diameters of about 20 nm in the as-deposited state coarsen to about 400 nm above 300 °C. Probably due to the impurity (Mn) drag effect, the coarsening occurs by abnormal grain growth rather than by normal grain growth, starting near the film–substrate interface. The stress development results from a combination of densification due to grain growth and plastic stress relaxation.

Evolution of phases and microstructure in optical waveguides of lithium niobate

1994 ◽  
Vol 9 (8) ◽  
pp. 2040-2050 ◽  
Author(s):  
M.A. McCoy ◽  
S.A. Dregia ◽  
W.E. Lee
Keyword(s):  
Solid Solution ◽  
Lithium Niobate ◽  
Grain Growth ◽  
Optical Waveguides ◽  
Abnormal Grain Growth ◽  
Microstructural Development ◽  
X Ray Diffraction ◽  
Rutile Structure ◽  
Transmission Electron ◽  
Epitaxial Grain Growth

The microstructural development of Ti: LiNbO3 optical waveguides, as a function of annealing time and temperature, was studied by x-ray diffraction, scanning and transmission electron microscopy, and Auger electron spectroscopy. The microstructure evolves in three major stages: oxidation, precipitation and abnormal grain growth, and interdiffusion. The deposited Ti film is oxidized at low temperatures through a series of intermediate TiOx phases until complete oxidation to rutile TiO2 occurs at ∼500 °C. At intermediate temperatures, 500-800 °C, epitaxial precipitates of LiNb3O8 are formed at the rutile/LiNbO3 interface. At this stage abnormal grain growth occurs in the rutile film, causing multivariant epitaxy where all of the grains have a single orientation relationship to the substrate. Subsequent interdiffusion between TiO2 and LiNb3O8 produces a solid solution with the rutile structure which, at these temperatures, appears to coexist in equilibrium with the underlying lithium niobate substrate. This rutile solid solution serves as the source of Ti in the final stage of interdiffusion, which occurs only at higher temperatures (≳ 1000 °C), and leads to consumption of the rutile layer by the substrate. Structural models are discussed for epitaxial grain growth and interdiffusion.

Epitaxial growth of PbTiO3 thin films on (001) SrTiO3 from solution precursors

1995 ◽  
Vol 10 (3) ◽  
pp. 680-691 ◽  
Author(s):  
Andreas Seifert ◽  
Fred F. Lange ◽  
James S. Speck
Keyword(s):  
Thin Films ◽  
Stable Phase ◽  
X Ray Diffraction ◽  
Amorphous Precursor ◽  
X Ray ◽  
Force Microscopy ◽  
Atomic Force ◽  
Transmission Electron ◽  
Heat Treated ◽  
Film Substrate

A mixed alkoxide liquid precursor was used to form epitaxial PbTiO3 thin films by spin-coating on cubic (001) SrTiO3 substrates. The films were heat-treated at temperatures between 380 °C/1 h and 800 °C/1 h. X-ray diffraction, atomic force microscopy, scanning and transmission electron microscopy were used to characterize the microstructure of the films and to evaluate the epitaxial phenomena. At ∼400 °C/1 h, a polycrystalline, metastable Pb-Ti fluorite crystallizes from the pyrolyzed amorphous precursor. At slightly higher temperatures (∼420 °C/1 h), the thermodynamically stable phase with the perovskite structure epitaxially nucleates at the film/substrate interface. A small number of epitaxial grains grow through the film toward the surface and consume the nanocrystalline fluorite grains. Coarsening of the perovskite grains leads to a reduction in mosaic spread during further heating. Pores, which concurrently coarsen with grain growth, produce a pitted surface as they disappear from within the film. At 800 °C/1 ha dense epitaxial PbTiO3 film with a smooth surface is observed. Parameters governing the formation of a- and c-domains are discussed as well as the small tilts of the domain axes away from the substrate normal.

Heteroepitaxial Bi2Sr2CaCu2Ox Superconducting thin films Deposited on LaA1O3 by Solid Phase Epitaxy and OMCVD

1992 ◽  
Vol 275 ◽  
Author(s):  
J. Chen ◽  
H. A. Lu ◽  
F. DiMeo ◽  
B. W. Wessels ◽  
D. L. Schulz ◽  
...  
Keyword(s):  
Thin Films ◽  
Solid Phase ◽  
Chemical Vapor ◽  
Superconducting Thin Films ◽  
Epitaxial Thin Films ◽  
Solid Phase Epitaxy ◽  
X Ray Diffraction ◽  
Cross Sectional ◽  
Transmission Electron ◽  
Film Substrate

ABSTRACT-Heteroepitaxial superconducting Bi,Sr2CaCu2Ox (BSCCO 2212) thin films have been formed by solid phase epitaxy from amorphous films deposited on (100) LaA1O3 single crystal substrates by organometallic chemical vapor deposition. The epitaxial structure of the film is confirmed by x-ray diffraction including θ/2θ and Φ (in plane rotation) scans. Cross-sectional high resolution transmission electron microscopy indicates that the film-substrate interface is nearly atomically abrupt. Improvements in superconducting properties of the epitaxial thin films are noted in comparison to highly textured films deposited on MgO.

Synthesis of Magnetic Thin Films on Glass Substrates Using NH3 Vapors

2012 ◽  
Vol 710 ◽  
pp. 762-767
Author(s):  
Pawan Kumar ◽  
Sunil Kumar Khah ◽  
Subhash Chander Katyal ◽  
Rajesh Kumar
Keyword(s):  
Electron Microscopy ◽  
Thin Films ◽  
Exposure Time ◽  
Magnetite Nanoparticles ◽  
Magnetic Thin Films ◽  
X Ray Diffraction ◽  
Glass Substrates ◽  
Transmission Electron ◽  
Low Exposure ◽  
20 Nm

Magnetic thin films in nanometer range have been synthesized on the glass substrates. The synthesis has been carried out using Fe2+ and Fe3+ ions in a PVA solution in H2O. A different approach has been used for the synthesis of the magnetic thin films by using NH3vapors. Obtained films have been characterized by scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray diffraction (XRD) and magnetic property measurement system (MPMS). The size and distribution of the magnetite nanoparticles inside the films depends upon the supply of the NH3 vapor. For large exposure time of NH3 vapors, film contains magnetite nanoparticles of size up to 80 nm. While for low exposure time of NH3 vapors, small magnetite nanoparticles of size nearly 20 nm have been obtained. The particles are independent to each other with no aggregation and are uniformly distributed inside the film.

Synthesis and properties of p-type nitrogen-doped ZnO thin films by pulsed laser ablation of a Zn-rich Zn3N2 target

2007 ◽  
Vol 22 (8) ◽  
pp. 2339-2344 ◽  
Author(s):  
A. Allenic ◽  
W. Guo ◽  
Y.B. Chen ◽  
G.Y. Zhao ◽  
X.Q. Pan ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Pulsed Laser ◽  
Pulsed Laser Ablation ◽  
Zno Thin Films ◽  
Zno Films ◽  
Transmission Electron ◽  
Columnar Grains ◽  
P Type ◽  
20 Nm

Epitaxial ZnO thin films doped uniformly with nitrogen at 1020 atoms/cm3 were fabricated by pulsed laser ablation of a Zn-rich Zn3N2 target. The films grown at 300 °C and annealed at 600 °C in O2 showed p-type conductivity. Two acceptor levels at 105 and 224 meV were determined by temperature-dependent Hall and photoluminescence measurements of the p-type samples. Transmission electron microscopy studies revealed that the p-type ZnO films consist of 10–20 nm columnar grains with a high density of defects and grain boundaries that may facilitate the annihilation of native donors and the activation of acceptors during postdeposition annealing.

On the Role of the Underlying Microstructure on the Mechanical Properties of Microelectromechanical Systems (MEMS) Materials

2000 ◽  
Vol 657 ◽  
Author(s):  
G. F. Dirras ◽  
G. Coles ◽  
A. J. Wagner ◽  
S. Carlo ◽  
C. Newman ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Thin Films ◽  
Mechanical Properties ◽  
Microelectromechanical Systems ◽  
Chemical Vapor ◽  
Xrd Analysis ◽  
Transmission Electron ◽  
Columnar Grains ◽  
Pressure Chemical ◽  
20 Nm

ABSTRACTThe microstructure of Low Pressure Chemical Vapor Deposition (LPCVD) Polycrystalline silicon (Polysilicon) thin films was investigated by means of scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray diffraction (XRD), atomic force microscopy (AFM) and Auger electron spectroscopy (AES). SEM characterization of tensile tested samples showed a brittle like-rupture, along with grooves located at the surface sides of the sample. TEM investigations of as-deposited samples showed equiaxed or fully columnar grains bridging from the bottom to the top of the films. A microstructural coarsening was observed with annealing. In the as-deposited state, the films exhibited a {110} texture as showed by the XRD analysis. The films' top and bottom surfaces were observed to be smooth with a roughness (standard deviation) of about 11nm and 20 nm respectively. A chemical analysis of the thin films showed the presence of carbon and oxygen impurities on the surface and oxygen through the sample as observed in the depth profile. The hypothetical influence of these findings is subsequently discussed in relation to the measured mechanical properties.

Atomic Structure of La067Ca0.33MnO3 Thin Films on LaAlO3

2000 ◽  
Vol 6 (S2) ◽  
pp. 402-403
Author(s):  
H-J. Gao ◽  
C.L. Chen ◽  
X. Fan ◽  
M. Kim ◽  
S.Y. Chen ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Structure ◽  
Perovskite Manganites ◽  
X Ray Diffraction ◽  
Transmission Microscopy ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Film Substrate ◽  
Z Contrast ◽  
Electron Energy Loss

Thin films of doped perovskite manganites of the type R1-X AxMnO3-y are currently become the focus of intense theoretical and experimental research due to their promising technological implications. However, the microstructure of the film and the interface structure at the atomic level remains unclear. In this report, we will present the atomic structure of the film/substrate interface and the microstructure of the film using a combination of transmission electron microscopy (TEM), Z-contrast scanning transmission microscopy (STEM), and electron energy loss spectroscopy (EELS).The La0.67Ca0.33MnO3 (LCMO) samples were grown on (001) LaA1O3 (LAO) using pulsed laser deposition. X-ray diffraction indicated the films to be oriented with the [001] directions parallel to the <001> directions of the pseudo-cubic perovskite LAO. Rocking curve measurements using the (002) reflection from the film indicated a full width half maximum of less than 0.3°. A Philips EM-400 electron microscope at 100 kV and a VG HB603 STEM at 300 kV were employed for sample analysis.

The Morphology of Polytetrafluoroethylene (PTFE) Thin Films Formed by Pulsed-Laser Deposition

1995 ◽  
Vol 385 ◽  
Author(s):  
M. Grant Norton ◽  
Wenbiao Jiang ◽  
J. Thomas Dickinson
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Interface Plane ◽  
X Ray Diffraction ◽  
Transmission Electron ◽  
Film Substrate ◽  
Substrate Temperatures

ABSTRACTThin films of polytetrafluoroethylene have been formed by the pulsed-laser deposition technique. The structure of the films was found to be dependent upon the substrate temperature during deposition. At substrate temperatures from room temperature to 200°C the films were determined, by transmission electron microscopy and X-ray diffraction techniques, to be amorphous. Films formed at higher substrate temperatures were found to contain both amorphous and crystalline components. The data for the crystalline component is consistent with it being highly ordered with the long helical molecular chains aligned parallel to the film-substrate interface plane. The maximum amount of crystalline material occurred when the substrate temperature was close to the melting temperature of the polymer.

Epitaxy and texture analysis of Bi-Sr-Ca-Cu-O thin films on (100) MgO using Transmission Electron Microscopy

1990 ◽  
Vol 48 (4) ◽  
pp. 68-69
Author(s):  
J. T. Sizemore ◽  
D. G. Schlom ◽  
Z. J. Chen ◽  
J. N. Eckstein ◽  
I. Bozovic ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Thin Films ◽  
Transmission Electron Microscopy ◽  
Critical Currents ◽  
Unit Cell ◽  
X Ray Diffraction ◽  
Cell Axis ◽  
Transmission Electron ◽  
Synthesis Procedure

Investigators observe large critical currents for superconducting thin films deposited epitaxially on single crystal substrates. The orientation of these films is often characterized by specifying the unit cell axis that is perpendicular to the substrate. This omits specifying the orientation of the other unit cell axes and grain boundary angles between grains of the thin film. Misorientation between grains of YBa2Cu3O7−δ decreases the critical current, even in those films that are c axis oriented. We presume that these results are similar for bismuth based superconductors and report the epitaxial orientations and textures observed in such films.Thin films of nominally Bi2Sr2CaCu2Ox were deposited on MgO using molecular beam epitaxy (MBE). These films were in situ grown (during growth oxygen was incorporated and the films were not oxygen post-annealed) and shuttering was used to encourage c axis growth. Other papers report the details of the synthesis procedure. The films were characterized using x-ray diffraction (XRD) and transmission electron microscopy (TEM).

Palladium Nanowire Thin Films via Template Growth

2003 ◽  
Vol 775 ◽  
Author(s):  
Donghai Wang ◽  
David T. Johnson ◽  
Byron F. McCaughey ◽  
J. Eric Hampsey ◽  
Jibao He ◽  
...  
Keyword(s):  
Thin Film ◽  
Electron Microscopy ◽  
Thin Films ◽  
X Ray Diffraction ◽  
X Ray ◽  
Transmission Electron ◽  
Conductive Substrate ◽  
Palladium Nanowires ◽  
Efficient Route ◽  
Silica Thin Film

AbstractPalladium nanowires have been electrodeposited into mesoporous silica thin film templates. Palladium continually grows and fills silica mesopores starting from a bottom conductive substrate, providing a ready and efficient route to fabricate a macroscopic palladium nanowire thin films for potentially use in fuel cells, electrodes, sensors, and other applications. X-ray diffraction (XRD) and transmission electron microscopy (TEM) indicate it is possible to create different nanowire morphology such as bundles and swirling mesostructure based on the template pore structure.

Sign in / Sign up

Export Citation Format

Share Document