Thin Film Cracking and Ratcheting Caused by Temperature Cycling

2000 ◽  
Vol 15 (6) ◽  
pp. 1239-1242 ◽  
Author(s):  
M. Huang ◽  
Z. Suo ◽  
Q. Ma ◽  
H. Fujimoto

Layered materials are susceptible to failure upon temperature cycling. This paper describes an intriguing mechanism: cracking in a brittle layer caused by ratcheting in an adjacent ductile layer. For example, on a silicon die directly attached to an organic substrate, cracking often occurs in the silicon nitride film over aluminum pads. The silicon die and the organic substrate have different thermal expansion coefficients, inducing shear stresses at the die corners. Aided by cycling temperature, the shear stresses cause ratcheting in the aluminum pads. Incrementally, the stress relaxes in the aluminum pads and builds up in the overlaying silicon nitride film, leading to cracks.

1999 ◽  
Vol 594 ◽  
Author(s):  
T. Y. Zhang ◽  
Y. J. Su ◽  
C. F. Qian ◽  
M. H. Zhao ◽  
L. Q. Chen

AbstractThe present work proposes a novel microbridge testing method to simultaneously evaluate the Young's modulus, residual stress of thin films under small deformation. Theoretic analysis and finite element calculation are conducted on microbridge deformation to provide a closed formula of deflection versus load, considering both substrate deformation and residual stress in the film. Silicon nitride films fabricated by low pressure chemical vapor deposition on silicon substrates are tested to demonstrate the proposed method. The results show that the Young's modulus and residual stress for the annealed silicon nitride film are respectively 202 GPa and 334.9 MPa.


2012 ◽  
Vol 2012 (DPC) ◽  
pp. 001579-001596
Author(s):  
Matthew Stahley ◽  
John Osenbach ◽  
Brenda Gogue ◽  
Byong Il Heo ◽  
Byung Cheol Lee ◽  
...  

Temperature cycling is an important reliability qualification test given the differences in thermal expansion coefficients for the materials in integrated circuit packages. In this work, leadfree Plastic-Ball-Grid-Array (PBGA) packages with embedded C1100 copper heatspreaders were exposed to standard qualification testing including MSL3 Moisture Preconditioning with leadfree reflows at 245C followed by Temperature Cycling (TC) with ranges of −55/+125C (TC-B) and 0/+125C (TC-K) per JEDEC JESD47. Electrical performance and package warpage were characterized on as-received, post-preconditioning, and post-TC devices. After 200 cycles TC-B, gross electrical open failures were found on a large percentage of devices in some package lots. Physical failure analysis of the open failures revealed severe package warpage, as high as 20mils on a 31mm package. The severe warpage was accompanied by delamination and sheared wires. In contrast other package lots did not show failures nor severe warpage (<6mils) even after 1000 cycles of TC-B. The same package and BOM was qualified with 225C reflows for eutectic lead/tin solder with no warpage or failures after TC. Detailed commonality studies revealed that the copper heatspreader lot used was the only definitive difference between “good” and “warped” package lots. It was found that for “warped” lots exposure to the leadfree reflow at 245C caused a significant reduction in the micro-hardness of the copper heatspreader, while there was minimal change in micro-hardness after exposure to leadfree reflow in the “good” lots. The mechanism for this change is explained by the softening temperature of the C1100 copper heatspreader which is well within the range of leadfree reflows. Above this softening temperature, re-crystallization and grain growth occur, which result in susceptibility to permanent warpage induced by temperature cycling. Control of this warpage is critical to qualifying temperature cycling performance for heatspreader PBGA packages, and this can be achieved through micro-hardness screening of the heatspreaders.


1994 ◽  
Vol 3 (9) ◽  
pp. 682-689 ◽  
Author(s):  
Chen Jun-fang ◽  
Cheng Shao-yu ◽  
Ren Zhao-xing ◽  
Zhang Su-qing ◽  
Ning Zhao-yuan ◽  
...  

1971 ◽  
Vol 10 (12) ◽  
pp. 1675-1679 ◽  
Author(s):  
Hiroshi Ogawa ◽  
Tatau Nishinaga ◽  
Masanobu Kasuga ◽  
Tetsuya Arizumi

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