Mechanism of Cu removal during CMP in H2O2-glycine based slurries

Hydroxyl radical generation has been observed during Cu CMP using hydrogen peroxide-glycine based slurries. While the Cu dissolution/polish rates increased with increasing glycine concentration, the copper dissolution rate decreased with increasing peroxide concentration indicating the occurrence of both dissolution and passive film formation during CMP. This is further confirmed by both in situ and ex situ electrochemical experiments.

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Insights into the Role of In-situ and Ex-situ Hydrogen Peroxide for Enhanced Ferrate(VI) Towards Oxidation of Organic Contaminants

Water Research ◽

10.1016/j.watres.2021.117548 ◽

2021 ◽

pp. 117548

Author(s):

Mengfan Luo ◽

Hongyu Zhou ◽

Peng Zhou ◽

Leiduo Lai ◽

Wen Liu ◽

...

Keyword(s):

Hydrogen Peroxide ◽

Organic Contaminants ◽

Ex Situ

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A novel porous-carbon-based hollow fiber membrane with electrochemical reduction mediated by in-situ hydroxyl radical generation for fouling control and water treatment

Applied Catalysis B Environmental ◽

10.1016/j.apcatb.2019.117772 ◽

2019 ◽

Vol 255 ◽

pp. 117772 ◽

Cited By ~ 8

Author(s):

Yue Yang ◽

Sen Qiao ◽

Jiti Zhou ◽

Xie Quan

Keyword(s):

Water Treatment ◽

Hydroxyl Radical ◽

Electrochemical Reduction ◽

Hollow Fiber ◽

Porous Carbon ◽

Hollow Fiber Membrane ◽

Fiber Membrane ◽

Fouling Control ◽

Radical Generation

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Fenton/Fenton-like processes with in-situ production of hydrogen peroxide/hydroxyl radical for degradation of emerging contaminants: Advances and prospects

Journal of Hazardous Materials ◽

10.1016/j.jhazmat.2020.124191 ◽

2021 ◽

Vol 404 ◽

pp. 124191 ◽

Cited By ~ 5

Author(s):

Yong Liu ◽

Yang Zhao ◽

Jianlong Wang

Keyword(s):

Hydrogen Peroxide ◽

Hydroxyl Radical ◽

Emerging Contaminants ◽

Production Of Hydrogen ◽

In Situ Production

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(Keynote) Recent Progress in Nanoscale Understanding of Surface Oxide Film Formation, Properties and Breakdown on Metals and Alloys Using in Situ and Ex Situ Characterization Methods

ECS Meeting Abstracts ◽

10.1149/ma2016-02/10/1143 ◽

2016 ◽

Keyword(s):

Oxide Film ◽

Recent Progress ◽

Film Formation ◽

Metals And Alloys ◽

Surface Oxide ◽

Ex Situ ◽

Surface Oxide Film ◽

Characterization Methods

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Study on Degradation of Nitrobenzene in Groundwater by Fenton-Like Oxidation Based on Iron in Aquifer Materials

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.183-185.516 ◽

2011 ◽

Vol 183-185 ◽

pp. 516-521 ◽

Cited By ~ 1

Author(s):

Meng Sun ◽

Yong Sheng Zhao ◽

Jun Dong ◽

Li Li Dong

Keyword(s):

Hydroxyl Radical ◽

Contaminated Sites ◽

Contaminated Site ◽

Generation Process ◽

High Efficient ◽

Good Potential ◽

Three Stages ◽

Radical Generation ◽

Extraction Agent

Fenton and Fenton-like reactions are regarded as high efficient methods in advanced treatment of nitrobenzene wastewater but both restrained in degradation of nitrobenzene in groundwater because of the low pH condition( less than 4 ) requirement and other problems such as secondary pollution by the irons in contaminated sites. This paper reports a new Fenton-like technology combined irons extraction from aquifer materials which were found in a nitrobenzene contaminated site in China with hydrogen peroxide catalytic oxidation. The simulate experiments were conducted to investigate the oxidation of nitrobenzene in groundwater by this method under the condition of neutral pH and 8~10°C. The comparison of different extraction agent and production rule of hydroxyl radical were both studied in this research. The results indicated that extraction had hysteresis property because the highest extracting efficiency occurred after 36h. Extraction agent DCB has the highest efficiency, for Fe3+ was 62.92% and Fe2+ was 30.17%. The highest removal efficiency could reach 80.2% while the mole ratio of nitrobenzene to H2O2 was 1:200. Three stages could found in hydroxyl radical generation process, in the first stage hydroxyl radical generated rapidly in 0~30min, then decreased slowly between 30min and 120min, at last the generation tended to be steady after 120h. The results could possess a good potential for application in the treatment of nitrobenzene contaminated groundwater and provide theoretical basis on in-situ chemical remediation technology of nitrobenzene contaminated sites.

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Applications of Raman Spectroscopy in Cu CMP: In-situ Detection of Chemical Species in the Slurry

MRS Proceedings ◽

10.1557/proc-0914-f12-02 ◽

2006 ◽

Vol 914 ◽

Author(s):

Siddartha Kondoju ◽

Pierre Lucas ◽

Srini Raghavan ◽

Paul Fischer ◽

Mansour Moinpour ◽

...

Keyword(s):

Hydrogen Peroxide ◽

Raman Spectroscopy ◽

Continuous Flow ◽

Corrosion Inhibitors ◽

Chemical Species ◽

Spectroscopic Techniques ◽

Paper Work ◽

In Situ Detection ◽

Cu Cmp

AbstractSlurries used for copper CMP have a rich chemistry, which may change during the course of polishing due to consumption and decomposition of molecular species. Various aspects, such as small layer thickness (<50 μm), continuous flow of the slurry, and dynamics of the film removal process pose great challenge to the monitoring of slurry components between the pad and the wafer. The slurry constituents such as oxidants and corrosion inhibitors have unique signatures that can be detected using spectroscopic techniques. In this paper, work carried out to explore the use of Raman spectroscopy to detect and quantitate chemical species such as hydroxylamine, benzotriazole and hydrogen peroxide in-situ will be presented. More detailed study pertaining to the protonation of hydroxylamine with respect to the pH will also be presented. An abrasion cell integrated with a Raman spectrometer was used to make the measurements.

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