SiC Thin Films by Chemical Conversion of Single Crystal Si
Keyword(s):
X Ray
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AbstractThe reaction of (100)Si with C2H2 in a hot wall CVD reactor has been studied using a X-ray photolectron spectroscopy, and a scanning electron microscopy. The growth of the SiC films was observed through the behavior of Si2p peaks and their plasmons. Smooth surface morphology with a monolayer of SiC was obtained at 950°C for 7 minutes and defects were observed for longer reaction times at this temperature. For higher reaction temperatures (e.g. 1000°C), defects were observed for reaction times as short as 10 seconds. The formation of defects was correlated to the out-diffusion of Si in the carborization process.
2013 ◽
Vol 275-277
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pp. 1998-2001
Keyword(s):
2011 ◽
Vol 183-185
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pp. 1837-1841
1990 ◽
Vol 04
(05)
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pp. 369-373
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2015 ◽
Vol 1088
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pp. 81-85
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