Impact Ionization, Degradation, and Breakdown in SiO2
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ABSTRACTDestructive breakdown in silicon dioxide is shown to be strongly correlated to the oxide degradation caused by hot-electron-induced defect production and charge trapping ner the interfaces of the films. Two well defined transitions in the chargc-to-breakdown data as a function of field and oxide thickness are shown to coincide with the onset of mechanisms due to trap creation and impact ionization by electrons with energies exceeding 2 and 9 eV (the SiO2 bandgap energy), respectively. The temperature dependence of charge-to-breakdown is also shown to be consistent with that of these two defect-producing mechanisms.
1997 ◽
Vol 44
(2)
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pp. 288-296
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2003 ◽
Vol 50
(10)
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pp. 2027-2031
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1975 ◽
Vol 17
(11)
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pp. 1397-1400
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