Effect of Surface and Grain-Boundary Diffusion on Interconnect Reliability
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AbstractThe effect of surface and grain-boundary diffusion on interconnect reliability is addressed by extending the theory of thermal grooving to arbitrary grain-boundary flux. For a periodic array of grain boundaries, three regimes are identified: (1) equilibrium, (2) global steady state, and (3) local steady state. These regimes govern the stability of polycrystalline materials subjected to large electric (electromigration) or mechanical (stress voiding) fields, especially in thin films where grain size approximates film thickness.
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2005 ◽
Vol 66
(10)
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pp. 1820-1827
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2007 ◽
Vol 345-346
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pp. 565-568
2007 ◽
pp. 595-600
1995 ◽
Vol 38
(4)
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pp. 581-587
1974 ◽
Vol 24
(3)
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pp. 343-346
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